JPS5811788Y2 - 基板移し換え装置 - Google Patents

基板移し換え装置

Info

Publication number
JPS5811788Y2
JPS5811788Y2 JP13175678U JP13175678U JPS5811788Y2 JP S5811788 Y2 JPS5811788 Y2 JP S5811788Y2 JP 13175678 U JP13175678 U JP 13175678U JP 13175678 U JP13175678 U JP 13175678U JP S5811788 Y2 JPS5811788 Y2 JP S5811788Y2
Authority
JP
Japan
Prior art keywords
substrate
substrates
guide groove
transfer device
row
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13175678U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5550029U (en:Method
Inventor
阿藤和彦
菊池康夫
小林喬雄
菅原隆史
大津浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13175678U priority Critical patent/JPS5811788Y2/ja
Publication of JPS5550029U publication Critical patent/JPS5550029U/ja
Application granted granted Critical
Publication of JPS5811788Y2 publication Critical patent/JPS5811788Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13175678U 1978-09-27 1978-09-27 基板移し換え装置 Expired JPS5811788Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13175678U JPS5811788Y2 (ja) 1978-09-27 1978-09-27 基板移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13175678U JPS5811788Y2 (ja) 1978-09-27 1978-09-27 基板移し換え装置

Publications (2)

Publication Number Publication Date
JPS5550029U JPS5550029U (en:Method) 1980-04-01
JPS5811788Y2 true JPS5811788Y2 (ja) 1983-03-05

Family

ID=29098648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13175678U Expired JPS5811788Y2 (ja) 1978-09-27 1978-09-27 基板移し換え装置

Country Status (1)

Country Link
JP (1) JPS5811788Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201852U (en:Method) * 1987-06-19 1988-12-26

Also Published As

Publication number Publication date
JPS5550029U (en:Method) 1980-04-01

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