JPS5812119Y2 - 気体充填装置 - Google Patents

気体充填装置

Info

Publication number
JPS5812119Y2
JPS5812119Y2 JP812876U JP812876U JPS5812119Y2 JP S5812119 Y2 JPS5812119 Y2 JP S5812119Y2 JP 812876 U JP812876 U JP 812876U JP 812876 U JP812876 U JP 812876U JP S5812119 Y2 JPS5812119 Y2 JP S5812119Y2
Authority
JP
Japan
Prior art keywords
pressure
flow path
valve
gas filling
filling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP812876U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52101485U (enExample
Inventor
山崎裕一
Original Assignee
東京オトマチックコントロル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京オトマチックコントロル株式会社 filed Critical 東京オトマチックコントロル株式会社
Priority to JP812876U priority Critical patent/JPS5812119Y2/ja
Publication of JPS52101485U publication Critical patent/JPS52101485U/ja
Application granted granted Critical
Publication of JPS5812119Y2 publication Critical patent/JPS5812119Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP812876U 1976-01-29 1976-01-29 気体充填装置 Expired JPS5812119Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP812876U JPS5812119Y2 (ja) 1976-01-29 1976-01-29 気体充填装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP812876U JPS5812119Y2 (ja) 1976-01-29 1976-01-29 気体充填装置

Publications (2)

Publication Number Publication Date
JPS52101485U JPS52101485U (enExample) 1977-08-01
JPS5812119Y2 true JPS5812119Y2 (ja) 1983-03-08

Family

ID=28468603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP812876U Expired JPS5812119Y2 (ja) 1976-01-29 1976-01-29 気体充填装置

Country Status (1)

Country Link
JP (1) JPS5812119Y2 (enExample)

Also Published As

Publication number Publication date
JPS52101485U (enExample) 1977-08-01

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