JPS58151549A - 静電容量形感湿素子 - Google Patents

静電容量形感湿素子

Info

Publication number
JPS58151549A
JPS58151549A JP57034786A JP3478682A JPS58151549A JP S58151549 A JPS58151549 A JP S58151549A JP 57034786 A JP57034786 A JP 57034786A JP 3478682 A JP3478682 A JP 3478682A JP S58151549 A JPS58151549 A JP S58151549A
Authority
JP
Japan
Prior art keywords
electrode
moisture
film
humidity
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57034786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0153417B2 (enrdf_load_stackoverflow
Inventor
Yoshifumi Takahashi
良文 高橋
Setsuo Kotado
古田土　節夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP57034786A priority Critical patent/JPS58151549A/ja
Publication of JPS58151549A publication Critical patent/JPS58151549A/ja
Publication of JPH0153417B2 publication Critical patent/JPH0153417B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP57034786A 1982-03-04 1982-03-04 静電容量形感湿素子 Granted JPS58151549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57034786A JPS58151549A (ja) 1982-03-04 1982-03-04 静電容量形感湿素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57034786A JPS58151549A (ja) 1982-03-04 1982-03-04 静電容量形感湿素子

Publications (2)

Publication Number Publication Date
JPS58151549A true JPS58151549A (ja) 1983-09-08
JPH0153417B2 JPH0153417B2 (enrdf_load_stackoverflow) 1989-11-14

Family

ID=12423952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57034786A Granted JPS58151549A (ja) 1982-03-04 1982-03-04 静電容量形感湿素子

Country Status (1)

Country Link
JP (1) JPS58151549A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134944A (ja) * 1986-11-27 1988-06-07 Anarogu Debaisezu Kk 湿度検出装置
US6647782B2 (en) * 2001-07-16 2003-11-18 Denso Corporation Capacitive humidity sensor
JP2013057616A (ja) * 2011-09-09 2013-03-28 Azbil Corp 環境センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134944A (ja) * 1986-11-27 1988-06-07 Anarogu Debaisezu Kk 湿度検出装置
US6647782B2 (en) * 2001-07-16 2003-11-18 Denso Corporation Capacitive humidity sensor
JP2013057616A (ja) * 2011-09-09 2013-03-28 Azbil Corp 環境センサ

Also Published As

Publication number Publication date
JPH0153417B2 (enrdf_load_stackoverflow) 1989-11-14

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