JPS579060B2 - - Google Patents
Info
- Publication number
- JPS579060B2 JPS579060B2 JP6944576A JP6944576A JPS579060B2 JP S579060 B2 JPS579060 B2 JP S579060B2 JP 6944576 A JP6944576 A JP 6944576A JP 6944576 A JP6944576 A JP 6944576A JP S579060 B2 JPS579060 B2 JP S579060B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6944576A JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6944576A JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52152174A JPS52152174A (en) | 1977-12-17 |
| JPS579060B2 true JPS579060B2 (xx) | 1982-02-19 |
Family
ID=13402833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6944576A Granted JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52152174A (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020054730A1 (ja) | 2018-09-14 | 2020-03-19 | 旭化成株式会社 | ポリオキシメチレン及びその製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2506637B2 (ja) * | 1985-08-02 | 1996-06-12 | 三菱電機株式会社 | パタ−ン形成方法 |
-
1976
- 1976-06-14 JP JP6944576A patent/JPS52152174A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020054730A1 (ja) | 2018-09-14 | 2020-03-19 | 旭化成株式会社 | ポリオキシメチレン及びその製造方法 |
| KR20210008529A (ko) | 2018-09-14 | 2021-01-22 | 아사히 가세이 가부시키가이샤 | 폴리옥시메틸렌 및 그 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52152174A (en) | 1977-12-17 |