JPS5775533U - - Google Patents
Info
- Publication number
- JPS5775533U JPS5775533U JP15222980U JP15222980U JPS5775533U JP S5775533 U JPS5775533 U JP S5775533U JP 15222980 U JP15222980 U JP 15222980U JP 15222980 U JP15222980 U JP 15222980U JP S5775533 U JPS5775533 U JP S5775533U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15222980U JPS5775533U (de) | 1980-10-27 | 1980-10-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15222980U JPS5775533U (de) | 1980-10-27 | 1980-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5775533U true JPS5775533U (de) | 1982-05-10 |
Family
ID=29511535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15222980U Pending JPS5775533U (de) | 1980-10-27 | 1980-10-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5775533U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858730A (ja) * | 1981-10-05 | 1983-04-07 | Hitachi Ltd | 投影露光装置 |
JP2008233932A (ja) * | 2003-06-30 | 2008-10-02 | Asml Holding Nv | フラットパネルディスプレイ製造用露光システムおよびフラットパネルディスプレイ製造用ユニット拡大環状光学系 |
-
1980
- 1980-10-27 JP JP15222980U patent/JPS5775533U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858730A (ja) * | 1981-10-05 | 1983-04-07 | Hitachi Ltd | 投影露光装置 |
JP2008233932A (ja) * | 2003-06-30 | 2008-10-02 | Asml Holding Nv | フラットパネルディスプレイ製造用露光システムおよびフラットパネルディスプレイ製造用ユニット拡大環状光学系 |