JPS58146576U - Coating device - Google Patents

Coating device

Info

Publication number
JPS58146576U
JPS58146576U JP4130382U JP4130382U JPS58146576U JP S58146576 U JPS58146576 U JP S58146576U JP 4130382 U JP4130382 U JP 4130382U JP 4130382 U JP4130382 U JP 4130382U JP S58146576 U JPS58146576 U JP S58146576U
Authority
JP
Japan
Prior art keywords
coating device
semiconductor wafer
coating
pipe
spin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4130382U
Other languages
Japanese (ja)
Inventor
裕一 山本
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP4130382U priority Critical patent/JPS58146576U/en
Publication of JPS58146576U publication Critical patent/JPS58146576U/en
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の塗布装置の断面図、第2図は本考案の一
実施例を示す塗布装置の断面図である。 1・・・・・・外箱、2・・・・・・カップ、3・・・
・・・中空シャフトモータ、4・・・・・・回転軸、5
.6・・・・・・軸受、7・・・・・・ウェハーチャッ
ク、8・・・・・・ウェハー、9・・・・・・飛散した
塗布液、10・・・・・・パイプ。
FIG. 1 is a cross-sectional view of a conventional coating device, and FIG. 2 is a cross-sectional view of a coating device showing an embodiment of the present invention. 1...Outer box, 2...Cup, 3...
...Hollow shaft motor, 4...Rotating shaft, 5
.. 6...Bearing, 7...Wafer chuck, 8...Wafer, 9...Scattered coating liquid, 10...Pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウェハー表面に液体を回転塗布する装置において
、回転する半導体ウェハーを囲んで設けられているカッ
プ内壁面に沿って気体を吹き下ろすパイプを設けたこと
を特徴とする塗布装置。
1. A coating device for spin-coating a liquid onto the surface of a semiconductor wafer, characterized in that the coating device is provided with a pipe for blowing gas down along the inner wall surface of a cup surrounding the rotating semiconductor wafer.
JP4130382U 1982-03-24 1982-03-24 Coating device Pending JPS58146576U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4130382U JPS58146576U (en) 1982-03-24 1982-03-24 Coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4130382U JPS58146576U (en) 1982-03-24 1982-03-24 Coating device

Publications (1)

Publication Number Publication Date
JPS58146576U true JPS58146576U (en) 1983-10-01

Family

ID=30052488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4130382U Pending JPS58146576U (en) 1982-03-24 1982-03-24 Coating device

Country Status (1)

Country Link
JP (1) JPS58146576U (en)

Similar Documents

Publication Publication Date Title
JPS58146576U (en) Coating device
JPS5925941U (en) Rotating machine shaft sealing device
JPS6112653U (en) Bakyu whip
JPS5863744U (en) spin coater
JPS58117129U (en) cleaning rotating brush
JPS58177623U (en) bearing device
JPS6144831U (en) Wafer drying equipment
JPS59173341U (en) Rotary coating device
JPS5859991U (en) Liquid ring vacuum pump equipment
JPS59166441U (en) spin coater
JPS59143985U (en) ice cream container
JPS59187139U (en) semiconductor wafer holder equipment
JPS58169222U (en) rotating plate bearing
JPS60117034U (en) Semiconductor vacuum rotary chuck
JPS60136141U (en) Wafer transfer device
JPS599084U (en) chemical vapor deposition equipment
JPS5858335U (en) spin coater
JPS63140623U (en)
JPS58144222U (en) Propulsion machine position measurement device
JPS58105786U (en) Cryogenic refrigerant supply equipment for superconducting rotating machines
JPS6096841U (en) semiconductor equipment
JPS5881128U (en) Propeller shaft vibration damping device
JPS6042730U (en) semiconductor manufacturing equipment
JPS5891473U (en) spinner device
JPS5811957U (en) Rotating electric machine bearing cover