JPS52152174A - Method of hardening treatment for aqueousssoluble resist pattern - Google Patents
Method of hardening treatment for aqueousssoluble resist patternInfo
- Publication number
- JPS52152174A JPS52152174A JP6944576A JP6944576A JPS52152174A JP S52152174 A JPS52152174 A JP S52152174A JP 6944576 A JP6944576 A JP 6944576A JP 6944576 A JP6944576 A JP 6944576A JP S52152174 A JPS52152174 A JP S52152174A
- Authority
- JP
- Japan
- Prior art keywords
- aqueousssoluble
- resist pattern
- hardening treatment
- hardening
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6944576A JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6944576A JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52152174A true JPS52152174A (en) | 1977-12-17 |
JPS579060B2 JPS579060B2 (ja) | 1982-02-19 |
Family
ID=13402833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6944576A Granted JPS52152174A (en) | 1976-06-14 | 1976-06-14 | Method of hardening treatment for aqueousssoluble resist pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52152174A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6231122A (ja) * | 1985-08-02 | 1987-02-10 | Mitsubishi Electric Corp | パタ−ン形成方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102516330B1 (ko) | 2018-09-14 | 2023-03-30 | 아사히 가세이 가부시키가이샤 | 폴리옥시메틸렌 및 그 제조 방법 |
-
1976
- 1976-06-14 JP JP6944576A patent/JPS52152174A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6231122A (ja) * | 1985-08-02 | 1987-02-10 | Mitsubishi Electric Corp | パタ−ン形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS579060B2 (ja) | 1982-02-19 |
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