JPS58188915A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPS58188915A
JPS58188915A JP6594582A JP6594582A JPS58188915A JP S58188915 A JPS58188915 A JP S58188915A JP 6594582 A JP6594582 A JP 6594582A JP 6594582 A JP6594582 A JP 6594582A JP S58188915 A JPS58188915 A JP S58188915A
Authority
JP
Japan
Prior art keywords
piezoelectric body
conductor layer
thickness
conductor layers
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6594582A
Other languages
Japanese (ja)
Inventor
Sumio Yamada
澄夫 山田
Yoshiaki Fujiwara
嘉朗 藤原
Hiroshi Hoshino
弘 星野
Noboru Wakatsuki
昇 若月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6594582A priority Critical patent/JPS58188915A/en
Priority to EP83300872A priority patent/EP0088548B1/en
Priority to US06/467,810 priority patent/US4454444A/en
Priority to DE8383300872T priority patent/DE3377043D1/en
Publication of JPS58188915A publication Critical patent/JPS58188915A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/13Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Abstract

PURPOSE:To increase a Q group and to reduce spuriousness by constituting electrode patterns on the opposed main surfaces, and adhering conductor layers which connect the electrode patterns to outside of a piezoelectric body to the end part of the piezoelectric body opposed to one end part. CONSTITUTION:A couple of T-shaped electrode patterns 12 and 12' are vapor- deposited on the opposite main surfaces of the piezoelectric body 11 which is made of a rectangularly sectioned bar of lithium tantalate and has a length L in the longitudinal direction and a thickness T. Two couples of conductor layers 13 and 13', and 14 and 14' which have thickness (t) and width (w) are printed at lengthwise main surface end parts of the piezoelectric body 11. Further, the conductor layers 15 and 16 for connecting the conductor layers 13 and 13', and 14 and 14' are adhered to the piezoelectric body end parts to complete an oscillator 1. The thickness t/T of the conductor layers 13 and 13', and 14 and 14' is lilmited to 0.27-0.43 and the width (w) is limited to <0.06 to improve the performance.

Description

【発明の詳細な説明】 (a)  発明の技術分野 本発明は圧電体に形成された電極パターンを外部接続す
るため、圧を体端部に導体層を被着した圧電振動子のス
プリアス及びQ値を改善する構造に関する。
Detailed Description of the Invention (a) Technical Field of the Invention The present invention aims to connect an electrode pattern formed on a piezoelectric body to the outside by reducing the spurious and Q Concerning structures that improve value.

(b)  技術の背景 従来より、水晶やタンタル酸リチウム(t,iTsOs
)などの圧電物質を用い九圧電振動子は、小型高性能で
あるため通信機等の発振回路、或いはフィルタとして広
く用いられている。
(b) Technical background Traditionally, quartz and lithium tantalate (t,iTsOs)
Piezoelectric vibrators using piezoelectric materials such as ) are small and have high performance, and are widely used as oscillation circuits or filters in communication devices and the like.

(C)  従来技術と問題点 第1図はLiTaO2の単結晶にてなる振動素子を支持
するス} IJタップ厚みすペリ振動子の従来構造を示
した側面図である。
(C) Prior Art and Problems FIG. 1 is a side view showing the conventional structure of an IJ tap thickness peri-vibrator that supports a vibrating element made of a single crystal of LiTaO2.

第1図におび・振動素子1は矩形断面0棒状圧電体2の
対向主面に蒸着手段で電接パターン高部ち図示正面及び
裏面の中央部からそれぞれ対称方向へ延長する丁字形電
極パターン3及び3′が形成されている。そして、電極
パターン3及び3′の延長端近傍には導電性接着剤4を
介して1対の支持導紳5の一端がそれぞれ固着され,各
導II5の他端はパッケージ基体6tー貫通して固着さ
れた1対のリード端子7の上端部にそれぞれ固着し九の
ち、キャップ8の開口縁が基体60周縁部に密着されて
図示振動子が完成される。
In FIG. 1, a vibrating element 1 has a rectangular cross-section 0 rod-shaped piezoelectric body 2, and on its opposite main surface, an electrically connected pattern is formed by vapor deposition on the high part, and a T-shaped electrode pattern 3 extends in symmetrical directions from the center of the front and back surfaces shown in the figure. and 3' are formed. One end of a pair of support conductors 5 is fixed to the vicinity of the extended ends of the electrode patterns 3 and 3' via a conductive adhesive 4, and the other end of each conductor II 5 penetrates through the package base 6t. After fixing to the upper ends of the pair of lead terminals 7, the opening edge of the cap 8 is brought into close contact with the periphery of the base 60, thereby completing the illustrated vibrator.

しかし、かかる従来構成になる振動子は、スプリアス及
びQ値(等価直列抵抗値Rs)のばらつきが製造歩留り
を低下させる一要因となっており、「− その対策が望まれてい不。
However, in the vibrator having such a conventional configuration, spurious waves and variations in Q value (equivalent series resistance value Rs) are factors that reduce manufacturing yield, and countermeasures are not desired.

(d)  発明の目的 本発明の目的は上記欠点を除去することであり、該除去
は振動素子の端部に接着する接着剤(導体層)に着目し
てなされた。
(d) Object of the Invention The object of the present invention is to eliminate the above-mentioned drawbacks, and this was accomplished by focusing on the adhesive (conductor layer) that adheres to the end of the vibrating element.

(e)  発明の構成 そして上記目的は、対向電極パターンを圧電体の外部へ
接続する導体層が一方に対向する圧電体端部それぞれに
被着され、該導体層の圧電体主面子により達成される。
(e) Structure of the invention and the above object are achieved by a conductor layer connecting the counter electrode pattern to the outside of the piezoelectric body, which is attached to each of the ends of the piezoelectric body facing one side, and the main surface of the piezoelectric body of the conductor layer. Ru.

(f)  発明の実施例 以下、本発明の実施例に係わる図面を用いて本発明を説
明する。
(f) Embodiments of the invention The present invention will be described below using drawings relating to embodiments of the invention.

第2図は本発明の−ψ施例になる振動素子を説明するた
めの斜視図、第3図は本発明の一方を裏付ける実測結果
とし、て第2図に示した導体層の埋さt(ylさ比t/
T)K対するQ値及び直列共振抵抗R1を斤す図、第4
図は本発明の他方を裏付ける実測結果として第2図に示
した導体層の幅W(幅比W/L)に対するQ値を示す図
、第5図は前記振動素子の導体層厚さ比t/Tを0.1
とした振動子の周波数特性を示す図、第6図は前記振動
素子の導体層厚さ比t/’l’を0.36とした振動子
の周e、数特性を示す図である。
FIG. 2 is a perspective view for explaining a vibrating element which is a -ψ embodiment of the present invention, and FIG. 3 is an actual measurement result supporting one aspect of the present invention. (yl ratio t/
T) Diagram showing Q value and series resonant resistance R1 versus K, 4th
The figure is a diagram showing the Q value with respect to the width W (width ratio W/L) of the conductor layer shown in Figure 2 as an actual measurement result supporting the other aspect of the present invention, and Figure 5 is a diagram showing the conductor layer thickness ratio t of the vibrating element. /T0.1
FIG. 6 is a diagram showing the frequency characteristics of the vibrator when the conductor layer thickness ratio t/'l' of the vibrating element is 0.36.

第2図イにおいて、LiTa0aにてなる矩形断面の棒
状であり長手方向長さがLで厚さをTとした圧電体11
の対向主面には、′第1図に示した振動素子1と同様な
1対の丁字形電極パターン12及び12′が蒸着手段で
形成される。
In FIG. 2A, a piezoelectric body 11 made of LiTa0a and having a rod shape with a rectangular cross section and a longitudinal length L and a thickness T.
A pair of T-shaped electrode patterns 12 and 12' similar to those of the vibrating element 1 shown in FIG.

次いで第2図口に示す如く、圧電体11の長手方向主面
端部には、厚さがtで幅をWとした2対     ゛の
導体層13と13′及び14と14′が印刷手段で被着
形成される。ただし、導体層】3は電極パターン12の
端部に積重し、導体層14′J’t−を電極パターン1
2′の端部に積重されている。
Next, as shown in the opening of FIG. 2, two pairs of conductor layers 13 and 13' and 14 and 14', each having a thickness of t and a width of W, are formed on the end of the main surface in the longitudinal direction of the piezoelectric body 11 by printing means. It is deposited and formed. However, the conductor layer] 3 is stacked on the end of the electrode pattern 12, and the conductor layer 14'J't- is stacked on the end of the electrode pattern 12.
2' end.

さらに次いで、第2図ハに示す如く導体層13と13′
並びに14と14′とをそれぞれ接続する導体層15と
16が圧電体端部に林着されて振動素子17が完成する
Furthermore, as shown in FIG. 2C, the conductor layers 13 and 13'
Further, conductor layers 15 and 16 connecting 14 and 14', respectively, are attached to the ends of the piezoelectric body to complete the vibrating element 17.

なお、導電性ペースト(例えば銀ペースト)を印刷・構
成してなる導体層13と13′並びに14と14′の厚
さ重と幅Wri、後述する実験結果に基づ^、叩さ比t
/Tが約027〜043であり幅比W/Lを0.06以
下にしである。また、振動素子17F′i図示しない振
動子パッケージの基板等に搭載され、該基板等に形成さ
れた1対の電極、又は一端を固着した支持導線(第1図
の5に和尚)が導体層15及び16を介して電極パター
ン12及び12′にそれぞれ接続されるが、該接続は導
電性ペーストを塗着・焼成しCなる導体層15と16の
形成と同時化することができる。そして、該基板等に第
1図のキャップ8と同等のキャップを搭載して圧を桐動
子が完成される。
In addition, the thickness, weight, and width Wri of the conductive layers 13 and 13' and 14 and 14' printed and composed of conductive paste (for example, silver paste) are determined based on the experimental results described later^, and the beating ratio t.
/T is approximately 027 to 043, and the width ratio W/L is 0.06 or less. In addition, the vibrating element 17F'i is mounted on a substrate, etc. of a vibrator package (not shown), and a pair of electrodes formed on the substrate, etc., or a support conductor (indicated by 5 in FIG. 1) with one end fixed, is a conductor layer. They are connected to the electrode patterns 12 and 12' through the electrode patterns 15 and 16, respectively, and this connection can be made at the same time as forming the conductor layers 15 and 16 by applying and baking a conductive paste. Then, a cap equivalent to the cap 8 of FIG. 1 is mounted on the substrate, etc., and the paulownia rotor is completed.

第3図は導体層の厚さ比t/Tを横軸にとり。In Figure 3, the horizontal axis represents the thickness ratio t/T of the conductor layer.

左方の縦軸には振動子の機械的品質係数であるQ値を、
右方の縦軸にVi直列共振抵抗Rsをそれぞれにとり、
実測1結果による曲線Aによりt/TとQの関係を、曲
@Bによりt/TとRsの関係を示した。ただし、使用
した圧電体FiLITso31iC。
The vertical axis on the left shows the Q value, which is the mechanical quality factor of the vibrator.
The Vi series resonant resistance Rs is taken on the right vertical axis, and
Curve A based on the results of actual measurement 1 shows the relationship between t/T and Q, and curve @B shows the relationship between t/T and Rs. However, the piezoelectric material used was FiLITso31iC.

てなり主面長さしが811.主面幅が17目、厚さTが
0.55flであり、導体幅比W/Lが0.05である
The main surface length is 811. The main surface width is 17 stitches, the thickness T is 0.55 fl, and the conductor width ratio W/L is 0.05.

第3図において、Q特性Aは厚さ比t/’l’が018
のときQ値は約3750の最低値を示し2、Q値の目柳
値である5000層上Fit/Tが0.11以下及び約
0.27〜046の1囲にあるものとなる。一方、Rs
特特性上t/’l”が0.18のと@R−N値は45Ω
の最高値を示し、R3#の目4]1値である30Ω以下
となるt /TFi約0.29〜0.42の範囲にある
ものである。従って、t/Tが約0829〜042のと
き、Q値とRs値の双方は目柳値を満足する振動子が得
られる。
In Figure 3, the Q characteristic A has a thickness ratio t/'l' of 018
In this case, the Q value shows the lowest value of about 3750, which is 2, and the Q value of 5000 layer Fit/T is 0.11 or less and in the range of about 0.27 to 046. On the other hand, Rs.
Due to the characteristics, when t/'l'' is 0.18, @R-N value is 45Ω
t/TFi is in the range of about 0.29 to 0.42, showing the highest value of 30 Ω or less, which is the R3 # 4]1 value. Therefore, when t/T is about 0829 to 042, a vibrator is obtained in which both the Q value and the Rs value satisfy the Meyanagi value.

第4図は圧電体の圧電体長さLと導体層幅Wとの比W/
Lを横軸にとり、縦軸KQ値をとり実測結果による曲線
CによりW/LとQの関係を示した。
Figure 4 shows the ratio W/ of the piezoelectric length L of the piezoelectric body and the conductor layer width W.
The relationship between W/L and Q is shown by a curve C based on actual measurement results, with L on the horizontal axis and KQ value on the vertical axis.

第4図において、Q特性ch導体幅比W/Lが約006
以下のときQ値がほぼ−・定し、て6000で1)す、
W/Lが0.06より大きくなると急激に低下する。従
って、W/Lを、0806以下とすることにより良いQ
値が確保されることになる。
In Figure 4, the Q characteristic channel conductor width ratio W/L is approximately 006
In the following cases, the Q value is almost constant, and at 6000 1)
When W/L becomes larger than 0.06, it rapidly decreases. Therefore, it is better to set W/L to 0806 or less.
The value will be guaranteed.

第5図は導体層厚さ比t/Tを01とした振動才子を用
いて振動子を作成し、その周波数特性を曲[Dで示した
ものであり、横軸に周波′P1.(MHz)を、縦軸に
応答レベル(dB)をとっである。
In FIG. 5, a vibrator was created using a vibrator with a conductor layer thickness ratio t/T of 01, and its frequency characteristics are shown as a curve [D], and the horizontal axis represents the frequency 'P1. (MHz) and the response level (dB) is plotted on the vertical axis.

プ そして、周波数特性りには有害なスイリアス26が記録
されている。
Also, harmful Suirius 26 is recorded in the frequency characteristics.

他方第6図は導体層厚さ比t/’l’を036とした振
動子の周波[特性を白組!Eで示したものであり、横軸
及び縦軸は第5図のそれと同じにとった第6図において
、曲#8Eは第5し1の曲線−りに見ら才またスプリア
スが解消し、かつ定(U先の低下がみもれる、 (g)  発明の効果 以上1明し九如く本発明になる圧電振動子は、圧電体端
部に被着する導体層を規定することにより、Q値に優れ
スプリアスの少ないものとなり、高品質で安定した性畦
が確保される効果は大1へ
On the other hand, Fig. 6 shows the frequency of the vibrator when the conductor layer thickness ratio t/'l' is 036 [Characteristics are shown in white group! In FIG. 6, where the horizontal and vertical axes are the same as those in FIG. (g) Effect of the Invention As explained above, the piezoelectric vibrator of the present invention has a Q It has excellent value and less spurious, and the effect of ensuring high quality and stable sexual ridges is the best.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来構成になるストリップ型圧電振動子の一部
を破断した側面図、第2図は本発明の一実施例を説明す
るための斜ネP図、第3図は第2図にした導体層の厚さ
tに対するQ値及び直列共振抵抗Rsを示す図、!4図
は1記導体層の幅Wに対するQ値を示す図、第5図は圧
電体の厚さTと導体層の厚さ1との比を01とした振動
子の周波数特性を示す図、第6図は圧電体の長さしと導
体層の幅Wとの比to、36とした振動子の周波計時を
示す図である。 なお、図中において1.17け圧wry子、2゜11は
圧電体、3. 3’、  12. 12’は電極パター
ン、13,1π、14.14’は圧電体端部の導体層、
Lは圧電体の長さ、Tは圧電体の厚さ、tVi端部導体
層の厚さ、WFi端部導体層の幅を示す。 晃1図 第3 図 0  θθqO,1θ  θ27   θ’;6 0.
lL5  θ9f/T
Fig. 1 is a partially cutaway side view of a strip type piezoelectric vibrator having a conventional configuration, Fig. 2 is an oblique P view for explaining an embodiment of the present invention, and Fig. 3 is the same as Fig. 2. A diagram showing the Q value and series resonant resistance Rs with respect to the thickness t of the conductor layer. FIG. 4 is a diagram showing the Q value with respect to the width W of the conductor layer 1, FIG. FIG. 6 is a diagram showing frequency timing of a vibrator with a ratio to of 36 between the length of the piezoelectric body and the width W of the conductor layer. In addition, in the figure, 1.17 is a pressure wry element, 2°11 is a piezoelectric body, and 3. 3', 12. 12' is an electrode pattern, 13, 1π, 14.14' is a conductor layer at the end of the piezoelectric body,
L is the length of the piezoelectric body, T is the thickness of the piezoelectric body, the thickness of the tVi end conductor layer, and the width of the WFi end conductor layer. Figure 1 Figure 3 Figure 0 θθqO, 1θ θ27 θ'; 6 0.
lL5 θ9f/T

Claims (2)

【特許請求の範囲】[Claims] (1)対向主面にそれぞれ電極パターンが形成された圧
電体の厚みすべり振動モードを利用したストップ型振動
子において、それぞれの電極パターンを圧電体の外部へ
接続する導体層が一方に対向する圧電体端部それぞれに
被着され、該導体層の圧する圧電振動子。
(1) In a stop-type vibrator that utilizes the thickness-shear vibration mode of a piezoelectric material in which electrode patterns are formed on each of the opposing principal surfaces, a conductor layer that connects each electrode pattern to the outside of the piezoelectric material is a piezoelectric material that faces one side. A piezoelectric vibrator is attached to each end of the body and is pressed by the conductor layer.
(2)前記導体層が前記圧電体主面を被覆する幅は、圧
電体の導体層対向方向長さの6チ以下にしたととを特徴
とする特許 した圧電振動子。
(2) A patented piezoelectric vibrator characterized in that the width of the conductor layer covering the main surface of the piezoelectric body is 6 inches or less of the length of the piezoelectric body in the direction in which the conductor layer faces.
JP6594582A 1982-02-22 1982-04-20 Piezoelectric oscillator Pending JPS58188915A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6594582A JPS58188915A (en) 1982-04-20 1982-04-20 Piezoelectric oscillator
EP83300872A EP0088548B1 (en) 1982-02-22 1983-02-18 Piezoelectric resonators
US06/467,810 US4454444A (en) 1982-02-22 1983-02-18 LiTaO3 Piezoelectric resonator
DE8383300872T DE3377043D1 (en) 1982-02-22 1983-02-18 Piezoelectric resonators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6594582A JPS58188915A (en) 1982-04-20 1982-04-20 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS58188915A true JPS58188915A (en) 1983-11-04

Family

ID=13301611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6594582A Pending JPS58188915A (en) 1982-02-22 1982-04-20 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS58188915A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284224U (en) * 1985-11-11 1987-05-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284224U (en) * 1985-11-11 1987-05-29

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