JPS53148275A - Method of treating silicon wafer - Google Patents
Method of treating silicon waferInfo
- Publication number
- JPS53148275A JPS53148275A JP6294277A JP6294277A JPS53148275A JP S53148275 A JPS53148275 A JP S53148275A JP 6294277 A JP6294277 A JP 6294277A JP 6294277 A JP6294277 A JP 6294277A JP S53148275 A JPS53148275 A JP S53148275A
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- treating silicon
- treating
- wafer
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6294277A JPS53148275A (en) | 1977-05-30 | 1977-05-30 | Method of treating silicon wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6294277A JPS53148275A (en) | 1977-05-30 | 1977-05-30 | Method of treating silicon wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53148275A true JPS53148275A (en) | 1978-12-23 |
Family
ID=13214848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6294277A Pending JPS53148275A (en) | 1977-05-30 | 1977-05-30 | Method of treating silicon wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148275A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5785238A (en) * | 1980-11-17 | 1982-05-27 | Seiko Epson Corp | Reaction tube |
JPH0273625A (en) * | 1988-09-08 | 1990-03-13 | Nec Corp | Equipment for manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5162662A (en) * | 1974-11-28 | 1976-05-31 | Fujitsu Ltd | Handotaikibanno shorihoho |
-
1977
- 1977-05-30 JP JP6294277A patent/JPS53148275A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5162662A (en) * | 1974-11-28 | 1976-05-31 | Fujitsu Ltd | Handotaikibanno shorihoho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5785238A (en) * | 1980-11-17 | 1982-05-27 | Seiko Epson Corp | Reaction tube |
JPH0273625A (en) * | 1988-09-08 | 1990-03-13 | Nec Corp | Equipment for manufacture of semiconductor device |
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