JPS58101113U - Measuring point detection device in fluorescent X-ray film thickness meter - Google Patents
Measuring point detection device in fluorescent X-ray film thickness meterInfo
- Publication number
- JPS58101113U JPS58101113U JP19877281U JP19877281U JPS58101113U JP S58101113 U JPS58101113 U JP S58101113U JP 19877281 U JP19877281 U JP 19877281U JP 19877281 U JP19877281 U JP 19877281U JP S58101113 U JPS58101113 U JP S58101113U
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent
- plate
- detection
- film thickness
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面はこの考案による測定点検出装置を示すもので、第
１図は全体を示す構成図、第２図は第１図の要部を示す
拡大側面図、第３図は全体を示す構成図である。
１・・・Ｘ線Ｍ、２−・・シャッタ、３・・・コリメ′
−タ、４・・・ＸＹ試料台、６・・・ミラー、７・・・
顕微鏡、８・・・検出孔、９・・・治具体、１０・・・
螢光板、１１・・・光電 ゛変換素子板、１２、・・
・検出表示体である。The drawings show the measuring point detection device according to this invention. Fig. 1 is an overall configuration diagram, Fig. 2 is an enlarged side view showing the main parts of Fig. 1, and Fig. 3 is an overall configuration diagram. be. 1...X-ray M, 2-...Shutter, 3...Collimation'
- data, 4...XY sample stage, 6...mirror, 7...
Microscope, 8...detection hole, 9...jigging body, 10...
Fluorescent plate, 11... Photoelectric conversion element plate, 12,...
・It is a detection display body.
Claims (1)
形をなす治具体と、このＸＹ試料テーブル上において治
具体内に設けられ螢光板と光電変換素子板との二層状か
らなる検出板と、前記治具体の上板部に形成された検出
孔と、前記光電変換素子板に接続された検出表示体とを
備え、前記検出孔を径で入射されたＸ線が螢光先板に照
射されると光電変換素子板９電気変化量を検出表示体に
表示するようにした構成よりなることを特徴とする螢光
Ｘ線膜厚計に於ける測定点検出装置。A box-shaped fixture provided on an XY sample table movable in the XY directions; and a detection plate provided in the fixture on the XY sample table and consisting of a two-layered structure consisting of a fluorescent plate and a photoelectric conversion element plate. and a detection hole formed in the upper plate part of the jig, and a detection display body connected to the photoelectric conversion element plate, and X-rays incident on the detection hole with a diameter enter the fluorescent tip plate. 1. A measurement point detection device for a fluorescent X-ray film thickness meter, characterized in that the amount of electrical change in a photoelectric conversion element plate 9 is displayed on a detection display when irradiated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19877281U JPS58101113U (en) | 1981-12-28 | 1981-12-28 | Measuring point detection device in fluorescent X-ray film thickness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19877281U JPS58101113U (en) | 1981-12-28 | 1981-12-28 | Measuring point detection device in fluorescent X-ray film thickness meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58101113U true JPS58101113U (en) | 1983-07-09 |
Family
ID=30111939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19877281U Pending JPS58101113U (en) | 1981-12-28 | 1981-12-28 | Measuring point detection device in fluorescent X-ray film thickness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58101113U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014076974A1 (en) * | 2012-11-16 | 2014-05-22 | パルステック工業株式会社 | Diffraction ring forming device and diffraction ring forming system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941577A (en) * | 1972-08-29 | 1974-04-18 |
-
1981
- 1981-12-28 JP JP19877281U patent/JPS58101113U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941577A (en) * | 1972-08-29 | 1974-04-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014076974A1 (en) * | 2012-11-16 | 2014-05-22 | パルステック工業株式会社 | Diffraction ring forming device and diffraction ring forming system |
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