JPH0234067U - - Google Patents
Info
- Publication number
- JPH0234067U JPH0234067U JP11220088U JP11220088U JPH0234067U JP H0234067 U JPH0234067 U JP H0234067U JP 11220088 U JP11220088 U JP 11220088U JP 11220088 U JP11220088 U JP 11220088U JP H0234067 U JPH0234067 U JP H0234067U
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent screen
- dose detection
- detection function
- electron
- electron dose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000005375 photometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の実施例を示す断面図、第２図は
本案実施例の平面図、第３図は従来装置の実施例
を示す図、第４図は低倍時の観察像を示す図、第
５図は特殊試料形状の観察像を示す図である。
１……電子線、２……蛍光板、３……フイルム
、４……観察窓、５……露出計、６……部分測光
装置、７……メツシユの像、８……電子線量測定
用蛍光板、９……電子線量測定用蛍光板、１１…
…ベース、１２……固定ネジ、１３……回転軸、
１４……絶縁体、１５……絶縁体、１６……接続
端子、１７……切換スイツチ、１８……切換スイ
ツチ、１９……空洞、２０……試料。
Figure 1 is a sectional view showing an embodiment of the present invention, Figure 2 is a plan view of an embodiment of the present invention, Figure 3 is a diagram showing an example of a conventional device, and Figure 4 is a diagram showing an observation image at low magnification. , FIG. 5 is a diagram showing an observed image of the special sample shape. 1... Electron beam, 2... Fluorescent screen, 3... Film, 4... Observation window, 5... Exposure meter, 6... Partial photometer, 7... Mesh image, 8... Fluorescent screen for electron dose measurement , 9... Fluorescent screen for electron dose measurement, 11...
... Base, 12 ... Fixing screw, 13 ... Rotating shaft,
14... Insulator, 15... Insulator, 16... Connection terminal, 17... Changeover switch, 18... Changeover switch, 19... Cavity, 20... Sample.
Claims (1)
光板に於いて、部分測光と全体測光を可能にする
ため、蛍光板を分割させ各々に電子線量検出機能
を設けたことを特徴とする電子顕微鏡等の像観察
装置。 An image of an electron microscope, etc., characterized in that the fluorescent screen has a focusing function and an electron dose detection function, and the fluorescent screen is divided and each is provided with an electron dose detection function in order to enable partial and total photometry. Observation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11220088U JPH0234067U (en) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11220088U JPH0234067U (en) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0234067U true JPH0234067U (en) | 1990-03-05 |
Family
ID=31350924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11220088U Pending JPH0234067U (en) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0234067U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083071A (en) * | 2007-12-25 | 2008-04-10 | Hitachi Ltd | Sample preparation apparatus |
-
1988
- 1988-08-29 JP JP11220088U patent/JPH0234067U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083071A (en) * | 2007-12-25 | 2008-04-10 | Hitachi Ltd | Sample preparation apparatus |
| JP4572934B2 (en) * | 2007-12-25 | 2010-11-04 | 株式会社日立製作所 | Sample preparation equipment |
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