JPS58184838U - Processing tank - Google Patents
Processing tankInfo
- Publication number
- JPS58184838U JPS58184838U JP8174782U JP8174782U JPS58184838U JP S58184838 U JPS58184838 U JP S58184838U JP 8174782 U JP8174782 U JP 8174782U JP 8174782 U JP8174782 U JP 8174782U JP S58184838 U JPS58184838 U JP S58184838U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- processing tank
- utility
- rinsing
- processing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来の処理槽を示す断面図、第２図ａ、
ｂは、本考案の処理槽を用いた水洗工程を示 。
す工程断面図、第３図は、本考案の処理槽の斜視図であ
る。
１・・・・・・被洗浄物であるシリコン・ウェハ、３・
・・・・・洗浄槽、５・・・・・・給水口、６・・・・
・・水面に浮ぶ浮遊物、７・・・・・・回転軸、１０・
・・・・・ストッパー、１１・・・・・・洗浄槽の一端
にある皿部。Figure 1 is a sectional view showing a conventional treatment tank, Figure 2a,
b shows the water washing process using the treatment tank of the present invention. FIG. 3 is a perspective view of the processing tank of the present invention. 1...Silicon wafer as the object to be cleaned, 3.
...Washing tank, 5...Water supply port, 6...
... Floating objects on the water surface, 7 ... Rotation axis, 10.
...Stopper, 11...Dish part at one end of the cleaning tank.
Claims (2)
位置から所定位置において支持する支持部、と、前記水
洗槽を所定傾斜角度で固定するストッパーを備え、必要
に応じて前記水洗槽を傾斜することを特徴とする処理槽
。(1) A rinsing tank that stores a processing liquid, a support part that supports the rinsing tank from an upright position to a predetermined position, and a stopper that fixes the rinsing tank at a predetermined angle of inclination. A treatment tank characterized in that the washing tank is tilted.
とを特徴とする実用新案登録請求の範囲第１項に記載の
処理槽。(2) The processing tank according to claim 1, which has been registered as a utility model, and has a dish-shaped protrusion on the processing liquid discharge side of the washing tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8174782U JPS58184838U (en) | 1982-06-01 | 1982-06-01 | Processing tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8174782U JPS58184838U (en) | 1982-06-01 | 1982-06-01 | Processing tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58184838U true JPS58184838U (en) | 1983-12-08 |
Family
ID=30090839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8174782U Pending JPS58184838U (en) | 1982-06-01 | 1982-06-01 | Processing tank |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58184838U (en) |
-
1982
- 1982-06-01 JP JP8174782U patent/JPS58184838U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01104022U (en) | ||
| JPS58184838U (en) | Processing tank | |
| JPS6233315Y2 (en) | ||
| JPS6096825U (en) | cleaning brush | |
| JPS6130463U (en) | Ultrasonic cleaning machine basket | |
| JPH0379872U (en) | ||
| JPS61189647A (en) | Wafer boat for washing semiconductor wafer | |
| JPS5951588U (en) | Detergent dissolving device | |
| JPS6114961U (en) | Dishwasher | |
| JPH0373437U (en) | ||
| JPS5980050U (en) | Wall treatment liquid press-in device | |
| JPS60183437U (en) | Semiconductor wafer etching tools | |
| JPH0325235U (en) | ||
| JPS5848376U (en) | Steam tank structure of automatic cleaning equipment | |
| JPS639287U (en) | ||
| JPS5923733U (en) | Surface treatment tank | |
| JPS63127126U (en) | ||
| JPS6142519U (en) | eyeglass cleaner | |
| JPS59177942U (en) | Wafer cleaning equipment | |
| JPS5849437U (en) | Substrate surface treatment equipment | |
| JPH02132941U (en) | ||
| JPS61149330U (en) | ||
| JPH02132942U (en) | ||
| JPH0171441U (en) | ||
| JPH0247031U (en) |