JPS5786142A - Electrostatic capacity type reproducing stylus - Google Patents

Electrostatic capacity type reproducing stylus

Info

Publication number
JPS5786142A
JPS5786142A JP15949180A JP15949180A JPS5786142A JP S5786142 A JPS5786142 A JP S5786142A JP 15949180 A JP15949180 A JP 15949180A JP 15949180 A JP15949180 A JP 15949180A JP S5786142 A JPS5786142 A JP S5786142A
Authority
JP
Japan
Prior art keywords
thin film
substrate
sic
electrostatic capacity
stylus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15949180A
Other languages
Japanese (ja)
Inventor
Yoshitsugu Miura
Yoshihiko Noro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15949180A priority Critical patent/JPS5786142A/en
Publication of JPS5786142A publication Critical patent/JPS5786142A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/06Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using record carriers having variable electrical capacitance; Record carriers therefor
    • G11B9/07Heads for reproducing capacitive information
    • G11B9/075Heads for reproducing capacitive information using mechanical contact with record carrier, e.g. by stylus

Abstract

PURPOSE:To improve the mass-producibility of electrostatic capacity type reproducing styluses used for video disk players, by using at least one of SiC, Bn and transparent carbon for the tip part of the stylus. CONSTITUTION:On a C-surface sapphire single crystal (5mm. thickness) 8 as a substrate, an SiC thin film (3mum thickness) 9 is formed (a) by RF sputtering and a keel part 10 is formed (b) by photoetching; and the substrate is cut (c) by a multiwire saw along a cutting line 11, and polished (d) until the cut surface is coincident with the flank of the keel part 10, and Ti is vapor-deposited on the polished surface to about 0.2mum to form an electrode 12, thus obtaining a reproducing stylus. The said method facilitates wafer processing by ordinary IC manufacture process and improves work precision, and there is no limitation on the base substrate. Using a BN thin film or transparent carbon film instead of the SiC thin film results in nearly the same effect.
JP15949180A 1980-11-14 1980-11-14 Electrostatic capacity type reproducing stylus Pending JPS5786142A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15949180A JPS5786142A (en) 1980-11-14 1980-11-14 Electrostatic capacity type reproducing stylus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15949180A JPS5786142A (en) 1980-11-14 1980-11-14 Electrostatic capacity type reproducing stylus

Publications (1)

Publication Number Publication Date
JPS5786142A true JPS5786142A (en) 1982-05-29

Family

ID=15694920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15949180A Pending JPS5786142A (en) 1980-11-14 1980-11-14 Electrostatic capacity type reproducing stylus

Country Status (1)

Country Link
JP (1) JPS5786142A (en)

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