JPS58161937A - 高純度石英ガラスの製造方法 - Google Patents

高純度石英ガラスの製造方法

Info

Publication number
JPS58161937A
JPS58161937A JP3150683A JP3150683A JPS58161937A JP S58161937 A JPS58161937 A JP S58161937A JP 3150683 A JP3150683 A JP 3150683A JP 3150683 A JP3150683 A JP 3150683A JP S58161937 A JPS58161937 A JP S58161937A
Authority
JP
Japan
Prior art keywords
glass
chlorides
gas
gaseous oxygen
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3150683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311288B2 (OSRAM
Inventor
Takao Edahiro
枝広　隆夫
Gotaro Tanaka
豪太郎 田中
Toru Kuwabara
透 桑原
Masaaki Yoshida
吉田　雅朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3150683A priority Critical patent/JPS58161937A/ja
Publication of JPS58161937A publication Critical patent/JPS58161937A/ja
Publication of JPS6311288B2 publication Critical patent/JPS6311288B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
JP3150683A 1983-02-25 1983-02-25 高純度石英ガラスの製造方法 Granted JPS58161937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3150683A JPS58161937A (ja) 1983-02-25 1983-02-25 高純度石英ガラスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3150683A JPS58161937A (ja) 1983-02-25 1983-02-25 高純度石英ガラスの製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8113979A Division JPS565339A (en) 1979-06-26 1979-06-26 Manufacture of high purity quartz glass

Publications (2)

Publication Number Publication Date
JPS58161937A true JPS58161937A (ja) 1983-09-26
JPS6311288B2 JPS6311288B2 (OSRAM) 1988-03-14

Family

ID=12333101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3150683A Granted JPS58161937A (ja) 1983-02-25 1983-02-25 高純度石英ガラスの製造方法

Country Status (1)

Country Link
JP (1) JPS58161937A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04325425A (ja) * 1991-04-25 1992-11-13 Tetronics Res & Dev Co Ltd 石英ガラスの製造方法、及びその製造装置
WO1993000307A1 (fr) * 1991-06-29 1993-01-07 Shin-Etsu Quartz Products Company Limited Element optique en quartz de synthese pour laser a excimere et realisation de cet element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04325425A (ja) * 1991-04-25 1992-11-13 Tetronics Res & Dev Co Ltd 石英ガラスの製造方法、及びその製造装置
WO1993000307A1 (fr) * 1991-06-29 1993-01-07 Shin-Etsu Quartz Products Company Limited Element optique en quartz de synthese pour laser a excimere et realisation de cet element
US5364433A (en) * 1991-06-29 1994-11-15 Shin-Etsu Quartz Products Company Limited Optical member of synthetic quartz glass for excimer lasers and method for producing same
US5523266A (en) * 1991-06-29 1996-06-04 Shin-Etsu Quartz Products Company Limited Optical member of synthetic quartz glass for excimer lasers and method for producing same

Also Published As

Publication number Publication date
JPS6311288B2 (OSRAM) 1988-03-14

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