JPS5812439Y2 - ウェハピッチ変換器 - Google Patents
ウェハピッチ変換器Info
- Publication number
- JPS5812439Y2 JPS5812439Y2 JP663776U JP663776U JPS5812439Y2 JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2 JP 663776 U JP663776 U JP 663776U JP 663776 U JP663776 U JP 663776U JP S5812439 Y2 JPS5812439 Y2 JP S5812439Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pitch
- wafer receiver
- receiver
- shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 51
- 239000011295 pitch Substances 0.000 description 22
- 239000012535 impurity Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000003825 pressing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Discharge By Other Means (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663776U JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663776U JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5299771U JPS5299771U (OSRAM) | 1977-07-28 |
| JPS5812439Y2 true JPS5812439Y2 (ja) | 1983-03-09 |
Family
ID=28467209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP663776U Expired JPS5812439Y2 (ja) | 1976-01-23 | 1976-01-23 | ウェハピッチ変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812439Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5533027A (en) * | 1978-08-30 | 1980-03-08 | Fujitsu Ltd | Substrate conveyor |
-
1976
- 1976-01-23 JP JP663776U patent/JPS5812439Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5299771U (OSRAM) | 1977-07-28 |
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