JPS58140637U - ウエハ−保持機構 - Google Patents

ウエハ−保持機構

Info

Publication number
JPS58140637U
JPS58140637U JP3631282U JP3631282U JPS58140637U JP S58140637 U JPS58140637 U JP S58140637U JP 3631282 U JP3631282 U JP 3631282U JP 3631282 U JP3631282 U JP 3631282U JP S58140637 U JPS58140637 U JP S58140637U
Authority
JP
Japan
Prior art keywords
wafer
holding mechanism
wafer holding
wafer support
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3631282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6234443Y2 (cg-RX-API-DMAC7.html
Inventor
克己 登木口
徹 土生
実 内山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3631282U priority Critical patent/JPS58140637U/ja
Publication of JPS58140637U publication Critical patent/JPS58140637U/ja
Application granted granted Critical
Publication of JPS6234443Y2 publication Critical patent/JPS6234443Y2/ja
Granted legal-status Critical Current

Links

JP3631282U 1982-03-17 1982-03-17 ウエハ−保持機構 Granted JPS58140637U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3631282U JPS58140637U (ja) 1982-03-17 1982-03-17 ウエハ−保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3631282U JPS58140637U (ja) 1982-03-17 1982-03-17 ウエハ−保持機構

Publications (2)

Publication Number Publication Date
JPS58140637U true JPS58140637U (ja) 1983-09-21
JPS6234443Y2 JPS6234443Y2 (cg-RX-API-DMAC7.html) 1987-09-02

Family

ID=30047748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3631282U Granted JPS58140637U (ja) 1982-03-17 1982-03-17 ウエハ−保持機構

Country Status (1)

Country Link
JP (1) JPS58140637U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010217803A (ja) * 2009-03-19 2010-09-30 Ushio Inc 露光装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194733A (en) * 1975-02-19 1976-08-19 Puroguramuni okeru seigyono nagareno kanrihoshiki
JPS5666054A (en) * 1979-11-02 1981-06-04 Nec Kyushu Ltd Holder for semiconductor substrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194733A (en) * 1975-02-19 1976-08-19 Puroguramuni okeru seigyono nagareno kanrihoshiki
JPS5666054A (en) * 1979-11-02 1981-06-04 Nec Kyushu Ltd Holder for semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010217803A (ja) * 2009-03-19 2010-09-30 Ushio Inc 露光装置

Also Published As

Publication number Publication date
JPS6234443Y2 (cg-RX-API-DMAC7.html) 1987-09-02

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