JPS5772329A - Transfer controller of exposed material - Google Patents

Transfer controller of exposed material

Info

Publication number
JPS5772329A
JPS5772329A JP14916780A JP14916780A JPS5772329A JP S5772329 A JPS5772329 A JP S5772329A JP 14916780 A JP14916780 A JP 14916780A JP 14916780 A JP14916780 A JP 14916780A JP S5772329 A JPS5772329 A JP S5772329A
Authority
JP
Japan
Prior art keywords
difference
target position
stage
difference calculator
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14916780A
Other languages
Japanese (ja)
Other versions
JPS5823741B2 (en
Inventor
Tomeo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14916780A priority Critical patent/JPS5823741B2/en
Publication of JPS5772329A publication Critical patent/JPS5772329A/en
Publication of JPS5823741B2 publication Critical patent/JPS5823741B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To simplify a controller by the composition of such devices as resistors in which a present position and a target position of a stage are stored respectively, a difference calculator which calculates difference between outputs of respective resistors and a servo motor driven by the output of the difference calculator. CONSTITUTION:When data of a target position are set in a resistor 1 a difference calculator 4 puts out data of a difference between the target position and a present position of a stage. Then an automatic speed adjusting circuit 8 selects a suitable speed control pattern according to these difference data and controls a servo motor 10 through a multiplication type D/A converter 7 and transfers the stage to the target position. And when a distance between the present position and the target position is shortened to a certain pre-determined value all of upper bits of the output signal of the difference calculater 4 becomes zero and an output of an OR circuit 5 also becomes null. Then a switching circuit 6 operates and lower bits of the difference calculator 4 are supplied to the converter 7 through the switching circuit 6, so that the motor speed is reduced and the stage reaches to the target position.
JP14916780A 1980-10-24 1980-10-24 Movement control device for exposed material Expired JPS5823741B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14916780A JPS5823741B2 (en) 1980-10-24 1980-10-24 Movement control device for exposed material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14916780A JPS5823741B2 (en) 1980-10-24 1980-10-24 Movement control device for exposed material

Publications (2)

Publication Number Publication Date
JPS5772329A true JPS5772329A (en) 1982-05-06
JPS5823741B2 JPS5823741B2 (en) 1983-05-17

Family

ID=15469252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14916780A Expired JPS5823741B2 (en) 1980-10-24 1980-10-24 Movement control device for exposed material

Country Status (1)

Country Link
JP (1) JPS5823741B2 (en)

Also Published As

Publication number Publication date
JPS5823741B2 (en) 1983-05-17

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