JPS58172220A - ジシランの精製方法 - Google Patents

ジシランの精製方法

Info

Publication number
JPS58172220A
JPS58172220A JP5234282A JP5234282A JPS58172220A JP S58172220 A JPS58172220 A JP S58172220A JP 5234282 A JP5234282 A JP 5234282A JP 5234282 A JP5234282 A JP 5234282A JP S58172220 A JPS58172220 A JP S58172220A
Authority
JP
Japan
Prior art keywords
disilane
gas
impurities
activated carbon
synthetic zeolite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5234282A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211522B2 (enrdf_load_stackoverflow
Inventor
Tetsuya Iwao
岩尾　徹也
Osamu Kido
木戸　修
Yoshiaki Toyoda
豊田　芳昭
Yoshinori Ashida
芦田　芳徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP5234282A priority Critical patent/JPS58172220A/ja
Publication of JPS58172220A publication Critical patent/JPS58172220A/ja
Publication of JPH0211522B2 publication Critical patent/JPH0211522B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP5234282A 1982-04-01 1982-04-01 ジシランの精製方法 Granted JPS58172220A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5234282A JPS58172220A (ja) 1982-04-01 1982-04-01 ジシランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5234282A JPS58172220A (ja) 1982-04-01 1982-04-01 ジシランの精製方法

Publications (2)

Publication Number Publication Date
JPS58172220A true JPS58172220A (ja) 1983-10-11
JPH0211522B2 JPH0211522B2 (enrdf_load_stackoverflow) 1990-03-14

Family

ID=12912122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5234282A Granted JPS58172220A (ja) 1982-04-01 1982-04-01 ジシランの精製方法

Country Status (1)

Country Link
JP (1) JPS58172220A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0211522B2 (enrdf_load_stackoverflow) 1990-03-14

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