JPS60211640A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS60211640A
JPS60211640A JP6755684A JP6755684A JPS60211640A JP S60211640 A JPS60211640 A JP S60211640A JP 6755684 A JP6755684 A JP 6755684A JP 6755684 A JP6755684 A JP 6755684A JP S60211640 A JPS60211640 A JP S60211640A
Authority
JP
Japan
Prior art keywords
recording medium
magnetic recording
magnetic
thin film
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6755684A
Other languages
Japanese (ja)
Inventor
Makoto Mizukami
誠 水上
Masanobu Shigeta
正信 茂田
Toshikazu Nishihara
西原 敏和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Nippon Victor KK
Original Assignee
Victor Company of Japan Ltd
Nippon Victor KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd, Nippon Victor KK filed Critical Victor Company of Japan Ltd
Priority to JP6755684A priority Critical patent/JPS60211640A/en
Publication of JPS60211640A publication Critical patent/JPS60211640A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain a magnetic recording medium which is excellent in still endurance and corrosion resistance through simple treatment, by forming a magnetic layer on a nonmagnetic substrate by a vapor deposition method, and then, performing heat treatment together with or after ion bombarding treatment. CONSTITUTION:Ion bombarding treatment is performed on a magnetic tape A formed by a vapor deposition method while the magnetic tape A is wound by a winding roll 4 through a feeding roll 2 and rotary heating roll 3 in a chamber 1 under a condition where oxygen gas is introduced (at pressure of 0.1-1Torr) into the chamber 1 through a pipe 6 after the air is removed from the chamber 1, by applying a voltage of about 500V across bombarding electrodes 5. At the same time, heat treatment is performed at 60-120 deg.C by means of the heating roll 3. Therefore, a magnetic recording medium which is excellent in the still endurance and corrosion resistance can be obtained.

Description

【発明の詳細な説明】 し産業上の利用分野〕 本発明は磁気記録媒体製造法、特に金属薄膜型の磁気記
録媒体製造法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a magnetic recording medium, particularly a method for manufacturing a metal thin film type magnetic recording medium.

〔従来技術とその問題点〕[Prior art and its problems]

近年、高密度記録の為に、磁性材料をポリエステルフィ
ルム上に蒸着させて強磁性薄膜層を構成した金属薄膜型
磁気記録媒体、例えばいわゆる蒸着テープなるものがあ
る。
In recent years, for high-density recording, metal thin film magnetic recording media, such as so-called vapor-deposited tapes, have been developed in which a magnetic material is deposited on a polyester film to form a ferromagnetic thin film layer.

しかし、蒸着テープとbつだ従来の金属薄膜型磁気記録
媒体は、高速回転ヘッドとの接触作用によって蒸着磁性
薄膜層が悪影響を受け、すなわち磁性薄膜層の損傷が引
き起こされる。
However, in the conventional metal thin film type magnetic recording medium, which is different from the vapor-deposited tape, the vapor-deposited magnetic thin film layer is adversely affected by the contact action with the high-speed rotating head, that is, the magnetic thin film layer is damaged.

そこで、このような欠点をなくす為に、蒸着磁性薄膜層
上に各種の保護膜を設けることが研究されているが、蒸
着磁性薄膜層との密着性が充分でなく、又スペーシング
ロスの問題もあり、従来の保護膜では充分な効果が発揮
されていない。
Therefore, in order to eliminate these drawbacks, research has been conducted to provide various protective films on the vapor-deposited magnetic thin film layer, but the adhesion to the vapor-deposited magnetic thin film layer is not sufficient and there is also the problem of spacing loss. Therefore, conventional protective films are not sufficiently effective.

〔発明の開示〕[Disclosure of the invention]

本発明者は、例えば真空蒸着等のペーパーデポジション
法によって非磁性基体上に強磁性薄膜層を設けたタイプ
の磁気記録媒体、いわゆる金属薄膜型磁気記録媒体を、
例えば酸素あるいはオゾン等の活性気体雰囲気中でイオ
ンボンバード処理し、このイオンボンバード処理と同時
又はイオンボッバード処理後に熱処理を行なうことによ
って、非磁性基体上の強磁性薄膜層表面に効果的な保護
膜、例えば酸化被膜が形成され、このような表面処理の
行なわれた金属薄膜型磁気記録媒体は、例えば耐メチル
性あるいは耐蝕性に優れていることを見い出した。
The present inventor has developed a type of magnetic recording medium in which a ferromagnetic thin film layer is provided on a non-magnetic substrate by a paper deposition method such as vacuum evaporation, a so-called metal thin film magnetic recording medium.
For example, by performing ion bombardment treatment in an active gas atmosphere such as oxygen or ozone, and performing heat treatment at the same time or after the ion bombardment treatment, an effective protective film can be formed on the surface of the ferromagnetic thin film layer on the nonmagnetic substrate. It has been found that a metal thin film magnetic recording medium on which, for example, an oxide film is formed and which has been subjected to such surface treatment, has excellent, for example, methyl resistance or corrosion resistance.

同、イオンボンバード処理は、例えば酸素あるいはオゾ
ンといった酸化性雰囲気下で行なうのが望ましく、例え
ば窒素ガス雰囲気下でイオンボンバード処理した場合に
は、耐蝕性及び耐メチル性の点において問題があり、窒
素ガス雰囲気下でのイオンボンバード処理は奸才しくな
い。
Similarly, ion bombardment is preferably carried out in an oxidizing atmosphere such as oxygen or ozone. For example, when ion bombardment is carried out in a nitrogen gas atmosphere, there are problems in terms of corrosion resistance and methyl resistance. Ion bombardment under a gas atmosphere is not trivial.

〔実施例1〕 第1図は、本発明に係る磁気記録媒体製造法の実施に際
して用いられる表面処理装置の概略説明図である。
[Example 1] FIG. 1 is a schematic explanatory diagram of a surface treatment apparatus used in carrying out the method for manufacturing a magnetic recording medium according to the present invention.

同図中、Δは、例えば12μm厚のポリエステルフィル
ム」二に、例えば真空蒸着法によってCo−Ni磁磁性
合金制別 Co :Ni = 80 :20)を150
0A厚蒸着した金属薄膜型の磁気テープであり、この磁
気テープAはチャンバー1内の供給ロール2から回転熱
ロール3を1経て巻取ロール4に巻き取られるよう配さ
れている。
In the same figure, Δ is, for example, a 12 μm thick polyester film, and a Co-Ni magnetic alloy (Co:Ni = 80:20) is 150
The magnetic tape is a metal thin film type magnetic tape deposited with a thickness of 0A, and this magnetic tape A is arranged so as to be wound from a supply roll 2 in a chamber 1, through a rotating heat roll 3, and onto a take-up roll 4.

5は、回転熱ロール3の近傍所定位置に設けられたボン
バード電極であり、こ゛のボンバード電極5に所定の条
件下で電圧を印加することによって磁気テープの磁性薄
膜層表面がイオンボンバード処理を受けるようになって
いる。
Reference numeral 5 denotes a bombardment electrode provided at a predetermined position near the rotating heat roll 3, and by applying a voltage to the bombardment electrode 5 under predetermined conditions, the surface of the magnetic thin film layer of the magnetic tape undergoes ion bombardment treatment. It looks like this.

すなわち、1ずチャンバー1内を真空に排気した後、活
性ガス例えば酸素ガス導入管6より酸素ガスを導入して
、チャンバー1内ヲ約0.1〜l’l”orr、例えば
約Q、2Torr程度の酸素ガス雰囲気下となし、そし
て供給ロール2から巻取ロール4に所定の径路を経て走
行している磁気テープAに対して、ボンバード電、極5
に約300〜1000 V、例えば約500■の電圧を
印加することによって、イオンボンバード処理を行なう
That is, first, after evacuating the inside of the chamber 1, an active gas such as oxygen gas is introduced from the oxygen gas introduction pipe 6, and the inside of the chamber 1 is heated to about 0.1 to 1" orr, for example about Q, 2 Torr. A bombarded electrode, a pole 5
Ion bombardment is carried out by applying a voltage of about 300 to 1000 V, for example about 500 V, to the substrate.

同、ボンバード電極5の近傍には回転熱ロール3が配置
されていて、磁気テープAは回転熱ロール3を経由して
巻取ロール4に送られるものであるから、イオンボンバ
ード処理時に加熱処理が行なわれるものとなり、すなわ
ち磁気テープAには、例えば40〜120℃、望ましく
は約60〜120℃、例えば90℃に加熱された回転熱
ロール3による熱処理がイオンボンバード処理と同時に
行なわれる。
Similarly, a rotating heat roll 3 is arranged near the bombardment electrode 5, and since the magnetic tape A is sent to the take-up roll 4 via the rotating heat roll 3, heat treatment is not performed during the ion bombardment process. That is, the magnetic tape A is subjected to a heat treatment using a rotating hot roll 3 heated to, for example, 40 to 120 DEG C., preferably about 60 to 120 DEG C., for example, 90 DEG C., at the same time as the ion bombardment treatment.

上記のように磁性層に対する表面処理のなされた金属薄
膜型磁気記録媒体は、従来の金属薄膜型磁気記録媒体に
比べて優れており、すなわち高速回転ヘッドと摺接して
いても、例えば従来の金属薄膜型磁気記録媒体ではスチ
ル時間が3分しかもたないのに対し、本実施例の金属薄
膜型磁気記録媒体ではメチル時間が40分以上ももち、
又、温度40℃、湿度9Q%RI(の環境下において剛
節性テストを行なうと、従来の金属薄膜型磁気記録媒体
では3日で斑点状のサビが生じたのに対し、本実施例の
金属薄膜型磁気記録媒体では2週間経過しても何等の異
液も認められない。
Metal thin film magnetic recording media whose magnetic layer has been surface-treated as described above are superior to conventional metal thin film magnetic recording media. While the still time of a thin film magnetic recording medium is only 3 minutes, the metal thin film magnetic recording medium of this example has a methyl time of over 40 minutes.
Furthermore, when a rigidity test was conducted in an environment with a temperature of 40°C and a humidity of 9Q% RI, spot-like rust appeared in three days with the conventional metal thin film magnetic recording medium, but with this example, rust appeared in three days. In the metal thin film type magnetic recording medium, no foreign liquid was observed even after two weeks had passed.

し実施例2〕 第2図は、本発明に係る磁気記録媒体製造法の実施に除
して用いられる表面処理装置の説明図であり、同図中第
1図と同一番号のものは同一構成を示す。
Embodiment 2] FIG. 2 is an explanatory diagram of a surface treatment apparatus used for carrying out the method for manufacturing a magnetic recording medium according to the present invention, and the same numbers as those in FIG. shows.

尚、第2図中、3′は、回転熱ロール3と同様な回転熱
ロールであり、又、7はガイドロールである。
In FIG. 2, 3' is a rotating heat roll similar to the rotating heat roll 3, and 7 is a guide roll.

そして、磁気テープAの磁性薄膜が前記実施例と同様な
表面処理を受けた後、90℃に加熱された回転熱ロール
3′によって加熱処理を受ける。
After the magnetic thin film of the magnetic tape A is subjected to the same surface treatment as in the above embodiment, it is subjected to a heat treatment by a rotating heat roll 3' heated to 90°C.

上記のように磁性層に対する表向処理のなされた金属薄
膜型磁気記録媒体は、前記実°施例のものよシも一層優
れており、すなわちメチル時間においては60分以上も
あり、又、耐mll性テストにお−いても3週間以上経
過しても何等の異変も認められないものであった。
The metal thin film type magnetic recording medium in which the magnetic layer has been surface-treated as described above is even better than that of the embodiment described above, that is, it has a methyl time of 60 minutes or more, and has a long durability. Even in the MLL test, no abnormality was observed even after 3 weeks or more.

〔効果〕〔effect〕

磁性薄膜層の例えば耐スチル性及び而」触性に優れたも
のが得られる。
A magnetic thin film layer with excellent still resistance and mechanical properties, for example, can be obtained.

製造工程も従来に比べて簡単な処理が追加されるのみで
あり、この追加工程によるコストアンプは機微たるもの
であり、低コストで7J気記録媒体が得られる。
In the manufacturing process, only a simple process is added compared to the conventional one, and the cost increase due to this additional process is minute, and a 7J recording medium can be obtained at a low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は、本発明の実施に際して用いられる
表面処理装置の説明図である。 A・・・磁気テープ、3,3′・・・回転熱ロール、5
・・ボンバード電極。 特許出願人 日本ビクター株式会社 第1図 第2図
FIGS. 1 and 2 are explanatory diagrams of a surface treatment apparatus used in carrying out the present invention. A... Magnetic tape, 3, 3'... Rotating heat roll, 5
...Bombarded electrode. Patent applicant: Victor Japan Co., Ltd. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 非磁性基体上にペーパーデポジション法によって磁性層
を形成した後、イオンボンバード処理及びイオンボンバ
ード処理と同時又は後に熱処理することを特徴とする磁
気記録媒体製造法。
A method for manufacturing a magnetic recording medium, which comprises forming a magnetic layer on a non-magnetic substrate by a paper deposition method, followed by ion bombardment and heat treatment at the same time or after the ion bombardment.
JP6755684A 1984-04-06 1984-04-06 Manufacture of magnetic recording medium Pending JPS60211640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6755684A JPS60211640A (en) 1984-04-06 1984-04-06 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6755684A JPS60211640A (en) 1984-04-06 1984-04-06 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS60211640A true JPS60211640A (en) 1985-10-24

Family

ID=13348352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6755684A Pending JPS60211640A (en) 1984-04-06 1984-04-06 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS60211640A (en)

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