JPS58165387A - Mirror supporting structure for laser oscillator - Google Patents

Abstract

PURPOSE:To prevent the increase of temperature in the periphery of a mirror case by a method wherein a gap is defined between the mirror case and a laser output, and the gap of output side is made larger than the gap of side of a resonator. CONSTITUTION:An output mirror 12 is held by supporting cases 10-2 and 10-3, and a coolant 9 runs around in the direction of circumference via a thermal conductor 13 and cools indirectly the output mirror, in order to improve the thermal conductivity. The laser output 8 is outputted as a result of being resonated inside. The gap of a length (x) is adjusted between the laser output 8 and the mirror case 10-1, so as to provide the gap (laser light side y, case side l) between the mirror case 10-3 and the laser output to the value of y+x in case that the laser output advances straight with an angle of theta. Even in case that the center of the optical axis of the laser output 8 comes off from the center of the mirror case 10-1, since there is the gap l between the case 10-3 and the laser output 8, heat is not generated due to the hitting at the case.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mirror support device for a laser oscillator suitable for a carbon dioxide laser with a large output cover 9-.

In general, a carbon dioxide laser oscillator is explained using FIGS. 1, 8 and 2. A discharge tube 4 is filled with a mixed gas 6 of carbon dioxide, nitrogen gas, helium gas, etc., and a cathode and When glow discharge is performed between the electrode 3 and the anode, the mixed gas is excited and a laser beam sound is generated. The laser light resonates with mirror openings installed at both ends of the discharge tube, and is transmitted through one mirror, the output mirror 12, to the outside as a laser output of 8.
taken out. The output mirror 12 is made of a crystal material such as zinc selenide in germanium. Since the temperature of the Minriki mirror 12 increases due to resonance and transmission of the laser beam 8, a cooling path is provided in the case 10. Cooling medium 9 such as water
1.11 by rotating around the output f/Ia12υ
1J & rise and prevent thermal destruction of the crystal.

However, due to crystal defects in the crystal and the output mirror being cooled, dust formation occurs due to the temperature difference from room temperature, and as a result, dust in the air adheres to the agricultural machinery inside the ms. Since there is no foreign matter attached to the surface of the output mirror, laser oscillation causes part heat generation, which causes cracks due to thermal stress within the crystal, causing I! Also.

As a result, the cooling medium 9 enters the oscillator sK, causing internal contamination. As a solution, output −12
Outside j11t - Instead of cooling directly with the cooling medium 9, as shown in Figure jllK3, the mirror case 1O is indirectly cooled.
There is a method of cooling the laser via -2, but conventionally this method has had the drawback of thermal breakdown when the laser output exceeds several kilowatts.

In particular, the rise in temperature around the mirror case was a contributing factor.

This is because the laser optical axis is not necessarily at the center of the mirror case IO, and heat generation due to collision with the periphery occurs.
This is heat generated by irradiation of the case due to the diffusion of the laser beam itself.

SUMMARY OF THE INVENTION An object of the present invention is to provide a case structure that prevents temperature rise around the mirror case even when an indirect cooling method is used.

Hereinafter, embodiments of the present invention will be explained from the output mirror section IK shown in the drawings.

The output mirror 12 is attached to the support cases 10-2 and 10-3.
・It is more sandwiched and heat transfer 111 is used to improve heat conduction.
1: A cooling medium 9, such as a cooling wood, circulates in the circumferential direction via the conductor 13 to cool the output mirror.

, -"1° The heat conductive material 13 is made of a material with low hardness such as indium,
It is desirable that the thermal conductivity is high, and the backing 11-1
Keep it in check. Since there is usually a voltage inside the oscillator, it may also be used as a seal, or it may be structured to be sealed with a separate seal. The laser output 8 resonates internally and is output as a result of the pulling. At this point, the output mirror section 1 and the total reflection mirror section 2 are adjusted to align the optical axis so that the optical center of the laser output 8 is placed at the center of the output mirror 12. By the time the KI4 is adjusted so that the 6L optical axis coincides with the center of the output mirror 12 and the case 1G in the non-visible light region of 10.611 m, the laser beam is transferred to the case 1.
The periphery of G may be irradiated and generate heat, and even after the optical axis alignment is completed, the laser beam and the center of the flange may deviate from each other due to thermal deformation of the support metal inside the mirror. Further, the laser light itself has a certain angle of diffusion. Therefore, a gap of length X is taken between the laser output 8 and the off-case 10-1, and
′2 case 10 when the output is inward vertical #A and straight forward
Gap between -3 and laser (laser beam 11y).

・１・、・ Case 1111t) It is configured to take Y+Xt.

In this way, there is a gap between the mirror case 10-3 and the V-laser output, and since the output side gap y+t is larger than the gap X on the resonator side, the optical axis center of the laser output 86 is the center of the mirror case 10-1. Even if you exclude
Since there is a gap t between the mirror case 10-3 and the laser output 8, the mirror case 10-3 will not collide with the case and generate heat.
- Thus, according to the present invention, the output mirror does not undergo thermal distortion due to heat generated by the mirror case, and cracking of the output mirror can be prevented.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic side sectional view of a laser oscillator, Figure 2 is a schematic side sectional view of a conventional output mirror, and Figure 3 is a schematic side sectional view of the output bowl of the present invention.

DESCRIPTION OF SYMBOLS 1... Output mirror part, 2... Total reflection mirror part, 3... Electrode, 4... Discharge tube, 8... Laser output, 10... Mirror case, -18 Fig. 2

Claims (1)

[Claims] 1. A discharge tube body filled with a mixed gas, at least a pair of mirrors provided at both ends of the discharge tube body, an electrode having a cathode and an anode provided within the discharge tube body, and a discharge being generated between the electrodes. and a support for one of the mirrors that converts a mixed gas into laser light and emits the laser light to the outside through resonance between the two mirrors, with the inner diameter hole of the support being closer to the laser light resonator side. Also, the non-proboscis 12-support structure of the nine laser oscillators is characterized in that the external laser beam extraction side is large.