JPS58107516A - Optical switching array - Google Patents

Optical switching array

Info

Publication number
JPS58107516A
JPS58107516A JP20781981A JP20781981A JPS58107516A JP S58107516 A JPS58107516 A JP S58107516A JP 20781981 A JP20781981 A JP 20781981A JP 20781981 A JP20781981 A JP 20781981A JP S58107516 A JPS58107516 A JP S58107516A
Authority
JP
Japan
Prior art keywords
optical
optical switching
electrode
thin film
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20781981A
Other languages
Japanese (ja)
Inventor
Hideo Segawa
瀬川 秀夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP20781981A priority Critical patent/JPS58107516A/en
Publication of JPS58107516A publication Critical patent/JPS58107516A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/055Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect the active material being a ceramic
    • G02F1/0551Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To reduce the capacity between adjacent electrodes, by forming a thin film layer of a low dielectric constant between a dielectric and a signal electrode which forms an optical switching array of a dielectric having an electro-optical effect and set between the polarizers which are orthgonal to each other. CONSTITUTION:A thin film 6 of a low dielectric constant is formed between a PLZT substrate 3 and a signal electrode 4a which is opposite to a common electrode 4b of the plate 3 which is provided between the polarizers which orthogonal to each other. In this case, the tip part of the electrode 4a is deleted. As a result, the electrostatic capacity is reduced between adjacent electrodes.

Description

【発明の詳細な説明】 本発明は透jt注セラミックを用いた電気光学シャッタ
、特に光スイッチングアレイにおいて、アレイの方向に
並行あるいは垂直な偏光面を持ち、スイッチング速度や
コントラストの低下の生じない光スイツチングアレイに
関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention is an electro-optic shutter using a transparent JT ceramic, especially an optical switching array, which has a plane of polarization parallel or perpendicular to the direction of the array and which does not cause a decrease in switching speed or contrast. Regarding switching arrays.

直交する偏光子間に、2′eL電気光学効果、いわゆる
Kerr  効果を示す強誘電体を配置し、電圧り印加
によって光υオン。オフを制御する光スイツチングアレ
イは周知である。
A ferroelectric material exhibiting a 2'eL electro-optic effect, the so-called Kerr effect, is placed between orthogonal polarizers, and light υ is turned on by applying a voltage. Optical switching arrays that control off are well known.

このような目的に用いられる強誘電体g)1ガとしてP
LZTセラミックスをあげることが出来る0その組成は
(Pbt −x、 Lax l  (Zr1−y、 T
iy)0功化学式で示され、x、ykによ1)1次1.
2次の電気光学効果および光学的メモリ作用を持つので
、光シャッタ、ディスプレイ等電気光学公費へf)応用
が研究されている。
Ferroelectric material used for such purposes g) P as 1ga
The composition of LZT ceramics is (Pbt -x, Lax l (Zr1-y, T
iy) It is shown by a zero-governing chemical formula, and depending on x and yk, it is 1) 1st order 1.
Since it has a second-order electro-optic effect and an optical memory function, its application to electro-optical public applications such as optical shutters and displays is being studied.

その中で、!=0.086〜0.1 3’=035のも
のは、常温では常鰐電注を示すが直流電圧を印加すると
強誘罵相が誘起され、K@rr  効果を示すようKな
る。しかも記憶礪能がないので光シャッタへの応用VC
1mシており、スリムルーズ2次電気材料と呼ばれてい
る。
among them,! = 0.086 to 0.1 3' = 035 shows normal crocodile injection at room temperature, but when DC voltage is applied, forced cursing is induced and K becomes so as to show the K@rr effect. Moreover, since it has no memory capacity, it can be applied to optical shutters.
It has a thickness of 1 m and is called a slim loose secondary electrical material.

このPLZTを用いた光シャッタの基本的な構造は、1
11図に示すように、互に直交する偏光子1.2間にP
LZT板3を配置し、板面と平行に電圧を印加するよう
な11甑4を設ける・そ1て電圧印加方向がPLZT板
に入射する光の偏光面と45になるように配置する。
The basic structure of an optical shutter using this PLZT is 1
As shown in Figure 11, P
An LZT plate 3 is arranged, and a 11-hole 4 is provided to apply a voltage parallel to the plate surface.Then, the plate is arranged so that the direction of voltage application is 45 with the polarization plane of the light incident on the PLZT plate.

電圧を印加しなければ光は偏光子2で1尤される0電[
i!4.4゛関に電圧を印加すれば、PLZT板31)
常光に対する屈折率n□  と異常光に対する屈折率n
e  とに Δn=n、)−n@ = −n3RE2ま ただし n:PLZT2)屈折率 R:定数E:印加電
界の差を生じ、光学的位相差々 p =−、Δn、d λ ただし d : PLZTaθ有効厚 を生じ出射光は一般に楕円偏光となるにの九め偏光子2
を通過する光量は 1 = Ii 5in2− タタシ、11:PLzTlli、ヘノ入射光量となる。
If no voltage is applied, the light will be 0 electric [
i! 4. If voltage is applied to the 4゛ gate, the PLZT plate 31)
Refractive index n□ for ordinary light and refractive index n for extraordinary light
e and Δn=n,)-n@=-n3RE2 but n: PLZT2) refractive index R: constant E: causes a difference in applied electric field, optical phase difference p = -, Δn, d λ where d: The ninth polarizer 2 produces an effective thickness of PLZTaθ and the output light generally becomes elliptically polarized light.
The amount of light passing through is 1 = Ii 5in2-Tatashi, 11:PLzTlli, the amount of light incident on the hexagon.

P=冗 となるような電圧Vλ/2を印加すれば偏光子
2の通過元エルは最大となる。
By applying a voltage Vλ/2 such that P=redundant, the passage source L of the polarizer 2 becomes maximum.

このよりなKe r r 効果素子を用いて電子写真式
プリンタ用光書き込み装置等のスイッチングプレイを構
成する1例をwXz図に示す。ナなわち、直交する偏光
板1.2つ間に配置されたPLZT板3上にはNi a
 Cr −Au 等の電極4゜4′・・・・・・を交叉
指状に形成するか(a図)又は共通電1fi4bに対し
て信号電極4&t−並夕lJK並べる(b図)ものが知
られている。それぞれの場合、光の透過、!!断が制御
される領域は図の斜線で示される領域5である。
An example of configuring a switching play of an optical writing device for an electrophotographic printer using this type of Ker r r effect element is shown in the wXz diagram. In other words, on the PLZT plate 3 placed between the two orthogonal polarizing plates
It is known that the electrodes 4゜4'... of Cr-Au etc. are formed in an interdigital shape (figure a), or the signal electrodes 4&t are arranged in parallel to the common electrode 1fi4b (figure b). It is being In each case, the transmission of light,! ! The area where cutting is controlled is area 5 indicated by diagonal lines in the figure.

しかし、仁の形式O光スイツチングテレイにおいては、
解像力を向上させるためには信号電極を高密[K形成し
なければならな°いが、こOため電極相互間θ靜vt容
量が増大し、スイッチング速匿が遅くなる。また、a接
信号電極への電界もれが生じ、コントラストが低下する
等の欠点があった〇 本発明は、上記の靜IE容址や電界もれが、隣接する2
つの信号電極間の光スイッチングw4能を有しない部分
の強誘電性によって増大している点を考慮し、信号電極
とPLZT基板の間に量を減少さぜ゛ることによ妙、上
記の欠点を除いたものである、 通常、信号電極は金属薄膜で作られ、その断面は方1伏
をなしているが、能率のため半径rの円形断面を持つ平
行電極が誘□電率Er  の媒体中蒼関1i4dを蓋い
て配置された場合について計算すれば、傘位長尚り゛の
容゛量は で与えられる。従って容−Cは媒体の誘電率εrに比例
する。
However, in Jin's O-light switching television,
In order to improve the resolution, the signal electrodes must be formed in a high density, but this increases the θ capacitance between the electrodes and slows down the switching speed. In addition, electric field leakage to the a-contact signal electrode occurs, resulting in a decrease in contrast. In the present invention, the above-mentioned silent IE shape and electric field leakage occur between adjacent two electrodes.
Considering that the optical switching between the two signal electrodes is increased due to the ferroelectricity of the part that does not have W4 ability, the above disadvantages can be reduced by reducing the amount between the signal electrode and the PLZT substrate. Normally, the signal electrode is made of a metal thin film, and its cross section is flat in both directions. However, for efficiency, parallel electrodes with a circular cross section of radius r are used for a medium with a dielectric constant Er. If calculated for the case where it is placed covering the middle blue gate 1i4d, the capacity of the umbrella length is given by. Therefore, the capacity -C is proportional to the dielectric constant εr of the medium.

ところテLa/Zr/ri = 9/65/35 2)
組成を持りPLZTは室温1υ0謔においてほぼεr=
4600にも及び、従来のよ゛うにPLZT板上に直接
電極を設けるW造ではIEfjjA間容量がかなり大と
な乏口 本発明は、@3図にそ゛の断面を示すように、PLZT
基板3と信゛号電極4aとの間に電極41の先端部を除
き低誘電率薄膜61峻けたものであ−る。膜の材料とし
ては、5i02 (εF= 3.5〜4.0)や通常の
フレキシブルテープ材に用いられているポリイミド樹脂
(εr= 3.4〜3.S)&どを用いることが出来る
。膜の厚さは、PLZTll)厚み方向O電界の拡すし
り7を考慮して数μm〜数10μm が適当である。こ
れらの薄膜は、・第4図に示すようにPLZT板゛の信
号電極部分全体に設け、その上に信号゛電極4&の先端
が突出するように1に極を形成する。
Tokoro Te La/Zr/ri = 9/65/35 2)
With the composition, PLZT has approximately εr= at room temperature 1υ0cm
4600, and the capacitance between IEfjjA is quite large in the conventional W structure in which electrodes are directly placed on the PLZT board.
A low dielectric constant thin film 61 is formed between the substrate 3 and the signal electrode 4a except for the tip of the electrode 41. As the material of the membrane, 5i02 (εF=3.5 to 4.0) and polyimide resin (εr=3.4 to 3.S) used in ordinary flexible tape materials can be used. The appropriate thickness of the film is several μm to several tens of μm, taking into consideration the expansion of the electric field in the thickness direction (PLZTll). These thin films are provided over the entire signal electrode portion of the PLZT plate, as shown in FIG. 4, and a pole is formed at 1 so that the tip of the signal electrode 4& is projected thereon.

このような構造により、信号を甑相互間に形成される静
電容量u、洞えばi′r= 4、d=125 fim 
 2r= 5011m、電+jA’p長さをl U c
m’としてとなり、電界もれによ々り−qλ−トーーり
や電圧パf −−−〜−−−−−− ルろの切れの悪さ等−の悪影醤゛を−防ぐことが出来る
With this structure, the signal can be transmitted through the capacitance u formed between the capacitors, i'r = 4, d = 125 fim.
2r=5011m, electric+jA'p length l U c
m', and it is possible to prevent negative effects such as electric field leakage, qλ torque, and poor voltage pattern f.

【図面の簡単な説明】[Brief explanation of the drawing]

@1図は光スイツチ0原11説明図、第2図は従来の光
スイッチング素子υ電極構造の平面図第3図は本発明υ
光スイッチング素子の断面図tJL3図 算4図
@ Figure 1 is an explanatory diagram of the optical switch 0 source 11, Figure 2 is a plan view of the conventional optical switching element υ electrode structure, and Figure 3 is the inventive υ
Cross-sectional diagram of optical switching element tJL3 diagram 4 diagram

Claims (1)

【特許請求の範囲】[Claims] 互に直交する偏光素子と、それらの間に配置された電気
光学効果を有する透光注銹電体から、なり、上記#電体
く電圧を印加して光の透過、遮断を制御する光スイツチ
ングアレイにおいて、信号電極と霞電体O閣に低置電率
の薄膜層を設けたことを%敵とする光スイツチングアレ
An optical switch consisting of mutually orthogonal polarizing elements and a translucent injected electric body having an electro-optic effect arranged between them, and controlling the transmission and blocking of light by applying a voltage to the above-mentioned electric body. In optical switching arrays, the advantage is that a thin film layer with a low placement rate is provided on the signal electrodes and the haze electric body O.
JP20781981A 1981-12-22 1981-12-22 Optical switching array Pending JPS58107516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20781981A JPS58107516A (en) 1981-12-22 1981-12-22 Optical switching array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20781981A JPS58107516A (en) 1981-12-22 1981-12-22 Optical switching array

Publications (1)

Publication Number Publication Date
JPS58107516A true JPS58107516A (en) 1983-06-27

Family

ID=16546024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20781981A Pending JPS58107516A (en) 1981-12-22 1981-12-22 Optical switching array

Country Status (1)

Country Link
JP (1) JPS58107516A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073521A (en) * 1983-09-28 1985-04-25 Murata Mfg Co Ltd Optical shutter array element
US4793697A (en) * 1986-08-04 1988-12-27 Motorola, Inc. PLZT shutter with minimized space charge degradation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6073521A (en) * 1983-09-28 1985-04-25 Murata Mfg Co Ltd Optical shutter array element
JPH0458007B2 (en) * 1983-09-28 1992-09-16 Murata Manufacturing Co
US4793697A (en) * 1986-08-04 1988-12-27 Motorola, Inc. PLZT shutter with minimized space charge degradation

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