JPS58111709A - 平面度測定装置 - Google Patents

平面度測定装置

Info

Publication number
JPS58111709A
JPS58111709A JP21541881A JP21541881A JPS58111709A JP S58111709 A JPS58111709 A JP S58111709A JP 21541881 A JP21541881 A JP 21541881A JP 21541881 A JP21541881 A JP 21541881A JP S58111709 A JPS58111709 A JP S58111709A
Authority
JP
Japan
Prior art keywords
image sensor
interference fringes
flatness
optical means
address
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21541881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632446B2 (enExample
Inventor
Toshiaki Wada
和田　俊朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP21541881A priority Critical patent/JPS58111709A/ja
Priority to US06/449,733 priority patent/US4627733A/en
Priority to DE19823247238 priority patent/DE3247238A1/de
Publication of JPS58111709A publication Critical patent/JPS58111709A/ja
Publication of JPS632446B2 publication Critical patent/JPS632446B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21541881A 1981-12-25 1981-12-25 平面度測定装置 Granted JPS58111709A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP21541881A JPS58111709A (ja) 1981-12-25 1981-12-25 平面度測定装置
US06/449,733 US4627733A (en) 1981-12-25 1982-12-14 Flatness measuring apparatus
DE19823247238 DE3247238A1 (de) 1981-12-25 1982-12-21 Ebenheitsmessgeraet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21541881A JPS58111709A (ja) 1981-12-25 1981-12-25 平面度測定装置

Publications (2)

Publication Number Publication Date
JPS58111709A true JPS58111709A (ja) 1983-07-02
JPS632446B2 JPS632446B2 (enExample) 1988-01-19

Family

ID=16672002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21541881A Granted JPS58111709A (ja) 1981-12-25 1981-12-25 平面度測定装置

Country Status (1)

Country Link
JP (1) JPS58111709A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109883355A (zh) * 2019-03-05 2019-06-14 深圳市中图仪器股份有限公司 一种自动找寻干涉条纹的方法和装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159258A (en) * 1978-06-06 1979-12-15 Sumitomo Spec Metals Method of measuring flatness
JPS5693003A (en) * 1979-12-27 1981-07-28 Fujitsu Ltd Measuring device for plane degree

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159258A (en) * 1978-06-06 1979-12-15 Sumitomo Spec Metals Method of measuring flatness
JPS5693003A (en) * 1979-12-27 1981-07-28 Fujitsu Ltd Measuring device for plane degree

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109883355A (zh) * 2019-03-05 2019-06-14 深圳市中图仪器股份有限公司 一种自动找寻干涉条纹的方法和装置

Also Published As

Publication number Publication date
JPS632446B2 (enExample) 1988-01-19

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