JPS581128A - Transparent patterned electrode - Google Patents

Abstract

PURPOSE:To avoid waste in a removing stage and to prevent a transparent patterned electrode on an insulating substrate used in an electrooptical display element such as a liq. crystal display device from looking like a thin electrode by removing only linear parts along the peripheries of the segments of the electrode and leads from an electrically conductive transparent film formed on the whole surface of the substrate. CONSTITUTION:By removing only linear parts 8 along the peripheries of segments 5 and leads 6 while leaving other parts 7 having no relation to the segments 5 and the leads 6, the segments 5 and the leads 6 are electrically isolated from each other. Since the parts 7 having no relation to the segments 5 and the leads 6 remain on the display surface, the transparent electrode does not look like a patterned thin electrode, and when removal is carried out using laser beams or electron beams, this method is advantageous because the parts to be removed is small.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a transparent pattern electrode on an insulating substrate used in an electro-optic display element such as a liquid crystal display.

As shown in Fig. 1, the method for manufacturing transparent pattern electrodes is as follows: (An Al glass substrate 11+ is prepared, and (B) a transparent material such as tin or tin chloride is deposited on this glass substrate (1) after oxidation. Conductive metals or metal salts (
2) is deposited and (C) is oxidized by heating to a high temperature of 11& in an oxidizing atmosphere such as in oxygen to form a transparent conductive @(3+), (
D) This transparent conductive film 131K is irradiated with a laser beam III or an electron beam (9) in a negative pattern to remove unnecessary portions of the transparent conductive film (3) and form a positive pattern.
((Turn) Prepare a glass substrate + 11 - (B) On this glass substrate (1), after oxidation such as Ell or tin chloride, a transparent and conductive metal or metal salt (2) is attached. 0) This metal or metal salt (2) K is irradiated with a laser beam or an electron beam (9) in a negative pattern to remove unnecessary parts, and the metal or metal salt II ( 21 remains, IJ)) The metal or metal salts (21) remained in this positive pattern.
) has been previously proposed by the inventors of the present invention, in which a transparent patterned electrode (4) is obtained by heating it at high temperature in an oxidizing atmosphere such as oxygen to oxidize it.

According to this manufacturing method of transparent pattern electrodes, it is possible to mass-produce precise pattern electrodes, but during the manufacturing process there is a deletion process using laser beams or electron beams, and this deletion process consumes energy. is consumed, so it is desirable to delete as few parts as possible.

Furthermore, as shown in the plan view of FIG. 3, the conventional transparent pattern electrode has a segment (5
) and the lead drawn from this segment (5) (
6), and the part (7) other than the segment (5) and lead (6) was completely removed, so although the electrode was transparent, the turn electrode sometimes appeared thin (0 Therefore, the present invention was devised to solve the problems of the conventional transparent turn electrode, and as shown in the plan view of FIG.
) and a linear portion (8) along the periphery of the lead (6)
Delete only segment (5) and lead +61
The other portions ()) not related to K IIA remain, and each segment (5) and lead (6) are electrically isolated.

Note that due to the connection between the end of the lead (6) and an external element (not shown), of the remaining portion A, especially the peripheral portion (
If 7f becomes a hindrance, this peripheral portion +71'' can be deleted.

When the transparent turn electrode formed on such a substrate 0) is incorporated into a liquid crystal display device, the remaining portions (7) unrelated to the segments (5) and leads (6) may be left unconnected. , or connect to the same potential point as the counter electrode,
It is sufficient that no electric field is generated in the liquid crystal material.

The wavelength of the laser beam (9) irradiated to remove the transparent conductive film (3) or a substance such as a transparent and conductive metal or metal salt (2) after oxidation includes a wavelength that is easily absorbed by the irradiated substance. In addition, the device that irradiates the laser beam (9) in a negative pattern may be a device that operates on the same principle as a laser printer, which is known as an output device for electronic calculations. As shown in the figure, a laser light source a is placed on a substrate (1) that moves at a constant speed.
This can be carried out by sweeping the laser beam (9) from e by a rotating mirror υ and modulating the laser beam jla by a pattern signal from a pattern signal generator 03.

Further, when performing the deletion process using an electron beam, it can be easily carried out using the same principle as the deflection and modulation of the electron beam used in an AM tube.

Since high energy density can be obtained by focusing a laser beam, and high energy density can be obtained by focusing and accelerating an electron beam, the removal process of the transparent pattern electrode of the present invention can be performed using a laser beam or an electron beam. For example, the shape and deletion width of the patterned electrode can be controlled by 1) JVC, and highly accurate patterned electrodes can be made in a short time and with less energy.

As explained above, the transparent pattern electrode of this invention
tf, a portion unrelated to segment (5) and lead (6) on the display surface +714. Since it remains, the five transparent electrodes are not visible in a pattern, and there are fewer parts to be removed during manufacturing, which is advantageous.

[Brief explanation of the drawing]

1 and 2 are cross-sectional views showing an example of a method for manufacturing a transparent pattern electrode in the order of steps, FIG. 3 is a plan view of a conventional transparent pattern electrode, and FIG. 4 is a transparent pattern electrode of the present invention. FIG. 5 is a schematic diagram showing an example of a laser beam irradiation device used in the manufacturing process of the transparent pattern electrode of the present invention. 1... Insulating substrate such as glass, 3... Transparent conductive film, 5... Segment, 6... Lead, 8%... Linear portion along segment and lead,

Claims (1)

[Claims] A transparent conductive film is formed on a portion other than a segment forming a part of a character or figure and a linear portion along the periphery of a lead drawn out from the segment. A transparent pattern electrode formed on an insulating substrate, characterized in that each segment and each lead drawn out from the segment are electrically isolated.