JPS58106504A - 屈折率分布型透明部材の製造方法 - Google Patents
屈折率分布型透明部材の製造方法Info
- Publication number
- JPS58106504A JPS58106504A JP56205941A JP20594181A JPS58106504A JP S58106504 A JPS58106504 A JP S58106504A JP 56205941 A JP56205941 A JP 56205941A JP 20594181 A JP20594181 A JP 20594181A JP S58106504 A JPS58106504 A JP S58106504A
- Authority
- JP
- Japan
- Prior art keywords
- film
- refractive index
- transparent member
- index distribution
- mask layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 230000000903 blocking effect Effects 0.000 claims description 8
- 238000005342 ion exchange Methods 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 abstract description 37
- 239000000758 substrate Substances 0.000 abstract description 29
- 239000011521 glass Substances 0.000 abstract description 28
- 150000003839 salts Chemical class 0.000 abstract description 18
- 230000005684 electric field Effects 0.000 abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052681 coesite Inorganic materials 0.000 abstract description 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 4
- 239000000377 silicon dioxide Substances 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 229910052682 stishovite Inorganic materials 0.000 abstract description 4
- 229910052905 tridymite Inorganic materials 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract 2
- 239000002019 doping agent Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000010936 titanium Substances 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 239000000835 fiber Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 2
- 229910052939 potassium sulfate Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- -1 nitrates or sulfates Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 239000011686 zinc sulphate Substances 0.000 description 1
- 235000009529 zinc sulphate Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0087—Simple or compound lenses with index gradient
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56205941A JPS58106504A (ja) | 1981-12-18 | 1981-12-18 | 屈折率分布型透明部材の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56205941A JPS58106504A (ja) | 1981-12-18 | 1981-12-18 | 屈折率分布型透明部材の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58106504A true JPS58106504A (ja) | 1983-06-24 |
| JPH0216484B2 JPH0216484B2 (enrdf_load_stackoverflow) | 1990-04-17 |
Family
ID=16515250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56205941A Granted JPS58106504A (ja) | 1981-12-18 | 1981-12-18 | 屈折率分布型透明部材の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58106504A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61261238A (ja) * | 1985-05-13 | 1986-11-19 | Hoya Corp | 軸方向に屈折率分布を有するレンズの製造法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4882841A (enrdf_load_stackoverflow) * | 1972-02-02 | 1973-11-06 |
-
1981
- 1981-12-18 JP JP56205941A patent/JPS58106504A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4882841A (enrdf_load_stackoverflow) * | 1972-02-02 | 1973-11-06 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61261238A (ja) * | 1985-05-13 | 1986-11-19 | Hoya Corp | 軸方向に屈折率分布を有するレンズの製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0216484B2 (enrdf_load_stackoverflow) | 1990-04-17 |
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