JPS58155746A - Cu alloy for lead of semiconductor device - Google Patents

Abstract

PURPOSE:To obtain a Cu alloy suitable for manufacturing leads with high bendability, strength and heat resistance by a method wherein the material is composed of Cu with inevitable impurities, not more than 0.0010wt% oxygen and a total of 0.01-0.3wt% of one more out of Ni, Cr, Zr and rare earth elements, respectively weighing 0.05-1.0wt%. CONSTITUTION:Ni is added to ordinary Cu not containing oxygen to increase strength and heat resistance without degrading its electric and thermal conductivity. One or more out of Cr, Zr and rare earth elements are further added to the resultant Cu alloy to provide bendability while enhancing said features. The procedure for the production of such an alloy consists of melting together in a graphite-made crucible the accurately measured quantities of said substances, the casting of the molten metal, and the hot rolling of the resultant ingot. Cold rolling and annealing processes are repeated, to obtain a product taking a prescribed board form.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention allows half a fathom salary to be reduced to t! Reeds for Jllll instruments (responsible as lead frames for lead materials with good bending workability, high electrical (a) tC resistance, IJ 1 degree, and heat resistance) - Alloys It is.

In general, ICs, LSIs, etc., are made of semiconductor pellets, island leads, and bonding wires, and are sealed with eight-medic seals, ceramic seals, or plastic seals. The basic general formula V is used. These AIA lead (lead frame) materials are required to have the following characteristics.

(11) Poor thermal and electrical conductivity.

(2) Good heat resistance.

(3) Strong strength.

(4) Good bending workability.

Conventional semiconductor a! ! The lead (9-dead frame) material of
i”@-29wt%Nゑ1gwt%Cobon (hereinafter)
(wt% is simply abbreviated as 5), k゛・-42% Ni alloy, C
M-59i-0.2%P Gobon5Cu-2.4%'s-
A 0.13% Z, -α04% F alloy is used. However, r@-29%Ni-18%C ring metal, k'@-42
%Ni alloy and Cu-5%bn-QJ%P alloy have excellent Iji degree, heat resistance and good bending workability, but they have relatively low electrical conductivity and low grade. There is a drawback that tCu-24% has a-α13%Zn-0#4%P
Although the alloy has sufficient ML[, WS properties, and electrical conductivity, it has the disadvantage of poor bending workability.

As a result of this research, Kazuhiro has found that the lead (lead frame) has good bending workability and the C41-24%k''*-(Ll 3% Zn-0, 04
% K' alloy and Mukodera or higher **, #thermal and electrically conductive semi-conductor at equipment G) ° alloy for rjm generation L TamoQ) te, hto, os~t ,0%
(J, L), (JL)1
08M-F'': includes, asL:u and non-T''IN impure publication.

By adding HS to the present invention, we improved the stiffness and heat resistance without significantly deteriorating the characteristic "Akebono Fu" conductivity. And this, Cr,
By adding Zr, Fudo 7CA or more of #1L2 or more, the strength and heat resistance can be significantly improved without increasing the conductivity too much. It has good finishability.

Working in America tJJ L: u-'L4% to's -0,13%Z
It is arrogant to have a duplicate key with ss-0,04%P combination strength, *v, msa characteristics and 5a (up to) conductivity of first class or higher.

However, in one of the alloys of the present invention, the number of parts 1lIfi
The reason why it was refined as it was in the Upper K Period is due to the following creations.

The reason why 0□Konariho was added to 9.0010%4 is to prevent the oxidation of the Tani Chinka elements and make them work effectively. This is because if the content is increased by 0.0010q11kj11%, the oxidation of the oxidation system will increase and the desired young fruit will not be obtained. In addition, the reason why the i content is set at 0.05 to 1.0% is that if the content is less than the upper limit, the heat resistance will not be as good as 81T, and if it exceeds the upper limit, the heat resistance will be deteriorated. This is because low F conductivity becomes difficult to adhere to. Also Cr.

The total content of one or more of Zr and rare earth element 40J was limited to 0.0L-(L3%) because each individual or total content was F@Unconditioned, sufficient strength and heat resistance. This is because if the conductivity is not excellent and the upper @Vt is lowered, low F of electrical (II&) conductivity will occur.

Rare earth elements are CCk Fudo JI of LζCe, Pr◆
In the I7c book, these are used singly or as a mixture, especially Mitsushmetal (C1!40~r
hO%, La20 to 40 residual parts and other rare earth elements may be used.

In addition, it can be treated in a vacuum using a #2 wire in a Cu earth basin, or in a vacuum using a tortoiseshell or electricity. If the impurities contained in this ◆ Zuibon are to the extent that they are contained in the base metal of IIIA'pri, they will not affect the characteristics of the alloy.

Hereinafter, examples of the alloy of the present invention will be described.

Black ship crucible [Using a vacuum to cast a molded V-shaped specimen with an irregular composition on the surface of m1, medium 150 mm, distance 25 N, dullness 200 m.
Eleven ingots were created. About this ingot I) 2
．． 5m #M, reheated and heat pressure m42
01111. lI#sa@Ha NokyotoL ta*
This is what I experienced, and I returned the Ki-Threshold Himi and Arm Jun and finished the plate with a 40% finish and a thickness of 0.3 mm.The number of these was 6.
Second, 'jut, Konjima property, 4-Ki (to) conductivity and Range processability V-beta. Seven axis rice kf rice gobon compared to 1
1111 table number; also written.

@Ki (As for the -4 property, it is in the @ section of the correlation with thermal conductivity +111 4! VJl#-Wasυ5 and becomes stable, *aV is one and kt is subtracted @ Strong 31J hb-Z22
41 t: Ih and fixed.

IIIt#l & Sex - Two, cut out a test piece from l#80.3 intestinal plate - HJ-222L) I, and heat it at 1 ml at 100°C to 700°C in an argon atmosphere.
Copying and drawing l11 heat treated at 50℃ intervals for 1 hour at ft
1i test @ was conducted, and the softening curve was drawn by taking the % vertical axis &: tensile strength and the heating temperature on the m axis, and from this, the tension of heating till was calculated.
J strength and temperature I, which is the phase of tensile strength when completely softened.
t (semi-softening temperature) was determined.

In addition, the bending workability is 1311m and 1051m.
m, cut out a rectangular test piece with a length of 50 m, and its Ll-4
Performing 180° vM bending at the station and observing the first bend, those that are flat with no side damage or wrinkles are marked with a Q mark as they have good bending properties, and those that have a rumored defect are marked with a * mark. Poor properties are indicated by an X mark, and those in between are indicated by a Δ mark. 111 M3M 42 used Mitsushmetal (C@approximately 50%) V.

As is clear from the m1 table, all of the materials according to the present invention have good bending workability, and their characteristics include conductivity of 60 to 93% 1ACl,
Tensile strength: 46 to 56 / -1 Heat resistance: 350 to 440℃@curve, conventional alloy Cu-2.4%re −
It can be seen that it has properties equal to or better than those of 0.13% Zn-0.04% P Gobon (424), and has excellent bending workability. In comparison with the conventional alloys Cu-5%8N-0,2%P (Mu23) and F@-29%Ni-18%Co (Mu25), 1-Mobaba has the same gi. degree and heat resistance'J
It turns out that Hiro@Kushi is much better.

Comparative alloy 13 has a lower Ni-containing lid than the alloy of the present invention, and Lt has a lower total Ni-containing lid, and examples of Cr, Zr, M, and M. Pasture M
In A 14 to 16, none of them had the same gM degree and heat resistance, and Himakisha*4i7 and Cξ, which had a high I content,
For comparative alloys 18 to 20, which have a large total content of 2 yuzu or more, either Zr or MlM has a low F of skewer 1.
It turns out that it is comfortable to wear.

j! 0. Comparative alloys with a high self-weight content, 421 to 22, have Cr, which is an additive element system that has affinity with III and element, 7. It can be seen that r, M, and M have turned into bells, there is no sufficient sound, the health of the pupil mass is poor II, and the workability of the music has deteriorated.

As described above, the alloy of the present invention has good bending workability as a lead (lead frame) for a semiconductor device, has good Ia degree and MS property, and has particularly good magnetic (odor conductivity) ◆Lead nail As a result, it has a very effective effect.

Claims (1)

[Claims] Silk tension υ5~14)wt% and any one of Cr, Zr, rare earth element 5L is 2 or more pieces total 0.0μ~Q, 3vt
% and 0m1-% of Ft-containing, a half-fatty ab porcelain lard material made of piggyback Cu and Honmachi-zukuri impurities.