JPS58127133A - 光学装置による波面変形の測定法と測定装置 - Google Patents

光学装置による波面変形の測定法と測定装置

Info

Publication number
JPS58127133A
JPS58127133A JP19518982A JP19518982A JPS58127133A JP S58127133 A JPS58127133 A JP S58127133A JP 19518982 A JP19518982 A JP 19518982A JP 19518982 A JP19518982 A JP 19518982A JP S58127133 A JPS58127133 A JP S58127133A
Authority
JP
Japan
Prior art keywords
optical device
phase
measurement
measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19518982A
Other languages
English (en)
Japanese (ja)
Inventor
ベルナ−ル・ピカ−ル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of JPS58127133A publication Critical patent/JPS58127133A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP19518982A 1981-11-06 1982-11-06 光学装置による波面変形の測定法と測定装置 Pending JPS58127133A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FR8120840 1981-11-06
FR8120840A FR2516236A1 (fr) 1981-11-06 1981-11-06 Dispositif et procede pour mesurer les deformations de surface d'onde introduites par un systeme optique
FR8207499 1982-04-30
FR8207645 1982-05-03

Publications (1)

Publication Number Publication Date
JPS58127133A true JPS58127133A (ja) 1983-07-28

Family

ID=9263767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19518982A Pending JPS58127133A (ja) 1981-11-06 1982-11-06 光学装置による波面変形の測定法と測定装置

Country Status (2)

Country Link
JP (1) JPS58127133A (OSRAM)
FR (1) FR2516236A1 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119901462A (zh) * 2024-12-31 2025-04-29 天府兴隆湖实验室 一种基于透射式光学元件波前畸变的评估方法、系统、设备及介质

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194970A (OSRAM) * 1975-01-14 1976-08-20

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3767307A (en) * 1971-08-30 1973-10-23 Itek Corp Real time interferometer
US3796495A (en) * 1972-05-30 1974-03-12 Zenith Radio Corp Apparatus and methods for scanning phase profilometry

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5194970A (OSRAM) * 1975-01-14 1976-08-20

Also Published As

Publication number Publication date
FR2516236A1 (fr) 1983-05-13
FR2516236B1 (OSRAM) 1983-12-23

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