JPS58180634U - ウエハカセツトの位置決め検知装置 - Google Patents

ウエハカセツトの位置決め検知装置

Info

Publication number
JPS58180634U
JPS58180634U JP7684082U JP7684082U JPS58180634U JP S58180634 U JPS58180634 U JP S58180634U JP 7684082 U JP7684082 U JP 7684082U JP 7684082 U JP7684082 U JP 7684082U JP S58180634 U JPS58180634 U JP S58180634U
Authority
JP
Japan
Prior art keywords
elevator table
wafer cassette
detection lever
detection device
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7684082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210999Y2 (enExample
Inventor
忠司 佐々木
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP7684082U priority Critical patent/JPS58180634U/ja
Publication of JPS58180634U publication Critical patent/JPS58180634U/ja
Application granted granted Critical
Publication of JPS6210999Y2 publication Critical patent/JPS6210999Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP7684082U 1982-05-24 1982-05-24 ウエハカセツトの位置決め検知装置 Granted JPS58180634U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7684082U JPS58180634U (ja) 1982-05-24 1982-05-24 ウエハカセツトの位置決め検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7684082U JPS58180634U (ja) 1982-05-24 1982-05-24 ウエハカセツトの位置決め検知装置

Publications (2)

Publication Number Publication Date
JPS58180634U true JPS58180634U (ja) 1983-12-02
JPS6210999Y2 JPS6210999Y2 (enExample) 1987-03-16

Family

ID=30086133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7684082U Granted JPS58180634U (ja) 1982-05-24 1982-05-24 ウエハカセツトの位置決め検知装置

Country Status (1)

Country Link
JP (1) JPS58180634U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61148838U (enExample) * 1985-03-06 1986-09-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61148838U (enExample) * 1985-03-06 1986-09-13

Also Published As

Publication number Publication date
JPS6210999Y2 (enExample) 1987-03-16

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