JPS58121691A - Laser generator - Google Patents

Laser generator

Info

Publication number
JPS58121691A
JPS58121691A JP57002760A JP276082A JPS58121691A JP S58121691 A JPS58121691 A JP S58121691A JP 57002760 A JP57002760 A JP 57002760A JP 276082 A JP276082 A JP 276082A JP S58121691 A JPS58121691 A JP S58121691A
Authority
JP
Japan
Prior art keywords
mirror
output
laser
tube
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57002760A
Other languages
Japanese (ja)
Inventor
Fumio Shibata
柴田　文夫
Michio Ichikawa
市川　三知男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57002760A priority Critical patent/JPS58121691A/en
Publication of JPS58121691A publication Critical patent/JPS58121691A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent an output mirror from cracking due to dew condensation by sucking moisture by a vacuum pump in the mirror body. CONSTITUTION:Gas medium 3, e.g., carbon dioxide gas, nitrogen gas or helium gas is filled in a discharge tube body 2 which is mounted through a support 1B placed on a trestle 1A, and when a DC voltage 5 is applied between an anode 4A and a cathode 4B, the medium 3 is excited, thereby generating a laser light 6. The laser ligyt 6 is resonated between a reflecting mirror 7 and an output mirror 8 provided between the both ends of the body 2 and is externally emitted. The mirror 8 interposed between a pair of flanges 9A and 9B which are provided at one end of the tube 2. A supply tube 21 is provided at the side surface of the projection 16 of an enclosure 15, and a vacuum pump 22 is mounted at the end of the tube 21. The pump 22 is mounted in this manner, and is operated to evacuate the tube. Then, dew 25 which is adhered to the outer surface of the mirror can be sucked in the direction of an arrow and can be evacuated into the vacuum pump, thereby preventing the output mirror from cracking.

Description

【発明の詳細な説明】 本発明は結露防止手段を改良したレーザ発生装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser generator with improved dew condensation prevention means.

一般にガスレーザ発生装置は、炭酸ガそ、窒素ガス、ヘ
リウムガス等の混合ガスを放電管内に充填し、放電管内
に設けた陰極と陽極とから成る電極間でグロー放電を行
うと、混合ガスが励起されて、レーザ光を発生する。レ
ーザ光は放電管両熾に設けた鏡開で共振させて、一方の
使である出力４１を介して、外部に取出される。出力鏡
はセレン化亜鉛などの結晶体で形成されてる。レーザ光
が出力ｆ！ヲ透過すると、出力値は温度上昇するので、
出力鏡の外周に冷却路を設けて、冷却して温度上昇を防
止している。レーザ光停止後にも出力−は、冷却されて
いるので、出力−と室温との間に温度差を生じ、出力鏡
の外費面に結露を生じる。特に、結露は湿度の高い場合
、梅雨時や、水蒸気の多い環境中で使用すると出来やす
い。結露は、空気中の塵埃を付着する。この状態で、再
度、レーザ光が出力鏡を介して照射すると、結露粒内の
付着し几塵埃が出力鏡表面に焼付き、この部分を中心に
部分発熱を生じることから、結晶体内の熱応力により割
れを促進していた。Generally, in a gas laser generator, a discharge tube is filled with a mixed gas such as carbon dioxide gas, nitrogen gas, helium gas, etc., and when a glow discharge is performed between electrodes consisting of a cathode and an anode provided in the discharge tube, the mixed gas is excited. is used to generate laser light. The laser light is caused to resonate with mirror openings provided on both sides of the discharge tube, and is taken out to the outside via an output 41 which is one of the ends of the discharge tube. The output mirror is made of crystalline material such as zinc selenide. Laser light output f! When it passes through, the output value increases in temperature, so
A cooling path is provided around the outer circumference of the output mirror to cool it and prevent temperature rise. Since the output is still being cooled even after the laser beam is stopped, a temperature difference occurs between the output and the room temperature, causing dew condensation on the external surface of the output mirror. In particular, condensation is likely to occur when the humidity is high, during the rainy season, or when the device is used in an environment with a lot of water vapor. Condensation attracts dust from the air. In this state, when the laser beam is irradiated again through the output mirror, the adhering dust in the condensation grains is burned onto the output mirror surface, causing partial heat generation around this area, which causes thermal stress within the crystal body. This promoted cracking.

このため、出力鏡外表面の結露を布で吹き取っていたの
で、出力鏡外表面が傷んだり、或いは吹き取るのを忘れ
て、上述と同様に出力鏡が割れる等の問題があった。For this reason, since the condensation on the outer surface of the output mirror was blown off with a cloth, there were problems such as damage to the outer surface of the output mirror or forgetting to blow off the condensation, causing the output mirror to break as described above.

本発明の目的は、結露による出力−の割れを防止したレ
ーザ発生装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser generator that prevents output cracking due to dew condensation.

以下、本発明の実施例を図面に示すレーザ発生装置１に
より説明する。Embodiments of the present invention will be described below using a laser generator 1 shown in the drawings.

架台ＩＡに載置場れた支持部ＩＢｔ−介して取付けられ
た放電管本体２は、内部にガス媒体３たとえば炭酸カス
、窒素ガス、ヘリウムガス等を充填し、陽極４Ａと陰極
４Ｂとの間に直流電圧５を印加すると、ガス媒体３が励
起されて、レーザ光６を発生する。レーザ光６／ｒｉ放
電管本体２の両端に設けた反射＠Ｉ７と出力鏡８との間
で共撮して、外部に照射する。The discharge tube main body 2 attached via the support part IBt placed on the pedestal IA is filled with a gas medium 3 such as carbon dioxide scum, nitrogen gas, helium gas, etc. between the anode 4A and the cathode 4B. When a DC voltage 5 is applied, the gas medium 3 is excited and generates laser light 6 . A laser beam 6/ri is taken together between the reflection @I7 provided at both ends of the discharge tube body 2 and the output mirror 8, and is irradiated to the outside.

出力＠Ｓは放電管２の１端に設けた一対の７ランク部９
Ａ、９Ｂに挾持されている。これらの７ランク部９Ａ、
９Ｂ間と出力鏡端との間に冷却路１０ｔ−形成する。冷
却路１０は、流入口１１から流出口（図示せずンへ矢印
方向に沿って、冷却水を流し、出力鏡８を冷却する。冷
却路１０の周囲には、シール部材１０Ａを施して、冷却
水が洩れるのを防止している。調整ネジ１２は７ランク
部９Ａ、９Ｂに設けて、調整ネジ全回転して、出力４１
１８の傾きを正常位置に調整をする。The output @S is a pair of 7-rank parts 9 provided at one end of the discharge tube 2.
It is held between A and 9B. These 7 rank parts 9A,
A cooling path 10t is formed between 9B and the output mirror end. The cooling path 10 cools the output mirror 8 by flowing cooling water from an inlet 11 to an outlet (not shown) in the direction of the arrow.A sealing member 10A is provided around the cooling path 10. This prevents the cooling water from leaking.Adjusting screws 12 are provided at the 7 rank parts 9A and 9B, and when the adjusting screws are fully rotated, the output is 41.
Adjust the tilt of 18 to the normal position.

包囲部１５は架台ＩＡに設けた支持部ＩＢＫ支持され、
かつ下側に延びる突起部１６を有する。The surrounding part 15 is supported by a support part IBK provided on the pedestal IA,
It also has a protrusion 16 extending downward.

突起部１６の上部には、水平方向のレーザ光６の下側に
折曲げる傾斜平面＠１７を取付けている。An inclined plane @17 that bends the horizontal laser beam 6 downward is attached to the upper part of the protrusion 16.

突出部１６の下側先端には、焦点レンズ１８および送出
口１９を設けている。送出口１９には被加工物２０を対
応配置している。突出部側面に供給管２１を設け、供給
管２１の先端に真空ポンプ２２を取付けである。A focusing lens 18 and an outlet 19 are provided at the lower end of the protrusion 16 . A workpiece 20 is disposed corresponding to the outlet 19 . A supply pipe 21 is provided on the side surface of the protrusion, and a vacuum pump 22 is attached to the tip of the supply pipe 21.

このように真空ポンプ２２を設けて、真空引きすれば、
出力鏡外表面に付着している結露２５は、去できるので
、出力鏡の割れを防止できる。包囲部１５は、円形のパ
イプで構成すると真空に引かれても変形が少ない利点が
ある。If the vacuum pump 22 is provided in this way and the vacuum is drawn,
Since the condensation 25 adhering to the outer surface of the output mirror can be removed, cracking of the output mirror can be prevented. If the surrounding part 15 is formed of a circular pipe, it has the advantage that it will not deform much even if it is evacuated.

以上のように本発明によれば、出力鏡の割れを防止でき
、る。As described above, according to the present invention, cracking of the output mirror can be prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の実施例として示したレーザ発生装置の櫃略
側断面図である。The figure is a schematic side sectional view of a laser generator shown as an embodiment of the present invention.

Claims (1)

【特許請求の範囲】[Claims] １、混合ガスを充填した放電管不休と、放電管本体両端
と内部に設けた少なくとも一対の債と陰極およびｌｓ極
と、上記両電極間でグロー放電を行ない混合ガスをレー
ザに変換し、かつ両鏡間で共振してレーザ光として外部
に取出す１方の出力伊と上記出力祷からのレーザ光を通
過させる被加工物と対応する焦点レンズと送出口との少
なくと４１方と出力曖との間を包囲する包囲部とから成
るものにおいて、上記包囲部に真空ポンプを設けること
を特徴とするレーザ発生装置。1. A discharge tube filled with a mixed gas, at least one pair of bonds, a cathode, and an ls electrode provided at both ends and inside of the discharge tube body, and a glow discharge between the two electrodes to convert the mixed gas into a laser, and One output point that resonates between both mirrors and is extracted as a laser beam to the outside, a workpiece through which the laser beam from the above output beam passes, a focusing lens corresponding to the output port, and at least 41 points, and an output ambiguity. 1. A laser generating device comprising a surrounding part surrounding a space between the laser generator and the surrounding part, wherein the surrounding part is provided with a vacuum pump.
JP57002760A 1982-01-13 1982-01-13 Laser generator Pending JPS58121691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57002760A JPS58121691A (en) 1982-01-13 1982-01-13 Laser generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57002760A JPS58121691A (en) 1982-01-13 1982-01-13 Laser generator

Publications (1)

Publication Number Publication Date
JPS58121691A true JPS58121691A (en) 1983-07-20

Family

ID=11538289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57002760A Pending JPS58121691A (en) 1982-01-13 1982-01-13 Laser generator

Country Status (1)

Country Link
JP (1) JPS58121691A (en)

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