JPS58159012A - Manufacture of coupling vibrator unit - Google Patents

Abstract

PURPOSE:To improve workability and impact resistance, by mounting a crystal oscillator on a supporting base seat. CONSTITUTION:On the upper and lower faces of a crystal oscillator on which an oscillating part 10 and two supporting parts placed on both its sides are formed as one body by etching, energizing electrodes 12, 13 are placed uniformly on the whole face, respectively, and as for the supporting parts, respectively, an electrode is placed on one face only, so that an electric field is not applied. A supporting pedestal 14 is formed in a recessed shape, and on both end parts 15, 16, electrodes 17, 18 and 19 are placed. The electrodes 18 and 19 are connected to side electrodes 20, 21 through an electrode 22 placed on the lower face of the supporting pedestal 14. In this way, on both the end parts 15, 16 of the supporting pedestal on which the electrode is placed, the crystal oscillator 10 is placed, and is supported and stuck by the oscillator end part. The supporting base on which the oscillator is mounted is mounted to lead wires 45, 46 thereafter.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a unit of a so-called coupled crystal resonator in which a vibration amount of F i is coupled.

An object of the present invention is to provide a 9G Tecat crystal resonator with excellent frequency #j[@degree characteristics.Another object of the present invention is to provide a crystal resonator unit with excellent shock resistance. .

Excellent temperature characteristics and 0 engineering (○ryataL engineering cape a)
dasam)'s famous oscillator t1! There are many consumer devices that require the use of whip-cut crystal grippers.
Damn it, but recently, various consumer devices have become smaller1.
IX1, and along with that, the whip-cut crystal S pin has also been required to be smaller, but this type of vibrator has spurious vibration (8p noodle rioua741 zoro 14a%).
], it is difficult to miniaturize the product, and at the same time, the actual situation is that the OX becomes higher when the product is miniaturized. 41, whip-cut crystal oscillator TF as a crystal oscillator for wristwatches! When using a 61 tuning fork, it is necessary to make it considerably smaller! When compared to IA crystal oscillators, the Suizu box is not at all satisfactory, but these days! Huo applying the technology of a)
The method of forming the hJI oscillator was applied to the construction of resonators by IJ lithography, and as a result, it became possible to provide extremely small resonators. It is applied to GT-cut crystal resonators with excellent temperature characteristics, and is extremely small. However, unlike conventional ones, this type is supported at both ends. , it has become necessary to devise a method for manufacturing vibrator units. Therefore, the present invention proposes a method for manufacturing a crystal resonator unit having excellent impact resistance and frequency-temperature characteristics, and the present invention will be described in detail below with reference to the drawings.

In Fig. 1) and g3) t1 One embodiment of the shape and electrode of the coupled vibrator of the present invention, a zero-cut cut in which the vibrating part 2 and two supporting parts 3 arranged on both sides thereof are integrally formed. This is an example of a crystal oscillator. Figure 1) shows a plan view, and Figure 1 (c) shows a top view.On the top 4 and bottom 5 of the vibrating part 2 of the crystal 1, excitation molds 1i6 and 7 are arranged uniformly over the entire surface. , the excitation electrode 6Fi is extended to one of the support parts 3, and the excitation electrode 7
is arranged to extend to the other support part 3. That is, the support part has a structure in which electrodes are arranged only on one side and no electric field is applied. Therefore, the energy of the vibrating part is confined as much as possible inside the vibrating part and is not transmitted to the support part. In other words, the electrode extending from the vibrating part 2 to the support part 3 is only a terminal electrode necessary for applying an electric field, and it is difficult to apply an alternating voltage to both electrodes extending to the support part 3. Yomoku El! It is possible to excite m children. Also, the resonance frequencies of the two modes are determined by the width W and the length O, and the resonance frequency of the main vibration by @WK is /
' If the resonance frequency of the sub-oscillation due to e length - is t/L, the temperature characteristics are both I1w/4 wave number difference Δ/=/W-'/L
It depends. The temperature Il [4I property is determined by the side ratio Rz W / L. Figure 2 shows an example of the temperature characteristics of a zero-cut crystal resonator shaped by photolithography.
9. When the coupling between the main vibration and the sub-vibration is strong, it looks like a straight line, and when it is weak, it looks like a straight line.

Variations in Q x 10-/C do not result in good temperature characteristics; vibrators that are widely manufactured have such temperature characteristics. Figure 3 shows the side ratio of a 2G cut crystal resonator in which the vibrating part and support part of the resonator of the present invention are integrally molded.
11/ As the zero side ratio showing the relationship between L and the first-order temperature coefficient α becomes very hot (the -th temperature coefficient becomes crowded at night,
Even if the side ratio R changes by 0.01, the -th temperature coefficient α is approximately 1
．． Changes by 3 ga/℃. FIG. 4 shows the relationship between the etching time and the side ratio R of the zero-cut crystal resonator of the present invention, and as the etching time increases, the side ratio gradually decreases. According to experiments, when etching is performed for 60 minutes, the edge ratio R is approximately 0. O1 becomes smaller. Figure 5 shows the GT of the present invention.
The relationship between the etching time of a cut crystal resonator and the change Δa in the primary temperature coefficient α is shown. As the temperature is increased, Δa becomes even smaller, and after about 60 minutes, Δα becomes -1, 3 pyp+/°C, or something like 9 quality. Furthermore, a first-order frequency temperature coefficient adjustment method that can further reduce Δα by increasing the etching time will be specifically explained.

The zero-cut crystal resonators shown in Figures 1) and CB) are designed to have the following characteristics when formed into a shape M by photolithography.

(1) The −th order temperature coefficient value has a positive I[, specifically +
2, 51pm/C to +1, Opyn/C
so that it falls within the range of

(2) The resonant frequency of the main vibration is the reference frequency f・
0 with higher at usually 5002μ~10002% higher (
It has become.

Such a vibrator can be obtained by selecting the shape and etching time, and after etching the bottom of the vibrator, it is placed at a certain arbitrary temperature, and this temperature is adjusted to the temperature of a thermometer, etc. By total II! ], and this temperature is ttt. The resonance frequency of the main vibration at this time/
s t - measure. Furthermore, if the excited oscillator is set at any other temperature, the resonance wavenumber is the same as the temperature at this time! , read as above, temperature ftstm and resonance frequency/s −
The primary temperature coefficient m is obtained from the following equation using f*.

Also, if we rewrite it using the fly quasi-frequency f and the frequency to be matched, we get K as follows.

Calculate g from this ■ and @ expressions. That is, the temperature coefficient after the outer shape etching is actually measured and determined. Figure 6 shows the G of the present invention.
α of T-cut crystal resonator after external etching is lpμ/
a in the case of ℃ ri line MU and 2,5 pyrs/C rin MB
α is 1 pμ, which shows the relationship with the etching time that makes
/℃, to make α zero, it is enough to etch for about 45 minutes, and when the direct force is 2,5 pμ/℃, it is about 1
α can be reduced to zero by etching for 15 minutes. In this way, in the present invention, the first-order temperature coefficient α is defined as the temperature 'is! II
and the resonance frequency/l = fm, and since there is a relationship between the etching time and the gitlI line, each gtlc
By controlling the etching time, the primary temperature coefficient α can be made almost zero. Incidentally, the second-order and third-order temperature coefficients of the zero-cut crystal resonator of the present invention are considerably smaller than the first-order temperature coefficient a, and can therefore be ignored. FIG. 7 shows an example of temperature lIL% properties in which the temperature coefficient was adjusted by the method of the present invention. [Line G shows the temperature characteristics after external etching. 1 is about 1, 57PXK/C is large, and the temperature characteristics are good (in contrast, the 1-ring line shows the temperature characteristics after etching for 70 minutes. The first-order temperature coefficient C was approximately 0.1 ppm/c, which was quite small, and excellent temperature characteristics could be obtained.
Il obtained in figure! ILD has excellent temperature characteristics, but the resonance frequency of the main II theory is the electrophilic frequency f, yo C3000~5
ooo pFI has changed, so it needs to be adjusted. In this way, the external shape of the vibrator is etched
After shaping, the vibrator is mounted on a support. ),
), 0 is an example when the G Tecat crystal resonator 10 is mounted on the support pedestal 14 of the present invention, Figure IIa) is the normal msa, and Figure 8) is the bottom view of Figure 8). , 8th
FIG. 0 shows a bottom view of J [in FIG. 8]. Support pedestal 14!
! The end portions 15 and 16 are flat, and the electric wires 1i17, 18, and 19 are arranged thereon. The electrode portion and the electrode 19 are connected to the Confucian picture electrode 4Ii and the electrode 1i22 arranged on the lower surface of the support base 14.

Both ends 15 of the support base 14 with the electrodes arranged in this manner.
, 16 are arranged with a crystal l1III element W (i11), and a layering agent (hhVh) is supported and fixed by a solder (24) at the end of the vibrator. Crystal oscillator 1 by Jin's support 1i1fK
o excitation electrodes 12, 13 circles, electrodes [2 are connected to electrodes 17, electrodes 13 are connected to electrodes 19, electrode parts, 22,
It becomes the same polarity as the electrode 18 via 21. That is, the support base 1
By arranging the electrode 4 as described above, the electrode 17
, can be made into a 2jll child structure of 18. electrode part,
21 and 22 are drawn thicker than the saimono to make them easier to understand. In this manner, by mounting the vibrator on the support base, the vibrator can be made to have excellent impact resistance. 9), (c), and (0) are other embodiments when the GT-cut crystal resonator 6 is mounted on the main support pedestal 26; Figure 9) shows the bottom view of Figure 9), Figure 9 shows the bottom view of Figure 9 Φ,
The support base plate is formed in a concave shape, and grooves are provided at both ends (n, 28).

(capital), 31, 32 are provided, and an electrode part,
34.35 are placed. Electrode tool and electrode 35#'i
The Confucian electrode iris 37 is connected to the electrode 37 disposed on the lower surface of the support pedestal. A crystal oscillator δ is placed in the grooves 31 and 32 of the support pedestal in which the electrodes are arranged, and the oscillator WAm has 11 layers, or as Ushida et al.
40 Yotsuko support solid W-! It will be done. By means of this support fK, among the excitation electrodes 41 and 42 arranged on the crystal oscillator 25, the electrode 41Fi is connected to the electrode 33 and the electrode 42 is connected to the electrode part through the electrodes 36, 38, 3'7. Oka 11K. By mounting the vibrator in the groove in this manner, not only is the shock resistance excellent, but the vibrator set becomes more stable and workability can be further improved. The support base on which the vibrator is mounted is mounted on the next KJ-domain.

A plan view of an embodiment when the support pedestal 43 of the present invention indicated by 0 is mounted on the support lead wire 411.46 provided on the stem 44. The surface electrode 48 of the vibrator 470 is connected to the electrode 49 of the support base dust 43, and the back surface electrode (not shown) F
It is connected to the electrode 5G, and further connected to the electrode 51 via the lower surface electrode 1i (not shown).Electrode 49.
51 is the support lead wire 45, 46 is glued, To is,
It is supported by a layer of solder 52, 53 and has a two-terminal structure 54, 55t. 1ll1 figure is in figure 9)
a Support pedestal 56 of the present invention shown in (B) and (0)
A plan view of another embodiment when mounted on support rods 58 and 59 provided on the i-stem 57 is shown. The crystal resonator 60 is placed in grooves 62 and 63 provided in the support pedestal 56, and is supported by a support M using a post-layer agent, solder, etc. 64 and 65. The surface electrode A61 of the crystal resonator 60 is connected to an electrode 66, the back electrode (not shown) is connected to an electrode 67, and the electrode 68 is further connected via side and bottom electrodes (not shown). Also, the stem 57
Nine support leads SSS, 59 are placed in grooves 69, 70 provided in the support base 56, and are coated with adhesive, solder, etc. 71, 7! is supported and fixed by the electrode 66.6
8, forming a 21m11 child structure 73.74. The support base is made of an insulating material such as ceramic or crystal, and the electrodes are made of gold, silver, or the like. Furthermore, if the electrode arrangement structure of the support base that supports and solidifies the crystal resonator is devised, a 211111 element structure will be formed when the crystal resonator is mounted on the support base, so it will be easier to mount the support lead wires. A method of adjusting the reference frequency/eK to the 0th order, which is easy and has excellent workability, will be explained. 12th
i1i1 is a weight on the 0-cut crystal oscillator shown in Figure 10) 84
．． 8fi, 86.87 are arranged by vapor deposition, and Fig. 13 shows a weight 388,
This is another example in which 89, 90, and 91' are arranged by vapor deposition. Figure 14 shows the relationship between the amount of weight added to the weight and the change in the resonance frequency of the weight.
It can be seen from FIG. 14 that even if the frequency is 0.00, it is difficult to tune to the standard frequency f. Figure 15 is 1s12
114, 85, 86, 87.11113
Figure 17) shows the relationship between the primary temperature coefficient value of the tatto layered with $88.89.90.91. The crystal oscillators shown in Figures 1 and 13 are sealed in a vacuum or in a nitrogen atmosphere. When t,
In particular, if priority is given to the electrical characteristics of the vibrator, vacuum sealing is suitable, and if workability is priority, M sealing is suitable. FIG. 16 is an external view of an example of a coupled resonator unit obtained by the manufacturing method of the present invention.

As described above, the method for manufacturing a coupled resonator unit of the present invention is to form the external shape by etching, then mount the vibrator on a support pedestal, and then attach the support pedestal to the lead 1iK-f runt. Furthermore, by tuning the resonant frequency of the vibrator to the standard frequency, and finally, sealing the vibrator, a coupled vibration with excellent temperature characteristics in which the resonant frequency of the vibrator is tuned to the standard wave number is produced.子轡NI) 1-It's 1 to provide! Ta. Furthermore, by mounting one crystal oscillator on a support pedestal, workability is improved.
Moreover, it was possible to provide a vibrator unit with excellent shock resistance. Moreover, the electrode structure of the support pedestal of the present invention has two electrodes on one side.
Since it has a terminal structure, it is easy to mount the lead wire, and it has the advantage of being excellent in workability.

[Brief explanation of drawings]

FIG. 1 (g), ψ) shows an example of the shape and electrode of the coupled vibrator of the present invention, in which the peristaltic part and the support part are integrally formed.
This is an example of a cut crystal resonator. FIG. 1(4) shows a plan view, and FIG. 10 shows a top view. The 111m diagram is a G formed by photolithography.
! A graph showing an example of the temperature characteristics of a cut crystal resonator.
h. Figure 3 shows that the vibrating part and supporting part of the vibrator of the present invention are integrally shaped like g.
2 is a graph showing the relationship between the side ratio R and the first-order temperature coefficient value of a KG Tekat crystal resonator. No. 41s is a graph showing the relationship between the etching time and the side ratio l of the T-cut crystal resonator of the present invention (No. 5III)
is a graph showing the relationship between the etching time and the first-order temperature coefficient value t) change Δa of the G-TEC crystal resonator of the present invention. Figure 6 shows the directivity after etching of the GTECAT crystal resonator of the present invention with lνFIB/TC and 2,5 pptn/
Toh with a dot showing the relationship with the etching time that makes 11 zero in the case of c cr>. 117ml is a pair of shoes 7 showing an example of temperature characteristics whose temperature coefficient is adjusted by the method of the present invention. Figures 8 (g), (b), and ρ) show an example of a G Tecat crystal resonator mounted on the support base of the present invention.
Figures (8 is a front view, Figure 8-) are bottom views of both sides of Figure 8, 1g
8.0 shows a bottom view of ) of FIG. Fig. 9) a P) * (o) ii () Another embodiment of a Tekat crystal resonator mounted on the support pedestal of the present invention. (See Figure 9)
The bottom view of FIG. 9(0)ti and the lower enlarged view of FIG. 9(C) are shown. Figure 10 is a plan view of an embodiment in which the support pedestal of the present invention shown in Figures 88 (G) #) and 0) is mounted on a support lead wire provided on a stem. FIG. 11 shows a plan view of another embodiment in which the support pedestal of the present invention shown in FIGS. Figure 12 shows a 0-cut crystal oscillator with a plating made by vapor deposition.
This is a plan view showing an example of the arrangement. FIG. 13 is a plan view showing another example of 1' in which a weight is placed on a zero-cut crystal lifter using steamed MK. FIG. 14 is a drum 7 showing the relationship between the amount of centering and the change in the number of resonance waves of one vibration. FIG. 5 is a shoe 7 showing the relationship between the primary temperature coefficient α and the amount of abrasion of #I. FIG. 3116 shows an external view of an example of a coupled resonator enit obtained by the manufacturing method of the present invention. 111. Crystal 2. . , vibrating part 3°0. Support @ 4. ,,Top surface 510. Lower surface 6, 7, 12, 13, 41, 42, Excitation electrode W...4I L...Length 10.25, 47. Art 0゜0. Crystal lifter 14,%,
43,66,, support pedestal 15.16.27.2B,,
, both ends 17.18, 19, 33, 34, 35, 49, 50, 5
1゜0. Telephone @ 20, 21, 36, 37. ,,l1
Menejo 29.30, 31, 32, 62.63.69.7
0. ,. Groove 44, 57. , stem 1°45.4@, 5g, 59. , support lead wire 84.8&,
86,87,88,89.90゜91...
Above, Part 2 To1 Figure 3 Figure 7 Figure 8 (A) Figure 8 (C) Figure 9 (C) Figure 10 4 Figure ■

Claims (1)

[Claims] In the manufacturing method of a coupled vibrator unit in which a plurality of vibration modes are coupled, the step of forming the external shape of the coupled vibrator by etching, the vibrator is placed on a support pedestal! a step of mounting the support pedestal with a lead iIK;
A method for manufacturing a coupled vibrator unit, comprising the steps of: adjusting the resonant frequency of the vibrator to a parent frequency, and then sealing the vibrator.