JPS58128766A - Thyristor - Google Patents

Thyristor

Info

Publication number
JPS58128766A
JPS58128766A JP1197082A JP1197082A JPS58128766A JP S58128766 A JPS58128766 A JP S58128766A JP 1197082 A JP1197082 A JP 1197082A JP 1197082 A JP1197082 A JP 1197082A JP S58128766 A JPS58128766 A JP S58128766A
Authority
JP
Japan
Prior art keywords
thyristor
turn
region
gate
diode region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1197082A
Other languages
Japanese (ja)
Inventor
Tsutomu Nakagawa
勉 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1197082A priority Critical patent/JPS58128766A/en
Publication of JPS58128766A publication Critical patent/JPS58128766A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/74Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/7404Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device
    • H01L29/7412Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device the device being a diode
    • H01L29/7416Thyristor-type devices, e.g. having four-zone regenerative action structurally associated with at least one other device the device being a diode the device being an antiparallel diode, e.g. RCT

Abstract

PURPOSE:To shorten turn-OFF time by exposing the intermediate junction of a thyristor region and the junction of a diode region to the same main surface and making both junctions oppose to each other. CONSTITUTION:A first base layer 2 is exposed to the main surface 11, and the thyristor region and the second base layer 3 of the diode region are divided. In such structure, when reverse bias is applied between a gate G and a cathode K, resistance among gate electrodes 8 and the electrode 9 of the diode region becomes infinite because there are two junctions J2 among them, and currents flowing among the electrodes 8 and the electrode 9 can be brought to 0. That is, only currnts by residual carriers can be swept out effectively by reverse bias between G and K, thus largely improving turn-OFF characteristics.

Description

【発明の詳細な説明】 本発明は、サイリスタ、輪にサイリスタ領域とダイオー
ド領域を一一半尋悴基俸に共働し°Cなる逆尋ia型の
サイリスタにわいて、ターンオフ時に、ゲート−カソー
ド間を逆バイアスすることで、ターンオフ時間を短緬さ
セ、るいわゆΦゲート梱助ターンオフサイリスタや、ケ
ート−カソード向を逆バイアスすることでtiii接タ
ーンオフさせるケートターンオフサイリスタのkmに圓
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thyristor, a reverse dia type thyristor in which a thyristor region and a diode region work together in a ring at a temperature of 1.5 °C. By applying a reverse bias between the cathodes, the turn-off time can be shortened, and by reverse biasing the cathode direction, the turn-off thyristor can be turned off directly. .

従来よう、サイリスタの土なる応用分動、伝えは、DC
チョッパやインバータ辰−でIよ、サイリスタと逆並列
にダイオードを接帆−3−る場合か多く、その熱動と相
まって、同−半一体基体内に、サイリスタと逆並列にタ
イ4−ドを接枕した、逆導通サイリスタか捉業され、現
在では、%L鉄用チョッパ川用子の主九となっている。
Conventionally, the basic application of thyristors, the transmission, is DC
In many cases, a chopper or an inverter has a diode tied in anti-parallel to the thyristor, and combined with its thermal movement, a tie is connected in anti-parallel to the thyristor within the same semi-integrated base. The reverse-conducting thyristor, which is connected to the iron, has been developed and is now the main component of the %L iron chopper.

この逆4mサイリスタは、その軸比上、逆方1−の耐圧
をほとんど必要としないため、サイリスタ領域をpn”
1pnTh造で形成することができる。
This reverse 4m thyristor requires almost no reverse 1- withstand voltage due to its axial ratio, so the thyristor area is pn"
It can be formed using 1 pnTh structure.

かかるpn十i pn構造(工、従来のpnpn 1m
造に比べ、−一ベース朧の幅でll1il+1比を実現
できる。
Such a pn10i pn structure (engineering, conventional pnpn 1m
Compared to the structure, it is possible to achieve the ll1il+1 ratio with a width of -1 base oboro.

いいかえれはpn+i pn Iil造は、pnpn 
構造と同−耐圧を麺いベース胸幅で実現できる。このベ
ース胸幅ON)とオン電圧vTとターンオフ時間をきめ
るキャリアライフタイムτとの同には、 V−1−“eXpP=0)関係かあり・1肚・″ゐ容態
・ターンオフ時間の商にはトレードオフの菌体となる。
Change is pn+i pn Iil construction is pnpn
The same pressure resistance as the structure can be achieved with the width of the noodle base. There is a relationship between the base chest width (ON), the on-voltage vT, and the carrier lifetime τ that determines the turn-off time. becomes a trade-off bacterial cell.

ここでIJ la sベース〜における9歓キャリアの
拡敞保数である。上式から明らかなように、ベース鳩−
Wの低敵は、オン電圧を小さくする。すなわち、ktl
tG谷鳳の増大かはかれる。また、同一オン−比であれ
は、キャリアライフタイムの短輸か可能となる。かかる
坂出により、pn”i pn橘造を用いることで従来の
pnpn檎造では犬現不用詑でめった1比2500V、
 *流谷翫1000A、  ターンオフ時間80μsを
笑現しCいる。
Here is the expansion number of 9 kan carriers in IJ las base ~. As is clear from the above formula, the base pigeon −
A low value of W reduces the on-voltage. That is, ktl
I can measure the increase in tG Taniho. Furthermore, if the on-ratio is the same, the carrier lifetime can be shortened. Due to this Sakaide, by using pn"i pn Tachibana, the voltage of 1 ratio 2500V, which is rarely achieved with the conventional pnpn pn pn, is 2500V.
*Nagaretani 1000A, with a turn-off time of 80μs.

しかしなから、チョッパ、インバーター装賑の^効率化
をはかるには、さらにターンオフ時間を短編することか
強く望まれるようになっている。
However, in order to improve the efficiency of chopper and inverter installations, there is a strong desire to further shorten the turn-off time.

本55明は、かがる一点からなされたもので、逆アスす
るいわゆるゲートターンオフやケート補助ターンオフ時
概を効未的に進寺地サイリスタに急用し、ターンオフ時
間を短幅するtこめのらのである。
This book 55 was developed from one point, and it uses the so-called gate turn-off and gate auxiliary turn-off time of reverse assembling to the Shinjiji thyristor, and shortens the turn-off time. be.

第1因に小す従来橋造を伝にとり胱ゆjする・糺21に
その喝0価回細を小す。第1因で(1) lユ半尋俸品
外、(2)は第1編遍投の第1ヘースノー、(3月よ第
2尋魁型のシ2ベース%、(4/は比2寺電型の第lエ
ミッター、(6月j第1尋電型υ)第2エミッタ1−1
(6)は−万の主表面Oυに胤山しl、:見2ベースI
m、(71は船2エミッタ)kki (5Jとオーミッ
ク捧触tな丁カソードー操、(8月J土表IkIQvに
路用した鴎2ヘースJ−とオーミック接触をム1ケート
′#4L柿、(tutよ主表面obに亀出した第2編−
型の第2ベース/iw (Jとオーミック&Fflをな
1タイ4−ド領域(υi)の電櫓、αQはtu諌已MJ
1エミッタノー(4)ゎよひ九1ベースI1m (2J
にl111#払し、かつ主人thJa4に細出し第1ベ
ース膚(2)と1−一纏−型の区低仇ノー(2どとオー
ミック接触ななすアノード電画で、アノード囚に伍帆さ
イL°cいる。
The first factor is the conventional Hashizo, which is small, and the 0-value summary is reduced to 21. The first factor is (1) l Yu Hanjin's salary, (2) is the 1st Hesnow of the 1st edition, (March, the 2nd Genkai type's 2 base%, (4/ is the ratio of 2 The 1st emitter of the temple electric type, (June j 1st electrician type υ) the 2nd emitter 1-1
(6) is -Taneyama on the main surface Oυ of 10,000, : see 2 base I
m, (71 is ship 2 emitter) kki (ohmic contact with 5J, cathode operation, (ohmic contact with seagull 2 Hose J-, which was used on August J soil surface IkIQv), (Tut, the second part where a turtle appears on the main surface ob-
2nd base of the type /iw (J and Ohmic & Ffl are 1 tie 4-de area (υi) electric tower, αQ is tu Isami MJ
1 emitter no (4) wayohiku 1 base I1m (2J
111#, and the first base skin (2) that is thinned out to the master thJa4 and the 1st base skin (2) and the 1st type of ku low enemy no (2 etc.) and the anode electric picture that makes ohmic contact, and the anode prisoner is I'm here.

h丙で、仏々のゲート1檎(8ハエ、各々、ゲート籾に
接続されている。又、−々のエミッター檎(IsJと(
9)はカソード頓に接続されている。又石2エミッタ鳩
(6)と毘2ベース層(3)とで形成される接合は13
石2ペ一ス層(3)と第1ベース膚(2)とで形成され
る接合はJg、低抵抗層(2)′と亀1エミッタ胸(4
)で形成される接合はJlである。
In h C, there are 1 gate of Buddha (8 flies, each connected to the gate rice. Also, - each emitter of gate (IsJ and (
9) is connected to the cathode. Furthermore, the number of junctions formed between the stone 2 emitter layer (6) and the bi2 base layer (3) is 13.
The junction formed by the stone two-piece layer (3) and the first base skin (2) is Jg, the low resistance layer (2)' and the turtle one emitter chest (4
) is Jl.

かかる構造の超2)通形のゲート補助ターンオフサイリ
スタやゲートターンオフサイリスタでは、ターンオフ時
にゲート6)とカソード翰間に逆バイアス電圧を叩加し
た場合、ゲートリ)とカソード輪間に施れる11&Lv
rLは、残置キャリアによるkkkjtと電極(8)と
−榔(9)鵬の抵抗Rによって制除される一九j1とな
る。ターンオフ時間を短輸丁9には、残置キャリアによ
るm&jlを大きくする必要かある。
In a super-2) gate-assisted turn-off thyristor or gate turn-off thyristor with such a structure, when a reverse bias voltage is applied between the gate 6) and the cathode ring during turn-off, a voltage of 11&Lv is applied between the gate 6) and the cathode ring.
rL becomes 19j1, which is controlled by kkkjt due to the remaining carrier and the resistance R of the electrode (8) and the electrode (9). It is necessary to increase m&jl due to the remaining carrier for the transport plate 9 with a short turn-off time.

抵抗Rによって阪れる)k6tcは、ターンオフ時間の
短幅には伺等奇与せず、J2に九れる電池の分たけj+
を低下させるためG−に間逆バイアスによるターンオフ
時間の短軸効果を低絃させる。そこで、従来檎造では、
抵抗Rを大きくするために、IIL檎(8)とwIL極
〈9)の距−(分勲憎)を充分大きくする必要があった
。例えは、15V(7)逆バイアスで15AN度の1l
kfkGを麺き出し、j2をj+の10力札度に押えよ
うとすれはその抵抗Rを10Ω柱度にする必要がある。
k6tc has no effect on the shortness of the turn-off time, and the battery division j +
In order to reduce the short-axis effect of the turn-off time due to the reverse bias between G- and G-, the short-axis effect of the turn-off time is reduced. Therefore, in traditional ink making,
In order to increase the resistance R, it was necessary to make the distance between the IIL pole (8) and the wIL pole (9) sufficiently large. For example, 1l of 15AN degrees with 15V (7) reverse bias
In order to bring out kfkG and suppress j2 to the 10-power degree of j+, it is necessary to set its resistance R to 10-ohm degree.

通常サイリスタの第2ベース層(3)の、ミート抵抗(
ρs)1.L*十Ωに形成される。この場合に、リング
状の分離をし廻し、wL檎(8)の取外周の半佳lk:
r11亀@ (91の内周の半径をr2と丁れは、抵抗
Rは R=−組 In−で表わされる。
Normally, the meet resistance (
ρs)1. Formed to L*10Ω. In this case, a ring-shaped separation is carried out to remove the outer periphery of the wL apple (8).
r11 Tortoise@ (If the radius of the inner circumference of 91 is r2, the resistance R is expressed by the set R=-In-.

2π    rl ここで、飢えはrlを20u1分艦惜を2霧とした場合
には、R= 0.6ム稲良1こしかならない。
2π rl Here, if rl is 20 u1, and 2 pi rl is starvation, then R = 0.6 mu rice 1 kiri.

10jlk私度のRを夫祝するには、r2/rlを4以
上にする必要かあり、1幻血恒の低顛をもtこらし、拳
笑上実現不田能でゐつIJ。
In order to congratulate R of 10jlk, it is necessary to increase r2/rl to 4 or more, and IJ who is unable to realize it with a fist laugh even with the low performance of 1 Genketsu.

本尭明は、従来のかかる入点を改善丁べくなされfこも
ので、第8−に小丁実廊帆からも明らかなように、第1
ベース膚(2〕を土衣凹συに亀山させて、従来鈴では
共通であつtこサイリスタ饋域囚とダイオード領域の)
の第2ベースm (37を分軸することを特徴としてい
る。
Motoyaaki was an attempt to improve this conventional entry point, and as is clear from the 8th and 8th book, the 1st
The base skin (2) is made to have a Kameyama on the soil concave συ, which is common in conventional bells (in the thyristor region and diode region).
The second base m (37) is the second axis.

かかる栴造では、C)−0nに逆バイアスが印加された
時、亀@ (8)と11&L檎(9)との向には2つの
接合12かあるため、その間の抵抗Rは無限大となり、
1に極(8)と電極(9)の間を振れるー旅すを0にす
ることができる。すなわち、残留キャリアによるl1I
IL流jtのみを6)−■関連バイアスによって有効に
細き出すことかできる。又その分離幅は一々第2ベース
Mil(2)の大きさでよい。例えば2500V素子の
場合、分離幅は200μm程度となり、従来例より1桁
以上小さい分船幅で、無限大の抵抗Rを実現することか
できる。
In this SEIZO, when a reverse bias is applied to C)-0n, there are two junctions 12 in the direction of turtle@(8) and 11&L(9), so the resistance R between them becomes infinite. ,
1, the swing travel between the pole (8) and the electrode (9) can be reduced to 0. That is, l1I due to residual carrier
Only the IL flow jt can be effectively narrowed down by 6)-■ related bias. Further, the separation width may be equal to the size of the second base Mil(2). For example, in the case of a 2500V element, the separation width is approximately 200 μm, and an infinitely large resistance R can be realized with a separation width that is one order of magnitude smaller than the conventional example.

なお本発明は、上記失施帆に限追されるものではなく、
例えは、 pnpn構造の逆導通ゲート柚助ターンオフ
サイリスタ、ゲートターンオフサイリスタ、逆導通トラ
ンジスタにも応用できることはいうまでもない。
Note that the present invention is not limited to the above-mentioned lost sails,
For example, it goes without saying that it can be applied to a reverse conduction gate Yuzusuke turn-off thyristor, a gate turn-off thyristor, and a reverse conduction transistor having a pnpn structure.

以上のように本発明によるサイリスクは、相刈面する一
対の主表曲を1する半導体基体の中に少なくともpnp
nの一次隣接した4層領域からなるサイリスタ領域(T
h)と、@d b* ’グイリスタ饋fmを構成する中
筒のn−とp Jkを各々61シ半寺休柩体の異な9王
衣−着こ路出しCなるタイ掴−ドー楓(IJi)  と
4−4A@え、8d犯サイリスタ餓域(1h)の申開の
接合」2と曲IICタイ耳−ド餉叡(Dl)の張合j2
とか、同一の主人四に細出し、かつヌ!I閥1°るよう
に#lJaされ°Cいるので、サイリスター域のケート
−勧とダイオード−楓の一榔向の煽りLを従来のものに
比べて凧mbiこ植入゛することか−(き、ターンオフ
軸&を大幅に数置することかできる。
As described above, the silicon risk according to the present invention includes at least pnp in a semiconductor substrate having one principal surface curve in a pair of phase-cutting planes.
Thyristor region (T
h) and @d b* 'The n- and p Jk of the middle tube that make up the Guirista fm are 61 each, and the 9 different 9 royal clothes of the half-temple resting body - the arrival and departure of the road C become the tie grip - the do Kaede ( IJi) and 4-4A@E, 8d criminal thyristor starvation area (1h) combination of ``2'' and song IIC Thai ear-de-seni (Dl) combination j2
Or, stripping out to the same master, Katsunu! Since #lJa is set to 1°C, it is better to implant the gate in the thyristor region and the fan L across the diode in the kite mbi compared to the conventional one. It is possible to significantly increase the number of turn-off axes.

4、 区画の1+11単な祝明 第1丙(よ、従来のケート細動又はケートターンオフサ
イリスタを小−jg岨〜1面輪造区、第2凶1jその等
価回珀因、k48凶は本%明の一失九カをボ丁抛輪lI
1曲摘造凶である。
4. Section 1 + 11 simple Zhu Ming No. 1 (Yo, the conventional Kate fibrillation or Kate turn-off thyristor is small - JG ~ 1 side rotation area, No. 2 No. 1J is the equivalent recovery cause, K48 No. is the original %The loss of 9 points of light is taken away.
One song is a complete failure.

なお、凶l−1−11−−付+5+工向−または相当部
分をホ丁Q (1]・・・半尋俸品体、(2川・・第1ベース膚、(
3〕・・・第2    )ベース−1(4)・・・ti
l−,1エミッタ71th7.(6)・・・第2工芝ツ
タノー、(6)・・・第2ベースノN、(7)・・・カ
ソード14L梅、(8)・・・ゲート%L極、(9)・
・・lla像、OQ・・・アノード電極、(Th )・
・・サイリスタ領域、(L)i)・・・ダイオード領域
、6)・・・ゲート、(転)・・・カソード、(イ)・
・・アノード、(h)(Is) (Is)・・・接合。
In addition, 1-1-11-- + 5 + engineering direction - or the equivalent part is Hocho Q (1)...Half fat body, (2 rivers...1st base skin, (
3]...2nd)Base-1(4)...ti
l-, 1 emitter 71th7. (6)...Second artificial grass tube, (6)...Second base N, (7)...Cathode 14L plum, (8)...Gate % L pole, (9)...
...lla image, OQ... anode electrode, (Th)
...Thyristor region, (L)i)...Diode region, 6)...Gate, (inversion)...Cathode, (I)...
... Anode, (h) (Is) (Is)... Junction.

代理人  掲 kr  他 − 第1図 第2図 第3図 に 特許庁長官殿 1、事件の表示    特願昭6テ一111TO号2、
発明の名称 サイリスタ 3、補正をする者 6、補正の対象 図面 6、補正の内容 図面中の第2図を別紙の通り訂正する。
Agent posted by kr et al. - Figure 1, Figure 2, Figure 3 shows the Commissioner of the Japan Patent Office 1, and the case is shown in Patent Application No. 111TO No. 111 of 1983,
Name of the invention Thyristor 3, person making the correction 6, drawing to be corrected 6, contents of the correction Figure 2 in the drawings will be corrected as shown in the attached sheet.

以上 第2図that's all Figure 2

Claims (1)

【特許請求の範囲】 (1)相対間する一対の土表面を1する半導体基体の中
に少なくともp n p n Q)−次鉤板し、た4P
#I領域からなるサイリスタ開城と、1記サイリスタ領
域を禍成テる+−のnノーとp胸を各々lIu記半導体
基体の異なる王表回に麹出しCなるタイオード領域とを
備え、IItll!cサイリスタ領域の中間の接合と曲
りしタイオード領域の接合とが同一の上衣面に胤出し、
かつ刈面していることをlNf?1にとするサイリスタ
。 (21タ一ンオフ時にサイリスタを転死させ、かつゲー
ト−カソード間を逆バイアスするケート補助ターンオフ
により、ターンオフ時間を短輪する機能をもつ特許請求
の軛囲第1項記秘のサイリスタ。 (3)ゲートターンオフta日ビをもつ特許請求の範囲
船1樵Ha戦のサイリスタ。
[Scope of Claims] (1) At least p n p n Q)-next plate is placed in a semiconductor substrate having a pair of soil surfaces facing each other;
A thyristor opening consisting of the #I region, and a diode region consisting of a kojidashi C and a +-n no and p chest which are connected to the thyristor region 1 and 1 and 1 and 1 and 1 and 1 and 1 and 1 and 1 and 1, respectively, respectively, and a diode region consisting of a kojidashi C on different sides of the semiconductor substrate, IItll! c The middle junction of the thyristor region and the junction of the bent diode region are exposed on the same upper surface,
And that the surface is cut is lNf? Thyristor with 1. (21) The thyristor disclosed in Paragraph 1 of the patent claim, which has the function of shortening the turn-off time by causing the thyristor to fall during turn-off and reverse biasing between the gate and the cathode. (3 ) A thyristor for the claimed ship 1 lumberjack with a gate turn-off.
JP1197082A 1982-01-27 1982-01-27 Thyristor Pending JPS58128766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1197082A JPS58128766A (en) 1982-01-27 1982-01-27 Thyristor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1197082A JPS58128766A (en) 1982-01-27 1982-01-27 Thyristor

Publications (1)

Publication Number Publication Date
JPS58128766A true JPS58128766A (en) 1983-08-01

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ID=11792469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1197082A Pending JPS58128766A (en) 1982-01-27 1982-01-27 Thyristor

Country Status (1)

Country Link
JP (1) JPS58128766A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62205661A (en) * 1986-03-05 1987-09-10 Mitsubishi Electric Corp Manufacture of reverse conducting gto

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50117377A (en) * 1974-02-28 1975-09-13
JPS5336999A (en) * 1976-09-16 1978-04-05 Rheinmetall Gmbh Propulsive powder explosive
JPS5375430A (en) * 1976-12-17 1978-07-04 Toshiba Corp Inverse conduction gto rectifler

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50117377A (en) * 1974-02-28 1975-09-13
JPS5336999A (en) * 1976-09-16 1978-04-05 Rheinmetall Gmbh Propulsive powder explosive
JPS5375430A (en) * 1976-12-17 1978-07-04 Toshiba Corp Inverse conduction gto rectifler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62205661A (en) * 1986-03-05 1987-09-10 Mitsubishi Electric Corp Manufacture of reverse conducting gto

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