JPS58157094A - プラズマ装置 - Google Patents

プラズマ装置

Info

Publication number
JPS58157094A
JPS58157094A JP57038152A JP3815282A JPS58157094A JP S58157094 A JPS58157094 A JP S58157094A JP 57038152 A JP57038152 A JP 57038152A JP 3815282 A JP3815282 A JP 3815282A JP S58157094 A JPS58157094 A JP S58157094A
Authority
JP
Japan
Prior art keywords
anode
plasma
potential
magnetic field
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57038152A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467320B2 (enExample
Inventor
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57038152A priority Critical patent/JPS58157094A/ja
Publication of JPS58157094A publication Critical patent/JPS58157094A/ja
Publication of JPH0467320B2 publication Critical patent/JPH0467320B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57038152A 1982-03-12 1982-03-12 プラズマ装置 Granted JPS58157094A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57038152A JPS58157094A (ja) 1982-03-12 1982-03-12 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57038152A JPS58157094A (ja) 1982-03-12 1982-03-12 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS58157094A true JPS58157094A (ja) 1983-09-19
JPH0467320B2 JPH0467320B2 (enExample) 1992-10-27

Family

ID=12517437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57038152A Granted JPS58157094A (ja) 1982-03-12 1982-03-12 プラズマ装置

Country Status (1)

Country Link
JP (1) JPS58157094A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4868621B1 (ja) * 2010-07-20 2012-02-01 大王製紙株式会社 ティシュペーパー製品

Also Published As

Publication number Publication date
JPH0467320B2 (enExample) 1992-10-27

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