JPS5770613A - Ultrasonic wire bonding apparatus - Google Patents

Ultrasonic wire bonding apparatus

Info

Publication number
JPS5770613A
JPS5770613A JP55147171A JP14717180A JPS5770613A JP S5770613 A JPS5770613 A JP S5770613A JP 55147171 A JP55147171 A JP 55147171A JP 14717180 A JP14717180 A JP 14717180A JP S5770613 A JPS5770613 A JP S5770613A
Authority
JP
Japan
Prior art keywords
value
vibrator
capillary tip
driving device
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55147171A
Other languages
Japanese (ja)
Other versions
JPS6042019B2 (en
Inventor
Hitoshi Fujimoto
Koichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP55147171A priority Critical patent/JPS6042019B2/en
Publication of JPS5770613A publication Critical patent/JPS5770613A/en
Publication of JPS6042019B2 publication Critical patent/JPS6042019B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/83General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/832Reciprocating joining or pressing tools
    • B29C66/8322Joining or pressing tools reciprocating along one axis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/95Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94
    • B29C66/959Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 characterised by specific values or ranges of said specific variables
    • B29C66/9592Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 characterised by specific values or ranges of said specific variables in explicit relation to another variable, e.g. X-Y diagrams

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

PURPOSE:To compose the titled apparatus of high reliability without using the mechanical contact by utilizing damping of output current from the ultrasonic oscillator to the vibrator in time of contact of the capillary tip to the bonding face. CONSTITUTION:The vibrator 1 is vibrated by the ultrasonic output potential from the ultrasonic oscillator 4 via the transformer 5 and related in the arrow direction around the sustaining shaft 3 by the driving device (not illustrated) and the metal fine wire 12 is bonded to the bonding face 12a of a pellet 11 by pushing with the capillary tip 2. The value of applied current to the vibrator 1 is detected as the potential value by the detector 22 on said apparatus, this value is compared to the standard potential value. When the difference exceeds the set value, the driving device is controlled by the controller 23 and the descent of the capillary tip 2 is stopped and the bonding operation is made to do.
JP55147171A 1980-10-20 1980-10-20 Ultrasonic wire bonding equipment Expired JPS6042019B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55147171A JPS6042019B2 (en) 1980-10-20 1980-10-20 Ultrasonic wire bonding equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55147171A JPS6042019B2 (en) 1980-10-20 1980-10-20 Ultrasonic wire bonding equipment

Publications (2)

Publication Number Publication Date
JPS5770613A true JPS5770613A (en) 1982-05-01
JPS6042019B2 JPS6042019B2 (en) 1985-09-19

Family

ID=15424182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55147171A Expired JPS6042019B2 (en) 1980-10-20 1980-10-20 Ultrasonic wire bonding equipment

Country Status (1)

Country Link
JP (1) JPS6042019B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989370A (en) * 1993-11-09 1999-11-23 Sca Hygiene Products Aktiebolag Method and arrangement for ultrasonic welding

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989370A (en) * 1993-11-09 1999-11-23 Sca Hygiene Products Aktiebolag Method and arrangement for ultrasonic welding

Also Published As

Publication number Publication date
JPS6042019B2 (en) 1985-09-19

Similar Documents

Publication Publication Date Title
JPS5770613A (en) Ultrasonic wire bonding apparatus
FR1487050A (en) Method and apparatus for bonding tiny elements
JPS5230162A (en) Semiconductor device
JPS54101668A (en) Ultrasonic wire bonding method
JPS55105339A (en) Ultrasonic bonding method
CA2031953A1 (en) Friability testing apparatus
JPS52131785A (en) Ultrasonic wire bonding device
JPS51126063A (en) Wire bonding method
JPS521659A (en) Ultrasonic wave sieving machine for finely divided particles
JPS5753969A (en) Semiconductor device
JPS56142647A (en) Wire bonding method
JPS55128841A (en) Ultrasonic drive device
JPS5527619A (en) Die bonding device
GB1467284A (en) Ultrasonic wave generatorp
JPS57211561A (en) Gas rate sensor
JPS57133643A (en) Bonding method
JPS6046541B2 (en) Ultrasonic bonding equipment
JPH03152947A (en) Wire bonding method
JPS54108574A (en) Ultrasonic bonding device
JPS53104166A (en) Ultrasonic wire bonding method and unit used in this method
JPS53149615A (en) Driving device of step motor
JPS5623750A (en) Ultrasonic wire bonding apparatus
JPS51144555A (en) Oscillation circuit
JPS523422A (en) Ultrasonic spray device
JPS57211740A (en) Wire bonder