JPS5812439Y2 - ウェハピッチ変換器 - Google Patents
ウェハピッチ変換器Info
- Publication number
- JPS5812439Y2 JPS5812439Y2 JP663776U JP663776U JPS5812439Y2 JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2 JP 663776 U JP663776 U JP 663776U JP 663776 U JP663776 U JP 663776U JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pitch
- wafer receiver
- receiver
- shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge By Other Means (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP663776U JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP663776U JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5299771U JPS5299771U (US20030204162A1-20031030-M00001.png) | 1977-07-28 |
JPS5812439Y2 true JPS5812439Y2 (ja) | 1983-03-09 |
Family
ID=28467209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP663776U Expired JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5812439Y2 (US20030204162A1-20031030-M00001.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5533027A (en) * | 1978-08-30 | 1980-03-08 | Fujitsu Ltd | Substrate conveyor |
-
1976
- 1976-01-23 JP JP663776U patent/JPS5812439Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5299771U (US20030204162A1-20031030-M00001.png) | 1977-07-28 |
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