JPS58182183A - Bubble element - Google Patents

Abstract

PURPOSE:To obtain a bubble element which has large capacity and high functions by using plural successive patterns greater than the transfer patterns of the 1st and the 2nd transfer paths for the 3rd transfer path which makes a connection between the 1st and the 2nd transfer paths. CONSTITUTION:The 3rd transfer path pattern 33 which connects the 1st transfer path pattern 31 and the 2nd transfer pattern 32 to each other to form a bending part consists of plural successive patterns 41 and 42 having pattern periods one and half times as great as those of the 1st and the 2nd transfer path patterns. Consequently, a transfer error is eliminated and excellent transfer margins are obtained.

Description

[Detailed description of the invention] TECHNICAL FIELD The present invention relates to bubble elements.

Conventionally, a method has been adopted for the bubble* child, in which soft magnetic material patterns are provided on a bubble retaining layer with a gap between them, and the bubbles are transferred by in-plane i&field rotation.

However, the gaps in the above pattern reduce the bubble density,
This is unfavorable because it poses an obstacle to high-speed bubble transfer and limits pattern microfabrication.

On the other hand, U.S. Pat. No. 3,828,329 proposed an element that transfers bubbles using a gapless pattern, and its development has been progressing rapidly recently.

There, the pattern is formed by ion implantation. Since the transfer pattern of that device had a shape of a series of circles, it is called a continuous disk (hereinafter referred to as CD) device, including devices with shapes developed after that.

Currently, CD elements are becoming larger in capacity, higher in density, and more sophisticated. In this case, the bubble transfer path is usually provided at a pattern period about four times the bubble diameter, and together with the bubble generator, the gate operating section, and the bubble detector, a bubble element is constructed. Such a conventional bubble element configuration, e.g., Hel I Sys, 'l'ech
, J , ) % Volume 59 (1980) No. 229 Negative, the bending of the transfer path means that the transfer path of the cry can be changed freely with respect to the arrangement of each functional part. stomach.

However, due to the principle of transfer in CD devices, each transfer path has 9
! There is a disadvantage that the transfer path cannot always be changed freely because the transfer path is continuous, and changing the transfer path, such as bending the transfer path, is related to the characteristics of the entire transfer path.

Also, there is usually a @ such as a bubble generator in such a transfer path.
It can be seen that if a function section is provided, the transfer margin decreases due to its influence. A specific example of the bending pattern of the transfer path is as follows.
For example, as shown in FIG.
, Proc, Vol. 10 (1973), p. 339, and the i.
IEEE Transmission Expansion on Magnetics (IEEE Trans, Magn) No.
There is only the configuration described in Vol. g-15 (1979), page 1323. Bubble transfer at some of these corners has not been previously reported, but as will be explained in the Example section below, it has been revealed that errors in which bubbles skip over bits or trap them in the cusp occur. ing.

The first objective of this invention is to provide a bubble element that alleviates the drawbacks of the transfer path of a CD element and has a transfer pattern suitable for installing a functional section.

According to the present invention, in a bubble transfer path of a CD element in which ions are implanted into a bubble holding stage and bubbles are transferred along a pattern in a non-ion-implanted region, first and second channels having a normal pattern period about four times the bubble diameter are used. 2 transfer path, the $1 and the second
and a third transfer path connecting the transfer paths, the third transfer path being comprised of a plurality of continuous patterns larger than the first and second transfer path patterns. A bubble element is obtained in which the first and second transfer paths are bent through the third transfer path portion. Note that in the third transfer path, the first. A pattern larger than the second transfer path pattern may be singular, but (k
A few will give you a better bubble transfer margin.

Next, the present invention will be described in detail with reference to the first page.

FIG. 3 is a diagram showing a first embodiment of the present invention.

Reference numerals 31 and 32 are the first and second transfer path patterns, respectively, numeral 33 is the third transfer path pattern connecting the first and second transfer paths, and reference numeral 34 is the first and second transfer path pattern. It is the angle formed by The pattern 33 of this embodiment has a pattern period of approximately 1.0 times the period of the first and second transfer path patterns.
This is different from the conventional corner pattern shown in Fig. 2(a) in that it is 5 times larger than the conventional corner pattern shown in Fig. 2(a). ), a bubble or bit skipping error can be seen.This is thought to be because the properties of the magnetic charge wall, which is the driving force for the child bubble in CD3, change at some corners.This error was improved by making the pattern period of the plurality of transfer patterns 33 in the corner part about 1.5 times the pattern period P of the transfer path patterns 31 and 32 as in this embodiment. As for corners (inner corners), the bubble inside the cusp and the bubble error in the conventional pattern were improved, and good transfer was obtained.Furthermore, corner pattern 133
Better transfer was obtained by increasing the pattern period of the pattern to about twice (2P) that of the transfer path patterns 31 and 32. Including the case where the pattern period of pattern 33 is approximately 3P, the constraint number of bubble-driven in-plane rotating magnetic field is 250 k.
Even at Hz, no problems were observed regarding the transfer speed of simple transfer.

In this embodiment, the angle 34 formed by the first and second transfer paths is
When the angle was set to approximately 60° instead of 90°, better transfer was obtained compared to the conventional pattern (FIG. 2(b)). Also, when the angle 34 is approximately 120°, the conventional pattern (Fig. 2 (C)
)) The transfer was better than that.

FIG. 4 is a diagram showing a second embodiment of the present invention.

The pattern period of the patterns 41 and 42 forming part of the corner is the same as that of the pattern group 79 of the first and second transfer paths.
This is approximately twice as much as 1P. However, the pattern shape at the center of the corner is circular, and the patterns 41 before and after it are ellipsoids whose short axis length is smaller than 2P. Better transfer was obtained compared to the conventional pattern (FIG. 2(a)).

In this embodiment, the angle 34 is approximately 60 degrees instead of 90 degrees.
The transfer was improved compared to the conventional pattern (Fig. 2(b)). Also, when the angle 34 was about 120°, the transfer was better than the conventional pattern (i21W(cl)).

FIG. 5 is a diagram showing a third embodiment of the present invention.

Patterns 51, 52 and 53 forming part of the corner
The pattern synchronization of the first and second transfer path pattern families nJ] P is approximately 1.5 times and approximately 2 times, respectively: t, ? It has changed to about 2.5 times and 1-. In this case, transfer was significantly improved compared to the conventional pattern (FIG. 2(a)).

In this embodiment, the angle 34 is approximately 60° instead of 90°.
Also, when &1 is approximately 120°, the conventional pattern (pot, 2
They have been transferred or revised compared to Figure 1) or (C)), respectively.

FIG. 6 is a diagram showing a fourth embodiment of the present invention.

The two patterns 61 that form part of the corner have a diameter of 2P.
It is a circle of A case where the angle 34 is approximately 30° is shown. Good transfer was obtained both on the outside and inside corners. Furthermore, when the angle 34 was 06, better transfer was obtained compared to the conventional pattern shown in FIG.

FIG. 7 is a diagram showing a fifth embodiment of the present invention.

The pattern 71 is an ellipse with a pattern periodicity of 1.5P, and the pattern 72 is a circle with a pattern periodicity of 2P. Angle 34 is 0
The case of 0 is shown. Better transfer was obtained compared to the conventional pattern shown in FIG.

FIG. 7 is a diagram showing a sixth embodiment of the present invention.

The pattern 81 is an elliptical pattern with a pattern periodicity of 1.5P, and the angle 34 is θ°. The transfer was better than the conventional pattern shown in FIG.

The ninth shoe is a diagram showing a seventh embodiment of the present invention.

The pattern 91 is an ellipse with a periodicity of 1.5P, the pattern 92 is a circle with a diameter of about 1.25F, and the angle 34 is 0°. The transfer was good.

FIG. 1O is a diagram showing an eighth embodiment of the present invention. Patterns 101 and 102 have pattern periods of approximately 1.5P and approximately 2.5P, respectively. OP ellipse, angle 34 is θ
°. Good transfer was obtained.

FIG. 11 is a diagram showing a ninth embodiment of the present invention.

Patterns 111 and 112 are ellipsoids with pattern periods of approximately 1.5P and approximately 2.0P, respectively, and angle 34 is 0°. In this way, even when the corner pattern was arranged asymmetrically with respect to the first transfer path and the second transfer path, better transfer was obtained than with the symmetrical conventional pattern as shown in FIG.

FIG. 12 is a diagram showing a tenth embodiment of the present invention. The pattern 121 is an ellipse whose pattern period is approximately twice the pattern period P of the first and second transfer paths. Angle 34 is 180
°. The transfer margin of the third transfer path of this example was better than the margins of the first and second transfer paths with the conventional pattern period P when the pattern period P was approximately 4 μm of the bubble diameter. Therefore, the transfer path portion 33 is suitable as a location for placing functional units such as a generator and a detector.

In the first to tenth embodiments described above, even when a square transfer pattern (turn) is used instead of a circular or elliptical transfer pattern, it is effective to change the pattern period of a part of the corner as in this embodiment. be.

Furthermore, using a different value for the angle 34 from this embodiment is also effective in improving transfer.

As explained above, according to the present invention, it is possible to provide a CD element in which the transfer path can be bent more easily than before and with fewer transfer errors, and it is possible to achieve a larger capacity and higher functionality of the bubble element. It's effective.

Furthermore, a high-performance transfer path suitable for providing a functional section in the transfer path can be easily realized.

[Brief explanation of the drawing]

1 and 2(a) to 2(C) are diagrams showing conventional transfer path patterns, and FIGS. 3 to 12 are diagrams showing first to tenth embodiments of the present invention, respectively. In the figure, 31...first transfer path pattern,
32...Second transfer path pattern, 33...
...Third transfer path pattern, 34...Angle formed by the first and second transfer paths, 41.42.51.52.53
．． 61.71.72゜81.91,92,101,10
2,111,112,121...pattern. Death! Illustrations 32

Claims (1)

[Claims] (11) In the pull transfer path (of a continuous bubble device in which ions are implanted into the bubble retention layer and bubbles are transferred along the pattern of the non-ion implanted region),
A bubble element characterized by first and WJ2 transfer paths having a normal turn period of about four times the bubble diameter, and a third transfer path connecting the first and second transfer paths. (2) The pull element according to claim 1, wherein the #1 transfer path and the second transfer path are bent through the third transfer path portion.