JPS58112296A - シリコンで被覆した炭素フアイバーから形成される流体透過性電熱素子とその製造方法 - Google Patents
シリコンで被覆した炭素フアイバーから形成される流体透過性電熱素子とその製造方法Info
- Publication number
- JPS58112296A JPS58112296A JP21912382A JP21912382A JPS58112296A JP S58112296 A JPS58112296 A JP S58112296A JP 21912382 A JP21912382 A JP 21912382A JP 21912382 A JP21912382 A JP 21912382A JP S58112296 A JPS58112296 A JP S58112296A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- precursor
- heating
- heating element
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims description 21
- 238000005485 electric heating Methods 0.000 title claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 133
- 238000000576 coating method Methods 0.000 claims description 51
- 239000007789 gas Substances 0.000 claims description 45
- 239000011248 coating agent Substances 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 36
- 239000002243 precursor Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- 239000000835 fiber Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 238000012546 transfer Methods 0.000 claims description 20
- 230000003647 oxidation Effects 0.000 claims description 19
- 238000007254 oxidation reaction Methods 0.000 claims description 19
- 239000002019 doping agent Substances 0.000 claims description 18
- 239000012298 atmosphere Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 229920002972 Acrylic fiber Polymers 0.000 claims 1
- -1 FFL Chemical compound 0.000 claims 1
- 238000010009 beating Methods 0.000 claims 1
- 238000010000 carbonizing Methods 0.000 claims 1
- 230000004438 eyesight Effects 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 38
- 239000007833 carbon precursor Substances 0.000 description 25
- 229910052786 argon Inorganic materials 0.000 description 19
- 239000003921 oil Substances 0.000 description 19
- 238000003763 carbonization Methods 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 11
- 239000005977 Ethylene Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- 229910010271 silicon carbide Inorganic materials 0.000 description 11
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 10
- 229910000077 silane Inorganic materials 0.000 description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 230000004044 response Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000004952 Polyamide Substances 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 229920002647 polyamide Polymers 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 206010047700 Vomiting Diseases 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000010724 circulating oil Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 239000013529 heat transfer fluid Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 230000008673 vomiting Effects 0.000 description 1
- 238000004018 waxing Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- HEBKCHPVOIAQTA-SCDXWVJYSA-N xylitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)CO HEBKCHPVOIAQTA-SCDXWVJYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
- F24H1/102—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance
- F24H1/103—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance with bare resistances in direct contact with the fluid
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Resistance Heating (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB37673 | 1981-12-14 | ||
| GB8137673 | 1981-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58112296A true JPS58112296A (ja) | 1983-07-04 |
| JPH0416914B2 JPH0416914B2 (https=) | 1992-03-25 |
Family
ID=10526598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21912382A Granted JPS58112296A (ja) | 1981-12-14 | 1982-12-14 | シリコンで被覆した炭素フアイバーから形成される流体透過性電熱素子とその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0082627B1 (https=) |
| JP (1) | JPS58112296A (https=) |
| DE (2) | DE3278066D1 (https=) |
| GB (1) | GB2111809B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2264617A (en) * | 1991-10-08 | 1993-09-01 | Atomic Energy Authority Uk | Porous heating element |
| WO2014070798A1 (en) * | 2012-10-29 | 2014-05-08 | Forever Young International, Inc. | Temperature changing intracorporeal fluid delivery devices |
| DE102019203227A1 (de) * | 2019-03-11 | 2020-09-17 | Audi Ag | Formwerkzeug zum Urformen oder Umformen eines Werkstücks mit einer Temperiereinrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884937A (https=) * | 1972-02-02 | 1973-11-10 | ||
| JPS5117040A (ja) * | 1974-08-02 | 1976-02-10 | Tokyo Shibaura Electric Co | Kaabonhatsunetsutai |
| GB2056829A (en) * | 1979-06-14 | 1981-03-18 | Atomic Energy Authority Uk | Improvements in or relating to heat transfer elements and systems |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1466240A (en) * | 1973-02-26 | 1977-03-02 | Atomic Energy Authority Uk | Heating devices |
| GB1503644A (en) * | 1975-04-21 | 1978-03-15 | Fogarty & Co Ltd E | Method and apparatus for forming fibrous cylindrical element |
| GB1600253A (en) * | 1977-05-23 | 1981-10-14 | Atomic Energy Authority Uk | Porous heater elements |
| DE3040693A1 (de) * | 1979-11-08 | 1981-05-27 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Verfahren zur metallisierung von halbleiterbauelementen |
-
1982
- 1982-12-06 DE DE8282306494T patent/DE3278066D1/de not_active Expired
- 1982-12-06 DE DE1982306494 patent/DE82627T1/de active Pending
- 1982-12-06 GB GB08234714A patent/GB2111809B/en not_active Expired
- 1982-12-06 EP EP82306494A patent/EP0082627B1/en not_active Expired
- 1982-12-14 JP JP21912382A patent/JPS58112296A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884937A (https=) * | 1972-02-02 | 1973-11-10 | ||
| JPS5117040A (ja) * | 1974-08-02 | 1976-02-10 | Tokyo Shibaura Electric Co | Kaabonhatsunetsutai |
| GB2056829A (en) * | 1979-06-14 | 1981-03-18 | Atomic Energy Authority Uk | Improvements in or relating to heat transfer elements and systems |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2111809A (en) | 1983-07-06 |
| GB2111809B (en) | 1985-08-21 |
| EP0082627A1 (en) | 1983-06-29 |
| EP0082627B1 (en) | 1988-01-27 |
| JPH0416914B2 (https=) | 1992-03-25 |
| DE3278066D1 (en) | 1988-03-03 |
| DE82627T1 (de) | 1984-02-16 |
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