JPS58182604A - 回折格子作製法 - Google Patents

回折格子作製法

Info

Publication number
JPS58182604A
JPS58182604A JP57066585A JP6658582A JPS58182604A JP S58182604 A JPS58182604 A JP S58182604A JP 57066585 A JP57066585 A JP 57066585A JP 6658582 A JP6658582 A JP 6658582A JP S58182604 A JPS58182604 A JP S58182604A
Authority
JP
Japan
Prior art keywords
diffraction grating
exposure
transparent body
angle
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57066585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310801B2 (enExample
Inventor
Yoshikazu Nishiwaki
西脇　由和
Haruji Matsuoka
松岡　春治
Kenji Okamoto
賢司 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP57066585A priority Critical patent/JPS58182604A/ja
Priority to CA000425909A priority patent/CA1211868A/en
Priority to EP83302132A priority patent/EP0092395B1/en
Priority to EP88111594A priority patent/EP0303836A1/en
Priority to DE8383302132T priority patent/DE3381755D1/de
Priority to US06/486,171 priority patent/US4560249A/en
Publication of JPS58182604A publication Critical patent/JPS58182604A/ja
Priority to US06/786,028 priority patent/US4673241A/en
Priority to CA000496892A priority patent/CA1227678A/en
Publication of JPS6310801B2 publication Critical patent/JPS6310801B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP57066585A 1982-04-16 1982-04-20 回折格子作製法 Granted JPS58182604A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP57066585A JPS58182604A (ja) 1982-04-20 1982-04-20 回折格子作製法
CA000425909A CA1211868A (en) 1982-04-16 1983-04-14 Method of forming diffraction gratings and optical branching filter elements produced thereby
EP83302132A EP0092395B1 (en) 1982-04-16 1983-04-15 Method of forming diffraction gratings
EP88111594A EP0303836A1 (en) 1982-04-16 1983-04-15 Optical branching filter element
DE8383302132T DE3381755D1 (de) 1982-04-16 1983-04-15 Verfahren zur herstellung von diffraktionsgittern.
US06/486,171 US4560249A (en) 1982-04-16 1983-04-18 Method of forming diffraction gratings and optical branching filter elements produced thereby
US06/786,028 US4673241A (en) 1982-04-16 1985-10-10 Diffraction gratings and optical branching filter elements
CA000496892A CA1227678A (en) 1982-04-16 1985-12-04 Optical branching filter elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57066585A JPS58182604A (ja) 1982-04-20 1982-04-20 回折格子作製法

Publications (2)

Publication Number Publication Date
JPS58182604A true JPS58182604A (ja) 1983-10-25
JPS6310801B2 JPS6310801B2 (enExample) 1988-03-09

Family

ID=13320166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57066585A Granted JPS58182604A (ja) 1982-04-16 1982-04-20 回折格子作製法

Country Status (1)

Country Link
JP (1) JPS58182604A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01144832U (enExample) * 1988-03-29 1989-10-04
JPH02219002A (ja) * 1989-02-20 1990-08-31 Matsushita Electric Ind Co Ltd 回析格子およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01144832U (enExample) * 1988-03-29 1989-10-04
JPH02219002A (ja) * 1989-02-20 1990-08-31 Matsushita Electric Ind Co Ltd 回析格子およびその製造方法

Also Published As

Publication number Publication date
JPS6310801B2 (enExample) 1988-03-09

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