JPS58178181A - 吸着装置 - Google Patents

吸着装置

Info

Publication number
JPS58178181A
JPS58178181A JP57061061A JP6106182A JPS58178181A JP S58178181 A JPS58178181 A JP S58178181A JP 57061061 A JP57061061 A JP 57061061A JP 6106182 A JP6106182 A JP 6106182A JP S58178181 A JPS58178181 A JP S58178181A
Authority
JP
Japan
Prior art keywords
valve
gas
conduit
closed
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57061061A
Other languages
English (en)
Japanese (ja)
Other versions
JPS625007B2 (enrdf_load_stackoverflow
Inventor
里野　正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57061061A priority Critical patent/JPS58178181A/ja
Publication of JPS58178181A publication Critical patent/JPS58178181A/ja
Publication of JPS625007B2 publication Critical patent/JPS625007B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP57061061A 1982-04-14 1982-04-14 吸着装置 Granted JPS58178181A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57061061A JPS58178181A (ja) 1982-04-14 1982-04-14 吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57061061A JPS58178181A (ja) 1982-04-14 1982-04-14 吸着装置

Publications (2)

Publication Number Publication Date
JPS58178181A true JPS58178181A (ja) 1983-10-19
JPS625007B2 JPS625007B2 (enrdf_load_stackoverflow) 1987-02-03

Family

ID=13160273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57061061A Granted JPS58178181A (ja) 1982-04-14 1982-04-14 吸着装置

Country Status (1)

Country Link
JP (1) JPS58178181A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194273A (ja) * 1984-03-14 1985-10-02 株式会社日立製作所 空気分離装置の圧力制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180682A (en) * 1975-01-13 1976-07-14 Toray Industries Kongogasuno bunrihoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180682A (en) * 1975-01-13 1976-07-14 Toray Industries Kongogasuno bunrihoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194273A (ja) * 1984-03-14 1985-10-02 株式会社日立製作所 空気分離装置の圧力制御装置

Also Published As

Publication number Publication date
JPS625007B2 (enrdf_load_stackoverflow) 1987-02-03

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