JPS5812439Y2 - ウェハピッチ変換器 - Google Patents

ウェハピッチ変換器

Info

Publication number
JPS5812439Y2
JPS5812439Y2 JP663776U JP663776U JPS5812439Y2 JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2 JP 663776 U JP663776 U JP 663776U JP 663776 U JP663776 U JP 663776U JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2
Authority
JP
Japan
Prior art keywords
wafer
pitch
wafer receiver
receiver
shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP663776U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5299771U (US20030204162A1-20031030-M00001.png
Inventor
順二 井口
正博 中島
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP663776U priority Critical patent/JPS5812439Y2/ja
Publication of JPS5299771U publication Critical patent/JPS5299771U/ja
Application granted granted Critical
Publication of JPS5812439Y2 publication Critical patent/JPS5812439Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Discharge By Other Means (AREA)
  • Chemical Vapour Deposition (AREA)
JP663776U 1976-01-23 1976-01-23 ウェハピッチ変換器 Expired JPS5812439Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP663776U JPS5812439Y2 (ja) 1976-01-23 1976-01-23 ウェハピッチ変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP663776U JPS5812439Y2 (ja) 1976-01-23 1976-01-23 ウェハピッチ変換器

Publications (2)

Publication Number Publication Date
JPS5299771U JPS5299771U (US20030204162A1-20031030-M00001.png) 1977-07-28
JPS5812439Y2 true JPS5812439Y2 (ja) 1983-03-09

Family

ID=28467209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP663776U Expired JPS5812439Y2 (ja) 1976-01-23 1976-01-23 ウェハピッチ変換器

Country Status (1)

Country Link
JP (1) JPS5812439Y2 (US20030204162A1-20031030-M00001.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533027A (en) * 1978-08-30 1980-03-08 Fujitsu Ltd Substrate conveyor

Also Published As

Publication number Publication date
JPS5299771U (US20030204162A1-20031030-M00001.png) 1977-07-28

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