JPS58115740A - 電子線装置の試料駆動機構 - Google Patents
電子線装置の試料駆動機構Info
- Publication number
- JPS58115740A JPS58115740A JP56209919A JP20991981A JPS58115740A JP S58115740 A JPS58115740 A JP S58115740A JP 56209919 A JP56209919 A JP 56209919A JP 20991981 A JP20991981 A JP 20991981A JP S58115740 A JPS58115740 A JP S58115740A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- axis
- adjustment
- shaft
- coordinate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 title claims description 44
- 238000010894 electron beam technology Methods 0.000 title claims description 7
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 241000287531 Psittacidae Species 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56209919A JPS58115740A (ja) | 1981-12-28 | 1981-12-28 | 電子線装置の試料駆動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56209919A JPS58115740A (ja) | 1981-12-28 | 1981-12-28 | 電子線装置の試料駆動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58115740A true JPS58115740A (ja) | 1983-07-09 |
| JPS645744B2 JPS645744B2 (enExample) | 1989-01-31 |
Family
ID=16580830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56209919A Granted JPS58115740A (ja) | 1981-12-28 | 1981-12-28 | 電子線装置の試料駆動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58115740A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07276003A (ja) * | 1994-04-07 | 1995-10-24 | Nippon Steel Corp | 双ロール式連続鋳造法における鋳片表層スケール低減方法及び双ロール式連続鋳造装置 |
-
1981
- 1981-12-28 JP JP56209919A patent/JPS58115740A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS645744B2 (enExample) | 1989-01-31 |
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