JPS58111128A - Manufacture of abrasion resistant magnetic recording material - Google Patents

Manufacture of abrasion resistant magnetic recording material

Info

Publication number
JPS58111128A
JPS58111128A JP56207997A JP20799781A JPS58111128A JP S58111128 A JPS58111128 A JP S58111128A JP 56207997 A JP56207997 A JP 56207997A JP 20799781 A JP20799781 A JP 20799781A JP S58111128 A JPS58111128 A JP S58111128A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic film
ion bombardment
tape
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56207997A
Other languages
Japanese (ja)
Other versions
JPH0353693B2 (en
Inventor
Kyuzo Nakamura
久三 中村
Yoshifumi Oota
太田 賀文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP56207997A priority Critical patent/JPS58111128A/en
Publication of JPS58111128A publication Critical patent/JPS58111128A/en
Publication of JPH0353693B2 publication Critical patent/JPH0353693B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction

Abstract

PURPOSE:To enhance abrasion resistance, by subjecting a magnetic film to ion bombarding treatment prior to vapor depositing a higher aliphatic acid or its metal salt on the magnetic film. CONSTITUTION:A magnetic tape (a) is allowed to travel between rollers 2 located in a vacuum chamber in one direction, voltage is applied to an electrode 4 for ion bombardment, for example, gaseous argon is allowed to ion bombard the magnetic tape face (b) to remove impurities of moisture, dust, or the like on the face (b), and the tape is wound on one of the rollers 2. Then, the tape (a) treated by ion bombardment is allowed to travel in the reverse direction, and a higher aliphatic acid or its metal salt 15, such as stearic acid or lithium stearate or the like lubricant, is vapor deposited onto the magnetic film face (b) from a crucible 14. The ion bombardment may be carried out in an atm. contg. an acidic gas.

Description

【発明の詳細な説明】 本発明は、磁性膜面に高級脂肪酸又はその金jIK地を
真空蒸着させて耐摩耗性を向上させた磁気記録体の製造
法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic recording medium in which a higher aliphatic acid or a gold jIK base thereof is vacuum-deposited on a magnetic film surface to improve wear resistance.

最近、斜め蒸着磁性膜、0o−Or撫直磁性膜、O。Recently, obliquely deposited magnetic films, 0o-Or rectangular magnetic films, and O.

Mi  P l ツキ膜、r  1@@OBスハ7 夕
3%、Ba0−IF・−、スパッタ膜など金属や金属酸
化物の磁性膜を合成樹脂製等の非磁性基材上に形成した
高密度記録特性の優れた磁気テープ、磁気デスク等の磁
気記録体が知られて居り、その磁性膜の耐摩耗性を向上
せしめるため、高級脂肪酸又はその金属塩を真空蒸着に
よりその磁性膜面にその蒸着膜を肉薄に且つ強固に形成
した耐摩耗性磁気記録体の製造を提案した0 (特願昭
55−19415号1仝51−42279号)。
High-density film made of a magnetic film of metal or metal oxide, such as Mi P l film, r 1 @ @ OB Suha 7 3%, Ba0-IF・-, sputtered film, formed on a non-magnetic base material such as synthetic resin. Magnetic recording media such as magnetic tapes and magnetic disks with excellent recording properties are known, and in order to improve the abrasion resistance of their magnetic films, higher fatty acids or their metal salts are deposited on the magnetic film surface by vacuum evaporation. 0 (Japanese Patent Application No. 55-19415 No. 1-51-42279) proposed the production of a wear-resistant magnetic recording material with a thin and strong film.

本発明者は、該磁性膜の表面状態により1その高級脂肪
酸又はその金属塩の蒸着粒子の密着強度が微妙に影響し
、特に1製造後1一旦外気噂に触れて磁性膜表面に水分
%”1%塵埃その他の汚染物質が付着した状態の1−こ
れに高級脂肪酸又はその金属塩を真空蒸着させても、そ
の密着性が、その部分で劣化し、全体として剥離し易い
即ち1密着性の弱い、換言すれば1耐摩耗性の劣る耐摩
耗性磁気記録体が得られることが認められる・ 本発明は、か−る不都合がなく、磁性膜面に強幽に密着
し、耐摩耗性の向上した磁気記録体をS*に得る方法を
提供したもので、磁気記録体基材面に形成した磁性膜面
に高級脂肪酸又はその金属塩を真空蒸着するに先立ち、
該磁性膜面にイオンボンバード処理を行なうことを特徴
とする。
The present inventor has discovered that the adhesion strength of vapor-deposited particles of the higher fatty acid or its metal salt is subtly affected by the surface condition of the magnetic film, and in particular, once exposed to the outside air after manufacturing, the surface of the magnetic film becomes moisture %. Even if higher fatty acids or their metal salts are vacuum-deposited on 1-1 with 1% dust and other contaminants attached, the adhesion deteriorates in that area and is easily peeled off as a whole. It is recognized that a wear-resistant magnetic recording material with weak, in other words, poor abrasion resistance can be obtained. This provides a method for obtaining an improved magnetic recording material S*, and prior to vacuum-depositing higher fatty acids or their metal salts on the magnetic film surface formed on the magnetic recording material substrate surface,
The method is characterized in that the surface of the magnetic film is subjected to ion bombardment treatment.

更に本発明によれば、上記の製造法に於て、一層その耐
摩耗性を向上せしめた耐摩耗性磁気記録体を製造する方
法を提供するもので、磁気記録体基材面に形成した磁性
膜面に高級脂肪酸又はその金属塩を真空蒸着するに先立
ち、該磁性1!1面に酸素等の酸化性ガスを含む雰囲気
下でボンバード処理を行なうことを特徴とする。
Furthermore, according to the present invention, there is provided a method for manufacturing a wear-resistant magnetic recording material that further improves the wear resistance of the above-mentioned manufacturing method. The method is characterized in that, prior to vacuum-depositing higher fatty acids or metal salts thereof on the film surface, the magnetic 1!1 surface is subjected to bombardment treatment in an atmosphere containing an oxidizing gas such as oxygen.

次に本発明の製1!1沫の実施例を説明する。Next, a description will be given of an example of a 1:1 film according to the present invention.

によりOo−!i0%lIiから成る斜め蒸着磁性膜(
厚さ2500ム)を形成し飽和磁化10400G1保磁
力900o・の磁気テープを作成した0次に之を添付図
面に示す本性を実施するための真空蒸着装置ムの真空容
器11)内の上部に配設した1対のロール(2) +2
1間にかけて設置した(、aは前記磁気テープを示す。
By Oo-! An obliquely deposited magnetic film consisting of i0%lIi (
A magnetic tape having a thickness of 2,500 μm) and a saturation magnetization of 10,400 G and a coercive force of 900 μm was prepared. A pair of rolls (2) +2
The magnetic tape was installed for 1 hour (a indicates the magnetic tape).

図面で、(3)は、1方のp−ル(2)をベルトを介し
駆動する正逆回転の駆動モータニを示す。(4)は、外
部の直流電It(51に接続するメツシュ状のイオンボ
ンバード用電極を示し、該電極(4)は、該磁気チー1
1の磁性膜面下方に対向し平行設置されている。(6)
は、容器(1)の下部側面に導入されたガス供給管を示
し、該11F +6)に介入のパルプ(7)により、酸
素ガスやアルゴン等の不活性ガス等のガス量の供給が調
節自在となり、真空容器内のそのガス圧を適当に調節さ
れる。磁気テープaの張設された水平面部の中間部直下
に蒸発用加熱器(8)を設置する。
In the drawings, (3) indicates a drive motor that rotates in forward and reverse directions to drive one of the pulleys (2) via a belt. (4) shows a mesh-like ion bombardment electrode connected to the external DC current It (51), and the electrode (4) is connected to the magnetic team 1.
They are arranged parallel to and opposite to each other below the surface of the magnetic film of No. 1. (6)
shows a gas supply pipe introduced into the lower side of the container (1), and the amount of gas such as oxygen gas or inert gas such as argon can be freely adjusted by the pulp (7) inserted at 11F +6). Then, the gas pressure inside the vacuum container is adjusted appropriately. An evaporation heater (8) is installed directly below the intermediate portion of the horizontal surface portion on which the magnetic tape a is stretched.

該加熱II (8)は、外周面にタンタル11(9)を
コイル状に巻き付けた縦型の炉芯筒a−とその外周を被
包した耐大ウール等から成る外筒■とから成り、該コイ
ル状タンタル巻線(9)は外部の交流電源Iに接続し、
スライダックIにより加熱温度が制御されるようにした
。a4は、該筒状加熱I!#(8)内に収容したるつぼ
を示し、蒙るつぼI内に所望の一類の高級脂肪酸又はそ
の金属塩の潤滑剤aSを入れる・翰は、該原料鱈の加熱
温度を測定するための熱電対を示す。これにより、その
温度を測定し乍ら、前記スライダック0を操作し、加熱
温度を適当に調節するようにした* a?lは、前記イ
オンボンバード電fi64)の下方に設けた磁気テープ
aの磁性膜11面加熱用の赤外線テンプヒーターと反射
鏡から成る加熱器を示し、蒙加熱−67)は、外部の交
流電源a蹄に接続している。
The heating II (8) consists of a vertical furnace core cylinder a- whose outer periphery is wrapped with tantalum 11 (9) in a coil shape, and an outer cylinder (2) made of heavy-duty wool or the like wrapped around the outer periphery. The coiled tantalum winding (9) is connected to an external AC power source I,
The heating temperature was controlled by Slidec I. a4 is the cylindrical heating I! #(8) shows a crucible housed in crucible I, and a lubricant aS of a desired type of higher fatty acid or its metal salt is placed in the crucible I.The wire is a thermocouple for measuring the heating temperature of the raw cod. shows. As a result, while measuring the temperature, the slider 0 was operated to adjust the heating temperature appropriately*a? 1 indicates a heater consisting of an infrared temperature heater and a reflector for heating the magnetic film 11 surface of the magnetic tape a, which is provided below the ion bombardment electric fi64); connected to the hoof.

a場はその回路内に介在のスライダックを示す。The a field indicates an intervening slideak in the circuit.

(社)は、磁性膜又は蒸着裏面の温度を測定するための
熱電対を示す、@Bυは、その中間に蒸着用空間を適宜
間隔で残し左右に配設された1対の遮蔽板を示す0 次に本発明方法を上記装置により実施する例を説明する
(Company) indicates a thermocouple for measuring the temperature of the magnetic film or the back side of the evaporation layer. @Bυ indicates a pair of shielding plates placed on the left and right, leaving a space for evaporation at an appropriate interval in the middle. 0 Next, an example of implementing the method of the present invention using the above-mentioned apparatus will be described.

真空排気により真空容器(1)内を例えばlXl0’ト
ール以下とし、ガス供給管(6)よりパルプ(7)を介
し、アルゴンガス等の不活性ガスを真空容器(1)内ニ
導入し、0.1)−ルのガス圧に保持される。1方、該
駆動モーター(3)により1儒のa −ル(2)を1方
向に回転させ1磁気テープ1を1方へ一定速度で送り、
他側の一一ル(2)に巻きとるようにする。この間、イ
オンボンバード用電極(4)に電源(5)により例えば
−5oovの電圧を印加し、例えばアルゴンガスぽンパ
ードが0.1シールのガス圧で10分分間性する磁気テ
ープaの磁性膜1面がイオンボンバードを受けるような
テープ送り速度とする。かくして、該磁性膜す面に付着
の水分−塵埃等の汚物は、イオンボンバードにより除*
されて一次他側のロール(2)に巻き取られ、浄化され
た磁性l[bをもつ磁気テープaを他側の胃−ル(2)
上に得る。浄化蝙珊は、必要により磁気テープ& f 
a−ル(2) (2)間を少くとも1回往復させて完了
するようにしてもよい。
The inside of the vacuum container (1) is evacuated to below, for example, l .1) maintained at a gas pressure of -1. On the one hand, the drive motor (3) rotates the magnetic tape (2) in one direction to feed one magnetic tape 1 in one direction at a constant speed;
Make sure to wind it around the other side (2). During this time, a voltage of, for example, -5 oov is applied to the ion bombardment electrode (4) by the power source (5), and the magnetic film 1 of the magnetic tape a is heated with, for example, argon gas pumped at a gas pressure of 0.1 seal for 10 minutes. The tape feed speed is such that the surface receives ion bombardment. In this way, dirt such as moisture and dust adhering to the surface of the magnetic film can be removed by ion bombardment*.
The magnetic tape a having the purified magnetic l[b is wound onto the roll (2) on the other side, and the magnetic tape
Get on top. Purify coral with magnetic tape & f if necessary.
The process may be completed by reciprocating between a and rule (2) and (2) at least once.

上記のようにして、磁気テープ−〇全長に亘る浄化処理
が完了したら、イオンボンバード用電極(4)の作動を
止め一次に直ちに、るつぼa4内に用意した高級脂肪酸
又はその金属塩aSを一加熱!111 (11&:より
加熱蒸発させ、1方前記の例えば他側のロール(2)に
響き取られた磁気テープ&tb前記の駆動モーター(8
)の回転を逆にして、前記と逆方向へ緩19I&:例え
ば10 Cal / mimの速度で走行させ1側のり
一層(2)に巻き取るようにするが、この間、通常赤外
線加熱響鰭により該磁性膜1rkJを60℃以上の温度
に加熱し、その加熱された磁性膜す面に高級脂肪酸又は
その金属塩の蒸着を行なうようにすることが好ましい。
When the purification process over the entire length of the magnetic tape is completed as described above, the operation of the ion bombarding electrode (4) is stopped and the higher fatty acid or its metal salt aS prepared in the crucible A4 is immediately heated. ! 111 (11 &: The magnetic tape is heated and evaporated, and the magnetic tape is reverberated by the roll (2) on the other side, for example) &tb the drive motor (8
) is reversed and run slowly in the opposite direction to the above at a speed of, for example, 10 Cal/mm, so that the glue on the first side is rolled up into a single layer (2). During this time, the infrared heated acoustic fin is usually used to Preferably, the magnetic film 1rkJ is heated to a temperature of 60° C. or higher, and the higher fatty acid or its metal salt is vapor-deposited on the surface of the heated magnetic film.

かめて1方のロール(2)内に巻き取る。この蒸着作業
も、必要に応じ、反対方向に磁気テープを走行し少くと
も1@の往復で行なうようにしてもよい。
Clamp and wind into one roll (2). This vapor deposition operation may also be carried out in at least one round trip by running the magnetic tape in the opposite direction, if necessary.

崗、多くの実験による知見によれば、磁性金属粒子のみ
から成る磁性膜の表面を酸化させ鬼その酸化表面に高級
脂肪酸又はその金属塩の蒸着させたものは、一層強一に
磁性膜に密着し耐摩耗性の蒸着膜を得られることが分っ
た。この手段として、上記の実施例に於ける不活性ガス
に代え、酸化性ガス、運常好ましくは、酸素′ガスを導
入し、この酸素ガスでイオンボンバードした場合は、そ
の磁性膜表面の浄化に加え同時にその表面を酸化せしめ
ることが出来、この浄化酸化した磁性膜面に前記潤滑剤
の真空蒸着を同様に行なうときは、下記表に明らかなよ
うに一層耐摩耗性の磁気記録体が得られた・尚、磁性膜
が1磁性金属の酸化物から成る場合は、特に酸化ガスに
よるイオンボンバードを行なわないでも、不活性ガスに
よるイオンボンバード処理で〜良好な強固に密着した前
記真空蒸着膜が得られる。この一層強國な結着は、その
贈化面に高級脂肪酸又はその塩の化学吸着がより強固に
行なわれるからであると考えられる。
According to the findings of many experiments, when the surface of a magnetic film made only of magnetic metal particles is oxidized and higher fatty acids or their metal salts are vapor-deposited on the oxidized surface, they adhere even more strongly to the magnetic film. It was found that a wear-resistant deposited film could be obtained. As a means for this, in place of the inert gas in the above embodiment, an oxidizing gas, usually preferably an oxygen gas, is introduced, and if ion bombardment is performed with this oxygen gas, the surface of the magnetic film can be purified. In addition, the surface can be oxidized at the same time, and when the lubricant is vacuum-deposited on the purified and oxidized magnetic film surface in the same way, a magnetic recording material with even more wear resistance can be obtained as shown in the table below. In addition, when the magnetic film is made of an oxide of a magnetic metal, the vacuum-deposited film with good, strong adhesion can be obtained by ion bombardment using an inert gas, even without performing ion bombardment using an oxidizing gas. It will be done. This stronger binding is thought to be due to stronger chemical adsorption of higher fatty acids or salts thereof on the donor surface.

尚1上記したように、磁性テープt60℃以上に加熱し
た状態で前記材料の真空蒸着を行なうときは、過廟な蒸
着による粘着性の発生が防止できる利点がある。
1. As mentioned above, when the material is vacuum-deposited while the magnetic tape is heated to 60 DEG C. or higher, there is an advantage that tackiness due to excessive deposition can be prevented.

次に1強磁性金属をテープ基材面に斜め蒸着によりその
磁性膜を形成した磁気テープを製造後大気中に1s分放
置したもの(試料ム1〜A7)及び30日放置して該金
属磁性膜の表面にその酸化層を形成したもの(試料A8
〜At O)につきイオンボンバード処理効果を明らか
(するため、下記表1に示す如き各員なる製法で夫々の
磁気テープを得、これにつき耐摩耗性等を測定し、夫々
次の如き結果な得た・ 上記表から明らかなように、イオンボンバード処理しな
いで蒸着処理した試料g2.!、8に比し、イオンボン
バード処理した後蒸着処理した本性試料A!、4,4,
7.?、10のスチル再生寿命は着しく延長したものが
得られる。
Next, magnetic tapes on which a magnetic film was formed by diagonally depositing a ferromagnetic metal on the tape substrate surface were left in the atmosphere for 1 second after manufacture (Samples 1 to A7), and left for 30 days to form a magnetic film of the metal. The oxide layer is formed on the surface of the film (sample A8)
In order to clarify the effect of ion bombardment on ~AtO), magnetic tapes were obtained using different manufacturing methods as shown in Table 1 below, and their abrasion resistance, etc. were measured, and the results were as follows. As is clear from the table above, compared to sample g2.!, 8, which was vapor-deposited without ion bombardment, the original sample A!, 4, 4, which was vapor-deposited after ion bombardment.
7. ? , 10, the still playback life is significantly extended.

特に1金属磁性膜は、0−ガスによるイオンボンバード
により、非酸化性のムrガスによるイオンボンバードに
比しそのスチル再生寿命に着しい効果が得られることが
分る。(試料A4及び7参照)。又試料ム!及び10を
対比し明らかなように、磁性膜が予め金属酸化表面であ
る場合は、イオンボンバードのガスは酸化性ガスに無関
係に1試料ム4及び7と岡啼の大きし1スチル再生寿命
が得られることが分る。
In particular, it can be seen that ion bombardment of a single metal magnetic film with 0-gas has a better effect on the still playback life than ion bombardment with non-oxidizing MR gas. (See samples A4 and 7). Another sample! As is clear from comparing and 10, when the magnetic film has a metal oxidized surface, the ion bombardment gas has a 1-sample still playback life of 4 and 7, regardless of the oxidizing gas. I know what I can get.

このように電率発明によれば1基材面に形成した磁性膜
面を1これに高級脂肪酸又はその金属塩な真空蒸着せし
める前に、イオンボンバード処理するときは、イオンボ
ンバード処理しない場合に比し、著しく強固に蒸着し得
られ、耐摩耗性の着しく向上した磁気記録体を製造し得
られる効果を有する。
In this way, according to the electric power invention, when the magnetic film surface formed on the substrate surface is subjected to ion bombardment treatment before vacuum evaporation of higher fatty acids or its metal salts thereon, the magnetic film surface formed on the surface of the base material is treated with ion bombardment, compared to the case where ion bombardment treatment is not performed. However, it has the effect of producing a magnetic recording body that can be deposited extremely firmly and has significantly improved wear resistance.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明方法を実施する装置の1例の截断側面M図
を示す。 ム・・・真空蒸発装置 =−磁気テープ 1・・・磁性
1[(1)・・・真空容−(2)−・・胃−ル (3)
−・・駆動モーター (4)・・・イオンボンバード用
電極 (5;・・・電源(6)・・・ガス供給管 (7
)・・・パルプ (8)・・・蒸発用加熱11  (1
4)・・・るつぼ 0・・・高級脂肪酸又はその金属塩 外2名 間1
The drawing shows a cut-away side view M of an example of an apparatus for carrying out the method of the invention. M...Vacuum evaporator =-Magnetic tape 1...Magnetic 1 [(1)...Vacuum volume-(2)-...Gastric tape (3)
-... Drive motor (4)... Ion bombardment electrode (5;... Power supply (6)... Gas supply pipe (7)
)...Pulp (8)...Heating for evaporation 11 (1
4)...Crucible 0...Higher fatty acid or its metal salt 2 people 1

Claims (1)

【特許請求の範囲】 16  磁気記録体基材面&:影成した磁性膜面に高級
脂肪酸又はその金属塩を真空蒸着するに先立ち1該磁性
膜面にイオンボンバード#&環を行なうことな特徴とす
る耐摩耗性磁気記録体の一過性。 z Ia気記録体基材面に形成した磁性膜面に高級脂肪
酸又はその金属塩を真空蒸着するに先立ちS該磁性膜面
に酸素噂の酸化性ガスを含む雰囲気下でボンバード処理
を行なうことを特徴とする耐摩耗性磁気記録体の製造法
[Scope of Claims] 16 Magnetic recording body substrate surface &: Prior to vacuum-depositing higher fatty acids or metal salts thereof on the shadowed magnetic film surface, 1) Ion bombardment #& ring is performed on the magnetic film surface. and the ephemerality of wear-resistant magnetic recording media. Before vacuum-depositing higher fatty acids or their metal salts on the magnetic film surface formed on the recording medium substrate surface, S the magnetic film surface should be subjected to bombardment treatment in an atmosphere containing an oxidizing gas rumored to be oxygen. A manufacturing method for a distinctive wear-resistant magnetic recording medium.
JP56207997A 1981-12-24 1981-12-24 Manufacture of abrasion resistant magnetic recording material Granted JPS58111128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56207997A JPS58111128A (en) 1981-12-24 1981-12-24 Manufacture of abrasion resistant magnetic recording material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56207997A JPS58111128A (en) 1981-12-24 1981-12-24 Manufacture of abrasion resistant magnetic recording material

Publications (2)

Publication Number Publication Date
JPS58111128A true JPS58111128A (en) 1983-07-02
JPH0353693B2 JPH0353693B2 (en) 1991-08-15

Family

ID=16548961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56207997A Granted JPS58111128A (en) 1981-12-24 1981-12-24 Manufacture of abrasion resistant magnetic recording material

Country Status (1)

Country Link
JP (1) JPS58111128A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182013A (en) * 1984-02-28 1985-09-17 Hitachi Condenser Co Ltd Magnetic recording medium

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113303A (en) * 1978-02-24 1979-09-04 Ulvac Corp Magnetic record having metal thin film
JPS54154306A (en) * 1978-05-26 1979-12-05 Ulvac Corp Wear resistant magnetic record and method of fabricating same
JPS567238A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
JPS567232A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
JPS57186231A (en) * 1981-05-13 1982-11-16 Matsushita Electric Ind Co Ltd Manufacture for magnetic recording medium

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54113303A (en) * 1978-02-24 1979-09-04 Ulvac Corp Magnetic record having metal thin film
JPS54154306A (en) * 1978-05-26 1979-12-05 Ulvac Corp Wear resistant magnetic record and method of fabricating same
JPS567238A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
JPS567232A (en) * 1979-07-02 1981-01-24 Fuji Photo Film Co Ltd Production of magnetic recording medium
JPS57186231A (en) * 1981-05-13 1982-11-16 Matsushita Electric Ind Co Ltd Manufacture for magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182013A (en) * 1984-02-28 1985-09-17 Hitachi Condenser Co Ltd Magnetic recording medium

Also Published As

Publication number Publication date
JPH0353693B2 (en) 1991-08-15

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