JPS58105478U - プラズマ気相成長用サセプタ電極 - Google Patents

プラズマ気相成長用サセプタ電極

Info

Publication number
JPS58105478U
JPS58105478U JP180682U JP180682U JPS58105478U JP S58105478 U JPS58105478 U JP S58105478U JP 180682 U JP180682 U JP 180682U JP 180682 U JP180682 U JP 180682U JP S58105478 U JPS58105478 U JP S58105478U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
susceptor electrode
plasma vapor
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP180682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140770Y2 (enrdf_load_stackoverflow
Inventor
遠藤　好英
堀田　雄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP180682U priority Critical patent/JPS58105478U/ja
Publication of JPS58105478U publication Critical patent/JPS58105478U/ja
Application granted granted Critical
Publication of JPS6140770Y2 publication Critical patent/JPS6140770Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP180682U 1982-01-12 1982-01-12 プラズマ気相成長用サセプタ電極 Granted JPS58105478U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP180682U JPS58105478U (ja) 1982-01-12 1982-01-12 プラズマ気相成長用サセプタ電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP180682U JPS58105478U (ja) 1982-01-12 1982-01-12 プラズマ気相成長用サセプタ電極

Publications (2)

Publication Number Publication Date
JPS58105478U true JPS58105478U (ja) 1983-07-18
JPS6140770Y2 JPS6140770Y2 (enrdf_load_stackoverflow) 1986-11-20

Family

ID=30014810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP180682U Granted JPS58105478U (ja) 1982-01-12 1982-01-12 プラズマ気相成長用サセプタ電極

Country Status (1)

Country Link
JP (1) JPS58105478U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008231513A (ja) * 2007-03-20 2008-10-02 Kochi Prefecture Sangyo Shinko Center プラズマｃｖｄ装置
US8307782B2 (en) 2007-12-26 2012-11-13 Kochi Industrial Promotion Center Deposition apparatus and deposition method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008231513A (ja) * 2007-03-20 2008-10-02 Kochi Prefecture Sangyo Shinko Center プラズマｃｖｄ装置
US8307782B2 (en) 2007-12-26 2012-11-13 Kochi Industrial Promotion Center Deposition apparatus and deposition method

Also Published As

Publication number Publication date
JPS6140770Y2 (enrdf_load_stackoverflow) 1986-11-20

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