JPS5770433A - Electronic spectroscope - Google Patents

Electronic spectroscope

Info

Publication number
JPS5770433A
JPS5770433A JP55147978A JP14797880A JPS5770433A JP S5770433 A JPS5770433 A JP S5770433A JP 55147978 A JP55147978 A JP 55147978A JP 14797880 A JP14797880 A JP 14797880A JP S5770433 A JPS5770433 A JP S5770433A
Authority
JP
Japan
Prior art keywords
analyzer
sample
electron
photoelectron
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55147978A
Other languages
Japanese (ja)
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP55147978A priority Critical patent/JPS5770433A/en
Publication of JPS5770433A publication Critical patent/JPS5770433A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To make remarkably bringhtness of electron optics brighter, by forming spectral image of energy of a sampling surface on the outlet slit of a photoelectronic energy analyzer through limitting the X-ray irradiating area on the sample. CONSTITUTION:An X-ray flux 2 from an X-ray source 1 irradiates a sample 3 through a diaphragm 11 which limits the X-ray irradiating area on the sample 3 to become smaller, and a photoelectron flux radiated from the sample 3 is directly made incident to an electronic energy analyzer 8. Moreover, since the deflection angle of the analyzer 8 is <180 deg., the image on the photoelectron radiating plane of the sample 3 is formed after spectral diffraction on an outlet slit 9 apart from the outlet end face of the analyzer 8, and detected by an electron detector 10. Correction electrodes 12 and 12' prevent disturbances in the electric field at both end faces of the analyzer 8 and, at the same time, the electrode 12 limits the expanding angle of the incident photoelectron flux to the analyzer 8. Since an electron lens is eliminated in this way, corrections of measured values are not required, and no probrems about the secondary electron generated at the inner surface of the electron lens occur, therefore S/N is improved.
JP55147978A 1980-10-21 1980-10-21 Electronic spectroscope Pending JPS5770433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55147978A JPS5770433A (en) 1980-10-21 1980-10-21 Electronic spectroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55147978A JPS5770433A (en) 1980-10-21 1980-10-21 Electronic spectroscope

Publications (1)

Publication Number Publication Date
JPS5770433A true JPS5770433A (en) 1982-04-30

Family

ID=15442394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55147978A Pending JPS5770433A (en) 1980-10-21 1980-10-21 Electronic spectroscope

Country Status (1)

Country Link
JP (1) JPS5770433A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100353A (en) * 1983-08-16 1985-06-04 フィソンズ　ピーエルシー Charged particle energy spectrometer
KR20190010548A (en) 2016-05-20 2019-01-30 소니 주식회사 Light source device and projection display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60100353A (en) * 1983-08-16 1985-06-04 フィソンズ　ピーエルシー Charged particle energy spectrometer
KR20190010548A (en) 2016-05-20 2019-01-30 소니 주식회사 Light source device and projection display device

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