JPS5897506U - Fluorescent X-ray film thickness meter - Google Patents
Fluorescent X-ray film thickness meterInfo
- Publication number
- JPS5897506U JPS5897506U JP19802881U JP19802881U JPS5897506U JP S5897506 U JPS5897506 U JP S5897506U JP 19802881 U JP19802881 U JP 19802881U JP 19802881 U JP19802881 U JP 19802881U JP S5897506 U JPS5897506 U JP S5897506U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- thickness meter
- fluorescent
- collimator
- ray film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面はこの考案による螢光Ｘ線膜厚計を示すもので、第
１図は全体構成図、第２図は要部の拡大図である。
１１・・・・・・Ｘ線源、１０・・・・・・油タンク、
１２・・・・・・保持部材、１３・・・・・・コリメー
タ、１４・・・・・・ＸＹテーブル、１６・・・・・・
案内孔、１７・・・・・・ストッパ部材、＝２０・・・
・・・顕微鏡、２１・・・・・・光軸、２２・・・・・
・Ｘ線軸である。The drawings show a fluorescent X-ray film thickness meter according to this invention, with FIG. 1 showing the overall configuration and FIG. 2 showing an enlarged view of the main parts. 11...X-ray source, 10...oil tank,
12... Holding member, 13... Collimator, 14... XY table, 16...
Guide hole, 17...Stopper member, =20...
...Microscope, 21...Optical axis, 22...
・It is the X-ray axis.
Claims (1)
いて、Ｘ線源のＸ線を制御するためのシャッタおよびコ
リメータと、このフリメータの側、、 部位置に
設けられた顕微鏡と、コリメータと一体的にコリメータ
の側部位置に設けられ長さを調節自在に構成されたスト
ッパ部材と、試料を載置し左右上下に移動可能なＸＹテ
ーブルとを備え、試料上においてＸ線軸と顕微鏡の光軸
とが交叉する：、 脚、ｘ；ｉ’ｒ＝；ｔＺ”、”ン；
＝署＝：二膜厚計。In the case where the line axis of the X-ray source and the optical axis of the microscope are not the same, a shutter and a collimator for controlling the X-rays of the X-ray source, a microscope provided at a position on the side of the frimeter, and a collimator are provided. It is equipped with a stopper member that is integrally provided on the side of the collimator and whose length can be adjusted freely, and an XY table on which the sample is placed and can be moved horizontally, vertically, and vertically. The axis intersects:, leg, x; i'r=;tZ","n;
= Station =: Double film thickness meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19802881U JPS5897506U (en) | 1981-12-24 | 1981-12-24 | Fluorescent X-ray film thickness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19802881U JPS5897506U (en) | 1981-12-24 | 1981-12-24 | Fluorescent X-ray film thickness meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5897506U true JPS5897506U (en) | 1983-07-02 |
Family
ID=30111228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19802881U Pending JPS5897506U (en) | 1981-12-24 | 1981-12-24 | Fluorescent X-ray film thickness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5897506U (en) |
-
1981
- 1981-12-24 JP JP19802881U patent/JPS5897506U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5897506U (en) | Fluorescent X-ray film thickness meter | |
| JPS58101112U (en) | Fluorescent X-ray film thickness meter | |
| JPS5871157U (en) | Fluorescent X-ray device | |
| JPS6098015U (en) | Measurement point display device in X-ray film thickness meter | |
| JPS5897507U (en) | Fixture details for fluorescent X-ray film thickness meter | |
| JPS5866347U (en) | Fluorescent X-ray device | |
| JPS5897504U (en) | Collimator for fluorescent X-ray film thickness meter | |
| JPS58101113U (en) | Measuring point detection device in fluorescent X-ray film thickness meter | |
| JPS5917845U (en) | Standard sample for fluorescent X-rays | |
| JPS6065967U (en) | scanning electron microscope | |
| JPS58116608U (en) | X-ray film thickness measuring device | |
| JPS5864063U (en) | Sample device in electronic analyzer | |
| JPS60161004U (en) | Semiconductor device tube relocation jig | |
| JPS616825U (en) | Photography device with transparency stand | |
| JPS5935896U (en) | Pointer illumination device | |
| JPS6071583U (en) | scale holder | |
| JPS5980525U (en) | Leg guide device for elevating work platform | |
| JPS58177945U (en) | Tube case for electronic parts | |
| JPS58107819U (en) | Resin leakage prevention device at the tip of T-die rod | |
| JPS60176105U (en) | Rail straightness measuring device | |
| JPS5858229U (en) | Nozzle fixing device | |
| JPS59156608U (en) | X-ray guide tube | |
| JPS5977052U (en) | Sample holder for fluorescent X-ray analysis | |
| JPS58126447U (en) | Negative mask mounting device in printer | |
| JPS612614U (en) | Endoscope |