JPS58148654U - 電子的分析装置用試料カプセル - Google Patents

電子的分析装置用試料カプセル

Info

Publication number
JPS58148654U
JPS58148654U JP4675182U JP4675182U JPS58148654U JP S58148654 U JPS58148654 U JP S58148654U JP 4675182 U JP4675182 U JP 4675182U JP 4675182 U JP4675182 U JP 4675182U JP S58148654 U JPS58148654 U JP S58148654U
Authority
JP
Japan
Prior art keywords
electronic analyzer
sample capsule
sample
capsule
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4675182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125317Y2 (OSRAM
Inventor
啓義 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4675182U priority Critical patent/JPS58148654U/ja
Publication of JPS58148654U publication Critical patent/JPS58148654U/ja
Application granted granted Critical
Publication of JPH0125317Y2 publication Critical patent/JPH0125317Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP4675182U 1982-03-30 1982-03-30 電子的分析装置用試料カプセル Granted JPS58148654U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4675182U JPS58148654U (ja) 1982-03-30 1982-03-30 電子的分析装置用試料カプセル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4675182U JPS58148654U (ja) 1982-03-30 1982-03-30 電子的分析装置用試料カプセル

Publications (2)

Publication Number Publication Date
JPS58148654U true JPS58148654U (ja) 1983-10-05
JPH0125317Y2 JPH0125317Y2 (OSRAM) 1989-07-28

Family

ID=30057737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4675182U Granted JPS58148654U (ja) 1982-03-30 1982-03-30 電子的分析装置用試料カプセル

Country Status (1)

Country Link
JP (1) JPS58148654U (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014107036A (ja) * 2012-11-26 2014-06-09 Hitachi High-Technologies Corp 試料台及び荷電粒子線装置及び試料観察方法
JP2014175276A (ja) * 2013-03-13 2014-09-22 Hitachi High-Technologies Corp 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
JP2015153710A (ja) * 2014-02-19 2015-08-24 株式会社日立ハイテクノロジーズ 試料ホルダ、観察システム、および画像生成方法
JP2017107877A (ja) * 2017-03-21 2017-06-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014107036A (ja) * 2012-11-26 2014-06-09 Hitachi High-Technologies Corp 試料台及び荷電粒子線装置及び試料観察方法
JP2014175276A (ja) * 2013-03-13 2014-09-22 Hitachi High-Technologies Corp 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
EP2975631A4 (en) * 2013-03-13 2016-12-14 Hitachi High Tech Corp LOAD BEAMER, SAMPLE MONITORING, SAMPLE PLATFORM, OBSERVATION SYSTEM, AND LIGHT EMITTING ELEMENT
US10241062B2 (en) 2013-03-13 2019-03-26 Hitachi High-Technologies Corporation Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member
JP2015153710A (ja) * 2014-02-19 2015-08-24 株式会社日立ハイテクノロジーズ 試料ホルダ、観察システム、および画像生成方法
JP2017107877A (ja) * 2017-03-21 2017-06-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材

Also Published As

Publication number Publication date
JPH0125317Y2 (OSRAM) 1989-07-28

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