JPS5785238A - Reaction tube - Google Patents
Reaction tubeInfo
- Publication number
- JPS5785238A JPS5785238A JP16162780A JP16162780A JPS5785238A JP S5785238 A JPS5785238 A JP S5785238A JP 16162780 A JP16162780 A JP 16162780A JP 16162780 A JP16162780 A JP 16162780A JP S5785238 A JPS5785238 A JP S5785238A
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- boat
- pulley
- exterior
- inner reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16162780A JPS5785238A (en) | 1980-11-17 | 1980-11-17 | Reaction tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16162780A JPS5785238A (en) | 1980-11-17 | 1980-11-17 | Reaction tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5785238A true JPS5785238A (en) | 1982-05-27 |
Family
ID=15738772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16162780A Pending JPS5785238A (en) | 1980-11-17 | 1980-11-17 | Reaction tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5785238A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02137317A (ja) * | 1988-11-18 | 1990-05-25 | Nec Corp | 抵抗線加熱炉 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53148275A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Method of treating silicon wafer |
JPS55110033A (en) * | 1979-02-19 | 1980-08-25 | Fujitsu Ltd | Epitaxial layer-growing device |
-
1980
- 1980-11-17 JP JP16162780A patent/JPS5785238A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53148275A (en) * | 1977-05-30 | 1978-12-23 | Toshiba Ceramics Co | Method of treating silicon wafer |
JPS55110033A (en) * | 1979-02-19 | 1980-08-25 | Fujitsu Ltd | Epitaxial layer-growing device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02137317A (ja) * | 1988-11-18 | 1990-05-25 | Nec Corp | 抵抗線加熱炉 |
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