JPS58164172U - 荷電粒子線のプロ−プ径設定装置 - Google Patents

荷電粒子線のプロ−プ径設定装置

Info

Publication number
JPS58164172U
JPS58164172U JP6290282U JP6290282U JPS58164172U JP S58164172 U JPS58164172 U JP S58164172U JP 6290282 U JP6290282 U JP 6290282U JP 6290282 U JP6290282 U JP 6290282U JP S58164172 U JPS58164172 U JP S58164172U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
probe diameter
setting device
diameter setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6290282U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545011Y2 (enrdf_load_stackoverflow
Inventor
平居　暉士
銭谷　福男
河合　政夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6290282U priority Critical patent/JPS58164172U/ja
Publication of JPS58164172U publication Critical patent/JPS58164172U/ja
Application granted granted Critical
Publication of JPH0545011Y2 publication Critical patent/JPH0545011Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP6290282U 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置 Granted JPS58164172U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6290282U JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6290282U JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Publications (2)

Publication Number Publication Date
JPS58164172U true JPS58164172U (ja) 1983-11-01
JPH0545011Y2 JPH0545011Y2 (enrdf_load_stackoverflow) 1993-11-16

Family

ID=30073029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6290282U Granted JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Country Status (1)

Country Link
JP (1) JPS58164172U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234340A (en) * 1975-09-12 1977-03-16 Hitachi Ltd Coded grounding system for wire-breaking detection
JPS5439684A (en) * 1977-09-05 1979-03-27 Jeol Ltd Control apparatus of charged particle probe diameters

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234340A (en) * 1975-09-12 1977-03-16 Hitachi Ltd Coded grounding system for wire-breaking detection
JPS5439684A (en) * 1977-09-05 1979-03-27 Jeol Ltd Control apparatus of charged particle probe diameters

Also Published As

Publication number Publication date
JPH0545011Y2 (enrdf_load_stackoverflow) 1993-11-16

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