JPS58138333U - ガリウム拡散装置 - Google Patents

ガリウム拡散装置

Info

Publication number
JPS58138333U
JPS58138333U JP3599882U JP3599882U JPS58138333U JP S58138333 U JPS58138333 U JP S58138333U JP 3599882 U JP3599882 U JP 3599882U JP 3599882 U JP3599882 U JP 3599882U JP S58138333 U JPS58138333 U JP S58138333U
Authority
JP
Japan
Prior art keywords
shielding plate
heat shielding
quartz tube
gallium
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3599882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221000Y2 (enExample
Inventor
公裕 村岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Electric Manufacturing Ltd filed Critical Toyo Electric Manufacturing Ltd
Priority to JP3599882U priority Critical patent/JPS58138333U/ja
Publication of JPS58138333U publication Critical patent/JPS58138333U/ja
Application granted granted Critical
Publication of JPS6221000Y2 publication Critical patent/JPS6221000Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sampling And Sample Adjustment (AREA)
JP3599882U 1982-03-15 1982-03-15 ガリウム拡散装置 Granted JPS58138333U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3599882U JPS58138333U (ja) 1982-03-15 1982-03-15 ガリウム拡散装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3599882U JPS58138333U (ja) 1982-03-15 1982-03-15 ガリウム拡散装置

Publications (2)

Publication Number Publication Date
JPS58138333U true JPS58138333U (ja) 1983-09-17
JPS6221000Y2 JPS6221000Y2 (enExample) 1987-05-28

Family

ID=30047453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3599882U Granted JPS58138333U (ja) 1982-03-15 1982-03-15 ガリウム拡散装置

Country Status (1)

Country Link
JP (1) JPS58138333U (enExample)

Also Published As

Publication number Publication date
JPS6221000Y2 (enExample) 1987-05-28

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