JPS58171Y2 - Glass mask guide bush - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a guide bush for positioning a glass mask used in photoresist pattern printing.

Generally, in pattern printing using a photoresist using a photographic technique, a film mask or a glass mask is used depending on the dimensional accuracy of the pattern to be obtained.

Normally, the alignment of the mask and the object to be printed is performed by connecting guide holes provided in each of the mask and the object to be printed with a guide pin.

Conventionally, in the case of a film mask, the guide holes are easily formed by punching using a punch and die, but in the case of a glass mask, such punching is not possible.

Therefore, to create a guide hole in a glass mask, first, a pilot hole is made through the glass mask using a cylindrical diamond cutter, and then a bushing having a guide hole cut in advance is adhesively fixed to the pilot hole.

The conventional bushing described above is fixed to a pilot hole that penetrates the glass mask from one direction, so the adhesive strength between the glass mask and the bushing depends on the roughness of the inner surface of the glass mask pilot hole. do not have.

For this reason, there was a drawback that the bushing would fall off when the guide pin was connected to the object to be burned.

An object of the present invention is to eliminate the above-mentioned conventional drawbacks and to provide a guide bushing for a glass mask having a structure that prevents the bushing from coming off from the lower hole of the glass mask.

The feature of this invention is that the pilot hole for fixing the bushing is not a through hole from one direction as in the conventional case, but is machined eccentrically from both sides of the glass mask, and the pilot hole has a step on the inner surface of the hole. By adhesively fixing the bushing to this pilot hole, it is possible to prevent the bushing from coming off, and also to prevent rotation of the bushing due to the mutually eccentric shapes of the pilot holes.

Next, a detailed explanation will be given with reference to the drawings.

FIG. 1 is a sectional view of a guide bush portion of a conventional glass mask, in which a film surface 2 on which a pattern is formed is adhered to one surface of a glass mask 1. A guide bushing 5 having a guide hole 6 is fixed with an adhesive 4 in the lower hole 3 penetrated from the bottom.

FIG. 2 shows the glass mask 1 and the object 9 of FIG. 1,
Guide hole 6 of the glass mask and guide hole 10 of the object to be baked 9
This figure shows a state in which the guide pin 7 is inserted into the two and aligned and connected.

Note that 8 is a photoresist.

In such conventional systems, as mentioned above, there is a high possibility that the guide pusher i5 will be removed from the glass mask 1 and fall.

FIG. 3 is a cross-sectional view of the guide bushing of the glass mask according to the present invention, in which the pilot hole 11 for the guide bushing formed in the glass mask 1 is made eccentric from the center of the guide hole from both sides of the glass mask 1. A step 12 is provided on the inner surface of the pilot hole 11.

A guide bushing 5 having a guide hole 6 provided in the pilot hole 11 thus formed is fixed with an adhesive 4.

FIG. 4 shows a state in which the glass mask 1 of the present invention shown in FIG. 3 and the object to be printed 9 are connected by guide pins 7.

Note that the guide hole 6 of the guide bush 5 may be formed after the guide bush 5 is fixed to the glass mask 1.

As explained above, according to the present invention, the guide bush 5 is firmly held in the insertion/removal direction of the guide pin 7 by the step 12 provided in the lower hole of the glass mask 1 to which the guide bush 5 is fixed. Since it is firmly fixed against rotation, the positions of the glass mask 1 and the object 9 to be printed can be reliably maintained during the pattern printing process.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of a guide bushing of a conventional glass mask, FIG. 2 is a cross-sectional view showing the bonding state of a conventional glass mask and an object to be printed, and FIG. 3 is a cross-sectional view of a glass mask according to the present invention. A cross-sectional view of the guide bushing, FIG. 4, is a cross-sectional view showing the state of connection between the glass mask of the present invention and the object to be printed. 1...Glass mask, 2...Pattern film, 3...Prepared hole for guide bushing, 4...
...Adhesive, 5...Guide bushing, 6...
... Guide hole of guide bushing, 7 ... Guide pin, 8 ... Photoresist, 9 ...
・Object to be burned, 10...Guide hole for object to be burned, 1
1... Eccentric pilot hole for guide bushing, 12...
····Step.

Claims (1)

[Scope of utility model registration request] By machining both sides of the glass mask so as to be eccentric from each other, a pilot hole with a step formed on the inner surface is provided, and a guide bushing having a guide hole formed therein is inserted and fixed into the pilot hole.
Glass mask guide button.