JPS58141444A - 磁気記録媒体の製造方法 - Google Patents

磁気記録媒体の製造方法

Info

Publication number
JPS58141444A
JPS58141444A JP57024718A JP2471882A JPS58141444A JP S58141444 A JPS58141444 A JP S58141444A JP 57024718 A JP57024718 A JP 57024718A JP 2471882 A JP2471882 A JP 2471882A JP S58141444 A JPS58141444 A JP S58141444A
Authority
JP
Japan
Prior art keywords
plasma
gaseous
vapor
magnetic recording
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57024718A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334620B2 (enrdf_load_stackoverflow
Inventor
Koichi Shinohara
紘一 篠原
Toshiaki Kunieda
国枝　敏明
Ryuji Sugita
龍二 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57024718A priority Critical patent/JPS58141444A/ja
Publication of JPS58141444A publication Critical patent/JPS58141444A/ja
Publication of JPH0334620B2 publication Critical patent/JPH0334620B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP57024718A 1982-02-17 1982-02-17 磁気記録媒体の製造方法 Granted JPS58141444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57024718A JPS58141444A (ja) 1982-02-17 1982-02-17 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57024718A JPS58141444A (ja) 1982-02-17 1982-02-17 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS58141444A true JPS58141444A (ja) 1983-08-22
JPH0334620B2 JPH0334620B2 (enrdf_load_stackoverflow) 1991-05-23

Family

ID=12145935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57024718A Granted JPS58141444A (ja) 1982-02-17 1982-02-17 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS58141444A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100731483B1 (ko) 2005-04-15 2007-06-21 삼성에스디아이 주식회사 플라즈마 디스플레이 패널 제조설비

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100731483B1 (ko) 2005-04-15 2007-06-21 삼성에스디아이 주식회사 플라즈마 디스플레이 패널 제조설비

Also Published As

Publication number Publication date
JPH0334620B2 (enrdf_load_stackoverflow) 1991-05-23

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