JPS5816136Y2 - 電子線走査型装置の焦点合せ装置 - Google Patents

電子線走査型装置の焦点合せ装置

Info

Publication number
JPS5816136Y2
JPS5816136Y2 JP1976044601U JP4460176U JPS5816136Y2 JP S5816136 Y2 JPS5816136 Y2 JP S5816136Y2 JP 1976044601 U JP1976044601 U JP 1976044601U JP 4460176 U JP4460176 U JP 4460176U JP S5816136 Y2 JPS5816136 Y2 JP S5816136Y2
Authority
JP
Japan
Prior art keywords
electron beam
value
output
focus
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976044601U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52136547U (enExample
Inventor
副島啓義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1976044601U priority Critical patent/JPS5816136Y2/ja
Publication of JPS52136547U publication Critical patent/JPS52136547U/ja
Application granted granted Critical
Publication of JPS5816136Y2 publication Critical patent/JPS5816136Y2/ja
Expired legal-status Critical Current

Links

JP1976044601U 1976-04-10 1976-04-10 電子線走査型装置の焦点合せ装置 Expired JPS5816136Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976044601U JPS5816136Y2 (ja) 1976-04-10 1976-04-10 電子線走査型装置の焦点合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976044601U JPS5816136Y2 (ja) 1976-04-10 1976-04-10 電子線走査型装置の焦点合せ装置

Publications (2)

Publication Number Publication Date
JPS52136547U JPS52136547U (enExample) 1977-10-17
JPS5816136Y2 true JPS5816136Y2 (ja) 1983-04-01

Family

ID=28503666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976044601U Expired JPS5816136Y2 (ja) 1976-04-10 1976-04-10 電子線走査型装置の焦点合せ装置

Country Status (1)

Country Link
JP (1) JPS5816136Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5847824B2 (ja) * 1974-04-24 1983-10-25 日本電子株式会社 ソウチデンシケンビキヨウトウヨウ シヨウテンアワセホウホウ オヨビ ソウチ

Also Published As

Publication number Publication date
JPS52136547U (enExample) 1977-10-17

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