JPS5797941A - Rotary output generator - Google Patents

Rotary output generator

Info

Publication number
JPS5797941A
JPS5797941A JP55175052A JP17505280A JPS5797941A JP S5797941 A JPS5797941 A JP S5797941A JP 55175052 A JP55175052 A JP 55175052A JP 17505280 A JP17505280 A JP 17505280A JP S5797941 A JPS5797941 A JP S5797941A
Authority
JP
Japan
Prior art keywords
revolutions
motor
revolution
shafts
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55175052A
Other languages
English (en)
Inventor
Kuniharu Onozuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP55175052A priority Critical patent/JPS5797941A/ja
Publication of JPS5797941A publication Critical patent/JPS5797941A/ja
Pending legal-status Critical Current

Links

JP55175052A 1980-12-11 1980-12-11 Rotary output generator Pending JPS5797941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55175052A JPS5797941A (en) 1980-12-11 1980-12-11 Rotary output generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55175052A JPS5797941A (en) 1980-12-11 1980-12-11 Rotary output generator

Publications (1)

Publication Number Publication Date
JPS5797941A true JPS5797941A (en) 1982-06-17

Family

ID=15989384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55175052A Pending JPS5797941A (en) 1980-12-11 1980-12-11 Rotary output generator

Country Status (1)

Country Link
JP (1) JPS5797941A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972165B2 (en) 2001-06-05 2005-12-06 Sony Corporation Electron beam exposure mask and electron beam exposure method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972165B2 (en) 2001-06-05 2005-12-06 Sony Corporation Electron beam exposure mask and electron beam exposure method using the same

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